Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc
thread (mm) A B C D E F G H J K M P Q R S L Bore size (mm) 20 9.5 depth 5.4 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 43 1/8 16.5 6 11.5 25 9.5 depth 5.4 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 49 1/8 17 8 12 32 11 depth 6.5 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 63 1/4 19.5 10 19.5 40 14 depth 8.6 75 65 10 22.4 19 M16 x 2 20 7 52 9 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24
depth 4.5 S (13 + ST) 10 (Opposite side: Same) (Piping port) (Opposite side: Same) 3 8 6 22.5 11 Z (10 + 1/2ST) (13) 4 (mm) Z S SS ZZ Model CXS6-10 CXS6-20 CXS6-30 CXS6-40 CXS6-50 Stroke 10 15 23 55 68.5 20 20 33 65 78.5 30 25 43 75 88.5 40 30 53 85 98.5 50 35 63 95 108.5 566 Series CXS Dual Rod Cylinder Basic Type Dimensions: 10, 15 ZZ Stroke J 9 SS B D I Z L M 1 1 G 0.2 0.2 0.2 G H A C
(P) 5(EA) 3(EB) 1(P) JIS symbol 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 3 position closed center 3 position closed center/exhaust center/pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position exhaust center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position pressure center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB
Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted 32 Series SX3000/5000/7000 Dimensions: Series SX3000 2 position
110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) 1 110 15 D-Z7/Z80 D-Y59/Y7P D-Y7W 115 110 105 15 1, 2 125 to 160 D-Y69/Y7PV D-Y7WV 95 90 10 100 D-Y7BAL 125 120 115 20 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.
17.6 169.9 98.4 88.0 931.1 1 46 55 -12M R 1 1/4 1012.9 100.4 87.7 MQR KKA9S-10M R 1 22.0 264.9 1680.7 125.5 115.1 -12M R 1 1/4 1758.1 127.5 114.8 1 1/4 63 69 25.1 344.9 T -14M R 1 1/2 1819.4 127.5 114.8 Female thread type (mm) Body size H Width across flats Min. bore size Model T Connection port size Mass g Effective area mm2 D L KKA3S-01F Rc 1/8 37.6 46.9 17 -02F 1/8 Rc 1/4 18.5 18.5 5.9
Rc 1/8 Vacuum pressure supply port(PV) 79 70 2 x 4.2 (Mounting hole) PV PD 30 16 11 9 9 1 3 63 6.5 8 1.2 Bracket A Bracket A 4 ZR1-FD 7.2 1 S Digital pressure switch for vacuum Suction filter Attachment D (75.8) 85 1 81 56 PV PD 3 78.8 (2000) Filter block D Note) 1 Dimensions for mounting bracket A 2 Dimensions for mounting spacer A Bracket A part no. : P3270153#1 (Standard accessory) Spacer
Port size Port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 13 11 13 39 17 17 17 15 17 43 G 1/4 G 1/4 21 21 941 Series PFM7/PFM5 Made to Order 3 Please contact SMC for detailed specifications, lead times and prices.
1/4 1 1/4 to 1 1/2 1 3/4 to 2 2 to 2 1/4 MHS MHC MHT MHY Impact load Clearance MHW -X 3.
E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x
E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x
E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x
E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x
SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)
Normal Close High Vacuum Solenoid Valve *1 RoHS Minimum operating pressure *1 Excluding grommet/AC *1 OUT side 1x10 6 Pa(abs) *1 Leakage Internal External 1.3x10 9 Pam3/s 1.3x10 11 Pam3/s Power consumption Fluid temperature 5 to 60C Size XSA [W] Previous model [W] 25% reduction Max. Max.
C10: 10 N11: 3/8" C12: 12 (Double sided type) ( ) 7 6 5 4 3 2 1 n D side Station U side VFR VQ7 M12 57.2 R R OUT 76.7 76.5 X 3 3 67.2 72 IN X B B B B B B B 49.5 46.2 P 12 P 12 25.6 30 25 A 1 A 1 A A A A A 10 13.5 M12 21.5 13 (7.5) 25 55 18 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 5/32" 6, 1/4" 8, 5/16" n: Stations L: Dimensions n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 L1
Refer to the Specific Product Precautions. 8H9 + 0.036 0 depth 9 Operating port Rc 1/8 (NPT 1/8, G 1/8) 9 8 x M6 x 1 thread depth 18.5 Note) A Operating direction 8H9 + 0.036 0 depth 9 (Insert) (Hexagon socket head taper thread plug) 98.6 126 55 8 50 37 Y 50 Y 50 10 43 209 Operating port Rc 1/8 (NPT 1/8, G 1/8) B Operating direction Operating direction (Hexagon socket head taper thread plug
-02 4.5 0.61 11 3 5 VX2360 0.8 0.6 0.6 0.8 VX2332-02 4.5 0.61 11 0.25 0.15 0.15 0.25 VX2242-02 6 1.05 19 0.45 0.35 0.35 0.45 VX2342-02 6 1.05 19 1 0.8 0.7 1 VX2-03 3 0.33 6 Steam 1.6 1.2 1 VX2322-03 3 0.33 6 0.45 0.3 0.3 0.45 VX2232-03 4.5 0.61 11 1 3/8 (10A) 0.8 0.6 0.6 0.87 VX2332-03 4.5 0.61 11 0.25 0.15 0.15 0.25 VX2242-03 6 1.05 19 0.45 0.35 0.35 0.45 VX2342-03 6 1.05 19 H O W T O O