Piping: Base Mounted Common SUP Common EXH, Stations: 4 Stations, A B Port Size: NPT 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 5 Stations, A B Port Size: NPT 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: NPT 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: NPT 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: NPT 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: NPT 1/8

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 109 109 119 129 145 177 220 245 13-/22-MXQ1610 13-/22-MXQ1620

MXS

HA 40 40 40 25 36 72 76 MXS12L-10 MXS12L-20 MXS12L-30 MXS12L-40 MXS12L-50 MXS12L-75 MXS12L-100 125.5 179.5 3.11-31 Series MXS Dimensions MXS 16L/Symmetric style ZZ Z 0.5 36.5 Basic style 40 10 M 3.5(With stroke adjuster at extension end) 5H9 4 deep +0.030 0 5H9 4 deep +0.030 0 N -1 X F 2 21 2-M6 X 1 thread 10 deep 18 (With stroke adjuster at extension end) 20 F 4-M5 X 0.8 thread 7 deep 35

7ND9071en

Table 17 Ambient temperatures, ND9_Z Inmetro Variant type Ex ia IIC T4/T5/T6 Ga Ex ia IIC T4/T5/T6 Gb Ambient temperature ranges T6 T5 T4 ND91_Z -40 to +50 C -40 to +65 C -40 to +80 C ND91_Z/I02 -40 to +50 C -40 to +64 C -40 to +80 C ND91_Z/I09 -25 to +50 C -25 to +65 C -25 to +80 C ND91_Z/I45 -25 to +50 C -25 to +64 C -25 to +80 C Table 18 Ambient temperatures, ND9_Z Inmetro Variant type

CV/MVGQ

50 63 80 100 30 35 35 40 40 22 27 27 32 41 60 70 85 102 116 71 81 101 119 133 27 32 32 37 37 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 18 18 18 20 20 8 11 11 13 16 100 110 130 160 180 42 50 59 76 92 80 90 105 130 150 60 70 86 102 116 12 12 15 18 18 9 9 11.5 13.5 13.5 32 40 40 52 52 16 20 20 25 30 44 52 64 78 92 Up to 600 601 to 1000 MK(2) Up to 750 751 to 1000 Up

KR

3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 x 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) Dimensions in ( ) are the case of soft nylon tube.

LX

40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 1.3 0.3 0.3 0.1 0.1 1.3 80 80 1.3 0.7 0.7 0.2 0.2 0.1 0.1 Refer

Compact Cylinder with Air Cushion Series RQ

Y-G04 32, 40 10 18 IY-G04 42 14 22 30 M14 x 1.5 12 14 16 22 30 M14 x 1.5 12 14 36 41.6 10 18 42 +0.5 +0.3 +0.070 0 50, 63 I-G05 Y-G05 50, 63 14 22 IY-G05 56 18 28 40 M18 x 1.5 16 20 20 28 40 M18 x 1.5 16 20 44 50.6 14 22 56 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 28 IY-G08 71 21 38 50 M22 x 1.5 21 27 23 38 50 M22 x 1.5 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10

V

(i) Side Entry Single Sub-base for use with the Base Mounted Valve (Type 40). (ii) 2-10 Station Type 20 Mmanifold for use with the Body Ported Valve (Type 20). (iii) 2-10 Station Type 40 Side Entry Manifold for use with the Base Mounted Valve (Type 40). (iv) 2 10 Station Type 40 Bottom Entry Manifold for use with the Base Mounted Valve (Type 40).

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

EN EU CH H6 ER (Max.) 32 ES5032 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 ES5040 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 ES5050 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 ES5063 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 ES5080 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 100 ES5100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 139 Accessories CP96 Series Dimensions: Piston

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

MU

E1 NDH10 Size A1 E1 MM Size L1 L1 MM A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 X 1.25 M12 X 1.25 M14 X 1.5 M18 X 1.5 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 X 1.25 25 32 40 50, 63 25 32 40 50, 63 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 M12 X 1.25 M14 X 1.5 M18 X 1.5 Applicable pin NDH10 NL U1 U1 Part No. NO Part No.

CNG

1/8 26.5 2.5 73 154 12 40 20 15 10 6.6 35 4.5 49.4 48 22 28 59.4 3 12 M5 x 0.8 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 14 49 22 18 10 6.6 40 4.5 58.4 56 30 30 71.4 4 12 M6 x 1 Without rod boot With rod boot Bore size (mm) 20 25 32 40 l ZZ H Z e f h Z ZZ 35 190 211 30 16 55 210 231 0.25 x Stroke 229 40 207 228 30 17 62 250 40 214 238 35 17 62 236 260 50 241 (250) 269 (278) 35 17 70 261

SQ1000/2000

A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

7.5

262.5 275 275 88.3 95.8 103.3 110.8 118.3 125.8 133.3 140.8 148.3 155.8 163.3 170.8 178.3 185.8 193.3 200.8 208.3 215.8 223.3 230.8 238.3 245.8 253.3 20.5 23 19.5 22 18 20.5 23 19.5 22 18 20.5 23 19.5 22 18 20.5 23 19.5 22 18 20.5 23 19.5 19 Series SJ2000/3000 Dimensions: SJ3000 for Flat Ribbon Cable / PC Wiring SS5J3-60 D U (S, R, RS) 1 2 P J Stations (Pitch) P = 10 23.6 12.8 [External