42

Stations (1 to 12) C C kit (Plug lead type) 6.

HRX-OM-Y098

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.7.3 Battery . 1-6 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRL-A-20 (Air cooled type) . 2-2 2.3 Function of Parts . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1

Fieldbus System

) 1 (P) 5 (R1) Function 3-position double check Nil R Standard (1 W) External pilot Low wattage type (0.5 W) Y Note 2) (A) 4 (B) 2 6 3 (R2) 1 (P) 5 (R1) Note 1) When two or more symbols are specified, indicate them alphabetically.

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 @1 !8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

VQ5000

5 6 7 8 9 1 1 2 3 4 5 6 7 8 9 Double Double Double Double Double Double Double SI unit SI unit Single Single Single Single Single Single Single Single Single Single Single SI unit output no.

Rotary Actuator/Vane Type

1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

Stainless Steel One-touch Fittings Series KG

A M Weight (g) M5 D L P Nylon Urethane KGU04-01 KGU04-M5 M5 0.8 4 11 20 13 12 22 35 10.4 36 38 40 2.2 2.2 39.5 42 46 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 M5 0.8 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 42.5 45.5 49 51 13 1 8 1 4 3 8 1 8 17 12.8 6 12.8 13.4 13.4 14 17 52.5 55.5 56.5 25.6 17.7 16 24 36 17 15.2 1 4 KGU08-02 8 18.5 15.2

JXCx-OMT0005CN

-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (4) + B-1 4 A-1 5 + B-3 1 A-3 2 8 (14.2) 1 2 (2) B1 A1 17.7 1 (14) A6 B6 5 6 10.2 (3) 1 2 A1 B1 (18) 5.7 A3 B3 4 15 16 (11) 30.7 L 15.4 ()[820m] 1 2 LE CP B 2 A B-1 L 1 A A-1 6 B B-2 8 8m * 5 B A-2 3 COM-A/COM B-3 A 10m * 4 COM-B/ A-3 B 15m * 3 Shield C 20m * 12 Vcc B-4 13 GND A-4 * 7 A B-5 6 A A-5 * 9 B B-6 8 B A-6 3 4

SFOD-OMT0005CN

2 (L) A A-1 1 B B-2 6 8 8m * B A-2 5 COM-A/COM B-3 3 A 10m * COM-B/ A-3 4 B 15m * (3) Shield C 20m * Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) (2) 1 2 (5.5) (14) (1) B1 A1 5 6 (17.7) (3) 2 1 (18) A6 B6 (6.3) 15 16 (11) (30.7) -58- 14.3 ()[5m ] (1) (2) LE CP B A B-1 2 A A-1 1 (L) B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m

SFOD-OMT0009CN

10.5 [5m ] L E C P *B* (a) (b) 2 A B-1 L 1 A A-1 (b) 6 A B-1 B B-2 1 1.5m 5 A A-1 B A-2 3 3 3m B B-2 COM-A/COM B-3 4 B A-2 COM-B/A-3 5 5m (c) COM-A/COM B-3 Shield COM-B/ A-3 Vcc B-4 12 GND A-4 13 Vcc B-4 A B-5 7 GND A-4 A A-5 6 A B-5 B B-6 9 A A-5 S B A-6 8 (d) B B-6 3 B A-6 (a) + B-1 4 A-1 5 + B-3 1 2 A-3 (a) (8) (14.2) B1 A1 (b) 2 1 (17.7) (14) (18) (10.2) 6

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 5/16" 3/16" 1/4" 1/8" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow Direction Symbols on Body Meter-out type Meter-in

5 Port Air Operated Valve Series SYA3000/5000/7000 1

EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

Speed Controller with One-touch Fitting

Applicable tubing material Metal parts material Metric size Inch size Seal method Port size Body size 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 12 10 8 6 4 3.2 2 2 Gasket seal M5 x 0.8 1 2 10-32UNF 2 1/8 2 2 2 1/4 R Sealant 1 1/4 NPT 3 3/8 2 1/2 4 2 Brass/Steel wire Nylon (T, TIA Series) 1/8 2 2 1/4 Stainless steel Soft nylon (TS, TISA Series) G 1/4 3 3/8 Face seal Polyurethane (T, TIUB Series)

Environment

20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 55 30 Note 1) Range within which the rod can move.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 10 10 19.5 22.8 12.8 10 D2 H 8 15.2 18 26 21.5 26.3 12 Connection threads (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 17 20.9 12 46 58

Environment

1 Controller/Driver type*1 !

Possible to transfer a workpiece at low-speed.

1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !