MG

1 !2 !3 !4 !5 !6 !7 !8 !

LG1H

depth 8 35 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 300 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

SYJ300/500/700

Type of actuation Series Port size 1 2 5 7 M5 01 Normally closed Normally open 3 port SYJ500 SYJ700 M5 x 0.8 1/8 (SYJ700 only) (For manifold type 20, 21R) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SYJ 2 5 Y M5 1 5 Body ported 5 1 SYJ 4 5 Y 01 Base mounted Body

CXS

3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

JXCx-OMT0061CN

5.5) B1 A1 5 6 (17.7) (3 ) 2 1 (18) B6 A6 ( 6.3) 16 15 (11) (30.7) 66 - 15.3 [5m ] (1) (2 ) ---A B-1 2 L A A-1 1 B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-1 5 (-) A-1 1 (+) B-3 2 A-3 (8) (1) (2 ) (B 1) (14.2) A1 2 1 (17.7) (14) (18) 6 (10.2) A6 B6 5

New

45 37 41 46 48 13.5 Electrical entry Grommet Grommet (with surge voltage suppressor) DIN terminal Port size P Model Q R Q R Q R S 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 29.5 29.5 32 32 63.5 (70) 68.5 (74.5) 76.5 (83) 79.5 (85) 32.5 32.5 35 35 50 (56.5) 55 (61) 63 (69.5) 66 (71.5) 67 67 69.5 69.5 55.5 (62) 60.5 (66.5) 68.5 (75) 71.5 (77) 55 55 57.5 57.5 ( ) are the dimensions

High Vacuum Angle Valve, XL Series

-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

1 4 std. 3 8 std. 3 4 1 std. 1 std. 1 2 2 std. 2 3 5 6 8 9 B With bracket 1 Male thread D Drain piping (Except AMC220) (1) (2) 2 Female thread Note 1) Female thread: Available only AMC220, 320, 520.

Bag Filter

Applicable model Note 1) Cover 1 FGFC/R Carbon steel 1 FGF1 Cover 1 Stainless steel 1 FGFS/L Stainless steel 1 FGF1 Case 2 Stainless steel 1 Case Note 2) 2 FGFC/R Carbon steel 1 FGF1A FGF-BT01 1 Basket 3 Stainless steel FGF3A-40 3 FGF1B FGF-BT02 1 Stainless steel BT-3S FGF5A-60 5 FGF1A EJ501S1 3 Basket Element 4 Polyester FGF3B-40 3 FGF1B EJ601S1 Stainless steel BT-4S FGF5B-60 5 FGF1

Modular Type Filter Regulator Series AW

38.5 42.5 42.5 V 30 31 35.5 37 U 2.3 2.3 2.3 2.3 T 55 53 70 70 S 15.4 8 10.5 10.5 Q 5.4 6.5 8.5 8.5 P 44 46 54 56 N 34 40 54 54 M 30 41 50 50 K 5 3.5 1.5 1.2 J 27 30.5 38.5 38.5 H 63 66 76 76 E 40 57 73 73 D 52 59 75 75 C 73 86 92 93 B 160 201 239 242 A 40 53 70 75 G 40 55 80 80 AW20K AW30K AW40K AW40K-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification With barb fitting With drain

39

1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'

Series CQ2

Width across flats 55 M36 x 1.5 21 47 50 64 200 30 30 2-Rc 1/2 (port size) 2 x 4-31.5 depth of counter bore 26 40 62 62 4-19 through 182 226 3 5.5 Flat washer 4 pcs. Note 1) 36 2 x 4-M22 x 2.5 thread depth 38 109 + Stroke 17 M24 x 3 effective thread depth 33 126 + Stroke 182 226 Width across flats 55 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

65 50 63 80 100 70.5 82.5 101 121 5 5 6 6 55 (67) 55 (67) 60 (74) 60 (74) 75.5 75.5 95 95 157.5 (169.5) 157.5 (169.5) 188.5 (202.5) 192 (206) 4.5 4.5 4.5 6 66 82 100 120 5 5 5 7 17.5 17.5 20 20 22 22 28.5 30 11 13 14 16 86 106 125 150 Other dimensions are the same as basic type.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimensions 3 x 7.2 (=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black Main circuit 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2 mm.

Large Bore Compact Cylinder Series CQ2

Width across flats 55 M36 x 1.5 21 47 50 64 200 30 30 2-Rc 1/2 (port size) 2 x 4-31.5 depth of counter bore 26 40 62 62 4-19 through 182 226 3 5.5 Flat washer 4 pcs. Note 1) 36 2 x 4-M22 x 2.5 thread depth 38 109 + Stroke 17 M24 x 3 effective thread depth 33 126 + Stroke 182 226 Width across flats 55 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

~"I-I ~"H 5 . { . IS 1I 5~.tIono{ SOL. 151-1 5 ,1onl {~20 (-) 5 ... tiono {~201-1 ~B(+I CS(+I COM '31+1 COM '31+1 SOL.A2, I _ I SOl.A2, I I ~171-1 So ... lon. { OL. 'S I I ~'71-1 s.totion.{ SOL.

Power Clamp Cylinder

1 2 3 4 5 6 7 8 9 10 11 12 13 80 0 5 10 15 20 25 30 35 40 45 50 55 60 Load capacity (N) Load capacity (pounds) 63 300 12.0 280 11.0 Distance from pivot point (inches) 260 Distance from pivot point (mm) 10.0 240 9.0 220 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 4.00 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Load capacity (N) Load capacity

LEC-OM02904

m i m 4 8 1 . 5 1 6 1 ( 1 8 . 5 5 ) m a x .