High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

New

B1 A B 2 x P 1(IN), 2(OUT) port 2 x M5 Thread depth N 2 x P 1(IN), 2(OUT) port B 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal Cable 0.24 to 0.47 Q F D D S G1/2 Qp0.08 F 1.34 (1.73) 1.26 R 1.24 0.99 T C K C R E E Sp0.08 A A B1 2 x P 1(IN), 2(OUT) port B1 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H G1/2 J H (inch) Grommet Grommet (with surge

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

2 !

HRX-OM-X071

Fig 2-2 Part number of product(2/2) 2.1 Model Number of Product HRR Series 2-2 HRX-OM-X071 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts 2.2.1 HRR050-A-20/40(Air cooled type) In the case of option Z, without bypass valve Fig 2-3 Names of the parts Table 2-1 Accessory list 2 copies Operation manual (English 1 copy/ Japanese 1 copy) Power supply connector 1 pc.

CRB2/CRBU2/CRB1

Inertial moment . 3.5 x 10-6 kgm2 2 t E = I 2, = 1 2 Rotation time . 0.12s/90 CRB2BW, CRBU2W20 are selected in this case. 2.

Title not found

/4 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 25 180 1-1/4 1-1/2 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 30 240 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 3 40 300 1-1/2 2 2 2 2 2-1/2 2-1/2 3 3 50 360 1-1/2 2 2 2 2-1/2 2-1/2 2-1/2 3 3 60 450 2 2 2 2-1/2 2-1/2 3 3 3 3-1/2 75 600 2 2-1/2 2-1/2 2-1/2 3 3 3 3-1/2 4 100 750 2 2-1/2 2-1/2 3 3 3 3-1/2 3-1/2 4 125 Pneumatic Pressure Loss Figures in the table below are approximate

Title not found

/4 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 25 180 1-1/4 1-1/2 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 30 240 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 3 40 300 1-1/2 2 2 2 2 2-1/2 2-1/2 3 3 50 360 1-1/2 2 2 2 2-1/2 2-1/2 2-1/2 3 3 60 450 2 2 2 2-1/2 2-1/2 3 3 3 3-1/2 75 600 2 2-1/2 2-1/2 2-1/2 3 3 3 3-1/2 4 100 750 2 2-1/2 2-1/2 3 3 3 3-1/2 3-1/2 4 125 Pneumatic Pressure Loss Figures in the table below are approximate

SYJ300/500/700

(For details, refer to page 4-4-11.) 4-4-6 7 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Construction (A) 2 (A) 2 N.C.

100

2 !3 !

MHF2

MHF2-16D1 Scale: 50% 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread

Series PF2W Digital Flow Switch For Water

(In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.)

C76

bronze 2 2 2 2 2 2 2 2 1 2 !

C76

bronze 2 2 2 2 2 2 2 2 1 2 !

IIIIIII

(kg) 11.46 (5.2) P.T. ln(mm) 0.12 (3) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.19 (5) '75 PSIG (5 Kgf/cm2) -ffi 2 WaY DIMENSIONS A B c D E F G H J K M 't.57 (40) 1 . 1 8 (30) 2.40 (61) 2.05 (52) o.87 (221 0.51 (13) 0.98 (251 0.63 (16) 1.06 (27\ 0.31 (8) 1 . 2 6 (32) Millimeters in Parentheses HOW TO ORDER NV[f220-N02-40 : 2 way; 2 portr/e" NPT WFoot Pedal NVM23O-NO2-40 : 3 way; 2 poft 1/4" NPT w

Mechanical Valves Series NVM, NVFM, NVZNI

(kg) 11.46 (5.2) P.T. ln(mm) 0.12 (3) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.19 (5) '75 PSIG (5 Kgf/cm2) -ffi 2 WaY DIMENSIONS A B c D E F G H J K M 't.57 (40) 1 . 1 8 (30) 2.40 (61) 2.05 (52) o.87 (221 0.51 (13) 0.98 (251 0.63 (16) 1.06 (27\ 0.31 (8) 1 . 2 6 (32) Millimeters in Parentheses HOW TO ORDER NV[f220-N02-40 : 2 way; 2 portr/e" NPT WFoot Pedal NVM23O-NO2-40 : 3 way; 2 poft 1/4" NPT w

Speed Controller with One-touch Fitting

2 1/2 4 Fluororesin (TLM, TILM Series) (TH, TIH Series) 1/8 2 R 1/4 3/8 3 NPT 1/2 4 2 1/8 2 2 2 1/4 Gasket seal Uni Brass/Steel wire 1/4 3 3/8 2 1/2 4 1 Without sealant type can be selected as a standard option. 2 Universal type is not available.

Multi-Axis Step Motor Controller

Wire color 1 Orange (Black 1) 6 Orange (Black 2) 11 Orange (Black 3) 16 Orange (Black 4) 21 Orange (Red 1) 26 Orange (Red 2) 31 Orange (Red 3) 36 Orange (Red 4) 2 Gray (Black 1) 7 Gray (Black 2) 12 Gray (Black 3) 17 Gray (Black 4) 22 Gray (Red 1) 27 Gray (Red 2) 32 Gray (Red 3) 37 Gray (Red 4) 3 White (Black 1) 8 White (Black 2) 13 White (Black 3) 18 White (Black 4) 23 White (Red 1) 28 White

3 Port Air Operated Valve Series SYJA300

(Value in the initial state) VA Body ported SA Series SYJA500 VA With Bracket VM VR Air operated valve type SYJA5 2-M5-F, SYJA7 2-01-F 1 2 1 2 Note) Bracket is not mounted.

Basic Type/Direct Mount Type

Description Material Note Note Hard anodized Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Stainless steel NBR Special resin Special resin Special resin NBR Special resin Cylinder tube Gasket Wear ring A Wear ring B Wear ring C Piston seal Lubretainer 24 Note 2) 1 2a 2b 3a 3b 4 6: not available 25 Note 2) 26 Note 2) 27 Note 2) 28 Note 2) 6: not available

LECA6_C

CN1(P.18) 4.2 CN2CN3: LE-CA-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O (P.27) 6.3 (P.24) 17 - 5.