CNA

12 10 8 25 to 500 M18 x 1.5 30 7 M8 x 1.25 18 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 25 to 600 MLGP M18 x 1.5 31 7 M10 x 1.25 18 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 32 to 600 M22 x 1.5 37 11 M12 x 1.75 22 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 41 to 750 RLQ M26 x 1.5 40 11 M12 x 1.75 26 40 37 116 41 160 1/4 1/4 92 30

5-Port Solenoid Valve

p. 141 p. 133 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 113 p. 103 p. 125 p. 124-1 p. 156-1 SY7 0 Type 11 SY5 0 Manifold Top ported Bottom ported Top ported From p. 41 p. 141 p. 133 p. 124-1 p. 156-1 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 103 p. 113 p. 125 SY7 0 SY3 3 Type 12 SY5 3 From p. 53 p. 124-5 p. 156-7 p. 111 p. 131 p. 139 p. 147 p. 155 p. 64 p. 53 p.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Standard stroke range (mm) Long stroke range (mm) Bore size (mm) B1 A C D E F GA GB H H1 I J K KA MM NA P S TA TB TC ZZ WA WB WH W CS1 AL 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 14 8 10 12 16 20 20 25 30 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 10(12) 35 5 6 6 8 11 11 13 16 26 M4 x 0.7 depth 7 5 6 8 10 14 18 18 22 26 M8 x 1.25 11 11 11 12 13 13 11 M5 x 0.8 106(114) 16 15(

KJ

19 41 41 19 20 42 69 30 47 74 69 76 147 72 78 149 11.11 14.29 11.11 14.29 11.11 14.29 11.11 14.29 17.46 12.7 14.29 17.46 9.6 10 17.5 15.5 1 8 43 37.5 43.5 38 44 40.5 46.5 48.5 43.5 49.5 51.5 56 58 64.5 58 60 66.5 10.4 10 16 3 18 5 32 11.4 10 16.5 3.5 19.5 3 16 K 1 4 4.6 17 13.2 10 20.5 M H 5 16 6 18.5 15.2 12 23.5 D Connection thread (with seal) 17.46 3 8 7 21 17.9 17 25.5 MS 22.23 Courtesy

A

30 24 ANA1-06 3/4 90 110 111 46 36 ANA1-10 1 160 180 132 50 41 ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871 271 86 70 D I M E N S

Best Pneumatics Vol. 14

33 24 41.5 30 29.5 2 (1) 2.5 65 132 5.5 3.2 50 143 28 50 110 14 7 35 41 55 28.5 64 13 184 7 4 71 0 146 31 50 110 7 14 35 55 41 66 30.5 7 4 71 10 3.5 187 183 36 75 145 9 18 72.5 40 50 35 74 12 222 9 4 88 3.5 185 36 75 155 9 18 40 77.5 50 35 12 74 224 9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 17.2 10.2 3.6 3.6 XLFV-25-2 46 21.4 10.2 3.6 3.6 XLFV-40-2 54.5 33.9 10.2 3.6 3.6 XLFV-50-2 71 35.3 12 4 2 XLFV-63-2 80.5 43.8 12 4 2 XLFV-80-2 90.5 59.8 12 4 2 13 A Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG

Modular F.R.L. Unit

33 24 41.5 30 2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 80 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 80 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 105 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 105 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 105 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 105 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316

Free Mount Cylinder Series CU

size (mm) Q QA P R T S Z S Z 15st 81 92 101 110 118 129 5 st 38 41 45 41 45 47 10 st 43 46 50 46 50 52 15 st 48 56 60 56 60 62 5 st 61 67 76 75 83 94 10 st 71 77 86 85 93 104 15 st 81 92 101 100 108 119 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5 st 61 67 76 85 93 104 10 st 71 77 86 95 103 114 -X 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth

Plug-in/Plug Lead: Single Unit

M5 ground screw 9 9 2n-Rc 1/2 4(A), 2(B) port VQ0 U side 34.5 VQ4 n X 12 X 12 VQ5 B 2 A 4 6 B B B B B B A A A A A A VQZ B 2 A 4 VQD 5 SMC SMC SMC SMC SMC B 2 A 4 4 L1 L2 B 2 A 4 3 B 2 A 4 2 P = 41 P = 41 B 2 A 4 1 Cable length (600 or 1500 mm) 58.5 34.5 48 68.5 Stations D side 42 16 15.5 61.8 133 22 51 69 117 2-Rc 1/8 (External pilot port) Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96

Modular F.R.L. Unit

33 24 41.5 30 132 143 28 50 110 28.5 64 13 4 71 7 7 14 55 35 41 0 184 146 31 50 110 30.5 10 66 4 71 7 7 14 35 55 41 187 3.5 183 36 75 145 35 74 12 4 88 9 18 9 40 50 72.5 222 3.5 185 36 75 155 74 35 4.6 12 88 9 9 18 40 77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4 117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84 13 6.4 117.5

Thermo-chiller

Cooling Capacity HRS100-A -20/40(50 Hz) HRS100-A -20/40(60 Hz) 14 14 12 12 Ambient temperature 90F (32C) Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 90F (32C) Ambient temperature 104F (40C) Ambient temperature 104F (40C) 8 8 6 6 4 4 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5]

MGP

Before tightening the plug, wrap pipe tape around it. 140 214 50 66 116 170 M12 x 1.75 M16 x 2 32 47 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 10 12 14 18 22 22 27 27 33 39 8 10 12 15 18 18 22 22 28 33 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 50 80 12 16 20 25 32 40 50 63 80 100 Correct tightening torque Nm 7 to

CG1

87 102 102 122 122 12 12 12 13 14 14 20 20 11 11 11 12 13 13 35 40 40 50 58 58 71 71 11 11 11 12 13 13 18 22 22 30 35 35 40 40 12 14 18 25 30 32 40 50 15.5 19.5 19.5 27 32 32 37 37 2 2 2 2 2 2 3 3 8 10 12 16 20 20 25 30 13 17 13 19 27 27 32 41 14 16.5 20 26 32 38 50 60 6 8 10 14 18 18 22 26 M5 Depth 7.5 M10 X 1.25 M5 Depth 8 M10 X 1.25 M14 X 1.5 M6 Depth 12 M8 Depth 16 M18 X 1.5 M10

Modular Type Lubricators Series AL

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

Series KP/KPQ/KPG

KPGR08-12 12 d 10 18.5 24 41 29 50.5 25.7 9 KPQR10-12 KPGR10-12 Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

KPGR08-12 12 d 10 18.5 24 41 29 50.5 25.7 9 KPQR10-12 KPGR10-12 Note 1) D indicates the maximum diameter.

25

min [ANR] per cartridge) 0 2 4 6 8 10 12 14 16 18 20 0 2 4 6 8 10 12 14 16 18 20 30 Hz Discharge time (s) Discharge time (s) 1 Hz 30 Hz 1 Hz 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) Supply pressure: 0.3 MPa (17.6 L/min [ANR] per cartridge) Supply pressure: 0.3 MPa (8.6 L/min [ANR] per cartridge) 12 12 10 10 Discharge time (s) Discharge

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

77.3 41 78.9 51.9 80.4 58.3 70 80.4 34.3 79.2 44.1 90 50A 77.1 31.1 82.8 41 84.4 51.9 85.9 58.3 70 85.9 34.3 84.7 44.1 34 Zero Differential Pressure Type Pilot Operated 2-Port Solenoid Valve JSXZ Series Differs depending on the voltage and electrical entry.

MY1

Applicable cylinder MY1B20 MY1B25 MY1B32 MY1B40 W 53 60 74 94 TT 6 (max. 12) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) T 6 7 12 12 S 40.8 46.7 67.3 67.3 h 3.2 3.5 4.5 4.5 FW 46 56 56 FH 12 16 16 FC 13 13 17 17 FB 33 43 43 F 4 6 6 6 EY 45.6 53.5 67 81.5 EC 5.8 6.5 8.5 9.5 EB 43 49 61 76 E 19 20 25 31 EA 9 10 12 15 RB1412 TT High load shock absorber + Adjusting bolt MY1B Bore size h Stroke