Specification: Clean Series, Vacuum Suction, Bearing: Ball Bushing Bearing, Bore Size: 10mm, Stroke: 40mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (vacuum type), Port

Cylinder (Tube) Inner Diameter(φ): 15, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (vacuum type), Port

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Specification: 11 (Clean Series, Vacuum Suction), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 40mm

Specification: 11 (Clean Series, Vacuum Suction), Bearing: M (Slide Bearing), Bore Size: 6mm, Stroke: 40mm

Specification: 11 (Clean Series, Vacuum Suction), Bearing: L (Ball Bushing Bearing), Bore Size: 6mm, Stroke: 40mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 6mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 40mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: M (Slide Bearing), Bore Size: 10mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 40mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 40mm

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (vacuum type), Port

Cylinder (Tube) Inner Diameter(φ): 15, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (vacuum type), Port

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

1

Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).

2

) v Note 11) v Note 11) Note 1) Drain guide is NPT1/8 (applicable to the AFM20-A, AFD20-A) and NPT1/4 (applicable to the AFM30-A/40-A, AFD30-A/40-A).

Table of Contents

Therefore, also check the allowable load for the selected conditions. 6.1 10 16 20 25 32 40 MX 0.8 6.1 1.1 0.8 6.1 10.8 3.7 10.8 4.9 3.7 10.8 40 50 40 50 40 50 17.6 MTS 11 17.6 16 11 17.6 MY1H 27.5 23 27.5 26 23 27.5 30 30 30 39.2 MY 39 39.2 50 39 39.2 20 50 39 50 50 50 50 20 20 CY The above values are the maximum allowable values for moment and load.

Compact Hydraulic Cylinder

11 11 40 88 109 182 25 to 1400 21.5 15 40 M10 x 1.25 52 52 65 45 12 32 15 36 30 3/8 42 141 11 11 11 46 95 118 182 25 to 1400 12 15 1/3.5 stroke 50 M10 x 1.25 55 52 76 52 15 40 19 43 35 1/2 46 155 13 14 13 58 115 145 198 25 to 1400 15 15 63 M12 x 1.5 65 55 90 63 15 42 19 43 35 1/2 52 163 15 18 15 65 132 165 213 25 to 1500 15 20 80 M16 x 1.5 80 65 110 80 17 40 22 44 44 3/4 65 184 18 18 18

A

11 M5x0.8 20 106 35 25 ~300 19.5 22 16.5 10 14 2 12 12 31 M5x0.8 Depth 7.5 5 8 M10x1.25 29 18 69 11 11 M6x0.75 25 111 40 32 ~300 19.5 22 20 12 18 2 12 11 38 M5x0.8 Depth 8 5.5 10 M10x1.25 36 18 71 11 10 M8x1.0 40 32 113 40 ~300 27 30 26 16 25 2 13 12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13