90

Note) When ordering ejector without valve, select Nil for mounting. 04 KJH C2 Port size 04 06 03 07 !

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

16 47.5 38 44.5 37 25 20 22.5 17 21 25 22.5 19.5 47.5 38 47.5 38 52.5 48.5 64 58.5 78 70 44.5 10 5 22.5 19.5 18 21 47.5 44.5 25 9 21 16 21 16 24 21 32 24 41 32 25 20 25 20 29 25 37 29 49 37 21 47.5 25 19.5 44.5 22.5 17 22.5 17 24 22.5 26.5 24 30 26.5 16 19.5 16 22 19.5 24 22 26 24 37 44.5 37 50.5 45.5 61.5 56.5 74 67.5 16 21 21 24 24 32 32 41 38 47.5 48.5 52.5 58.5 64 70 78 20 25 25 29 29

Guide Cylinder/Compact Type Series MGC

Bore size (mm) P Note 2) I J K L M N O Q R S T U V W X Y Z WH 20 25 32 40 50 60 80 86 80 25 44 38 25 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 30 52 70 95 46 32 M6 x 1 M5 x 0.8 21 12 31 13 98 47 44 37 80 153 25 35 60 80 105 50 32 M6 x 1 1/8 21 12 38 16 112 53 50 37 82 161 28.5 40 70 95 125 60 38 M8 x 1.25 1/8 25 12 47 20 132 63 60 44 92 188 33 45 82.5 115 150 75 50 M8 x 1.25 1/4 26 14

Series VQ Metal Seal/Rubber Seal Body Ported

Blank plug Dimensions 23 04 06 KQP-X19 A L D Model Fittings size d Color: White 3.2 4 6 16 16 18 3.2 6 8 31.5 32 35 KQP-23-X19 KQP-04-X19 KQP-06-X19 It is inserted into an unused cylinder port and SUP/ EXH ports. The minimum order quantity is 10 pcs.

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

CE2

NT-04 NT-05 NT-08 NT-10 M14 x 1.5 8 22 25.4 21 CX 11 27 31.2 26 M18 x 1.5 13 32 37.0 31 M22 x 1.5 CY 16 41 47.3 39 M26 x 1.5 MQQ M Allowable Kinetic Energy RHC Operate the stroke reading cylinder with brake within the proper allowable kinetic energy. It must not be operated out of the allowable range, which is shown in the graph on the right.

CE2

NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 M14 x 1.5 CX 26 31.2 27 11 M18 x 1.5 31 37.0 32 13 M22 x 1.5 CY 39 47.3 41 16 M26 x 1.5 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Allowable Kinetic Energy RHC Operate the stroke reading cylinder with brake within the

Vacuum Manifold for fieldbus system

Parts on Page 21 9 Round head combination screw steel Refer to Replacement Parts on Page 21 10 Round head combination screw steel Refer to Replacement Parts on Page 21 11 Round head combination screw steel Refer to Replacement Parts on Page 21 -20No.

Compact Cylinder

17.5 27.5 24 8 8 30 5 29.5 M4 x 0.7 36 2.5 6 3.5 21 3.5 7.5 32 8 25 5 to 50 23.5 19 30 25.5 7 10 33.5 5 M5 x 0.8 40 2.5 8 4.5 24 3.5 8 36 8 32 5 to 50 26 21 32.5 27.5 12 12 41 5 M6 x 1.0 51 2.5 10 5 31 4.5 9 43.5 10 40 5 to 50 31 25 37.5 31.5 13 14 47 6 M8 x 1.25 60 3.5 12 6 37 4.5 11 50.5 10 6 JCQ Series Bore Size Standard (Through-hole): JCQ, JCDQ 50 to 100 50 to 80 Both ends tapped

M-E05-1-LQ1

Tubing extensions size Nut Insert bushing Model Size Insert pin/Name plate symbol LQ1E21-T-R8 2 2-06 LQ1-2N06 LQ1-2B06 8 x 6 LQ1E21-T-R9 2 2-06 LQ1-2N06 LQ1-2B06 10 x 8 LQ1E21-T-R10 2 2-06 LQ1-2N06 LQ1-2B06 12 x 10 LQ1E22-T-R8 2 2-04 LQ1-2N04 LQ1-2B04 6 x 4 LQ1E22-T-R9 2 2-04 LQ1-2N04 LQ1-2B04 8 x 6 LQ1E22-T-R10 2 2-04 LQ1-2N04 LQ1-2B04 10 x 8 LQ1E22-T-R11 2 2-04 LQ1-2N04 LQ1-2B04 12 x 10

Table of Contents - Tubing

TUB-21 Related Equipment .

LEC-OM069xx

Driver type Driver select Motor select SMC Sigma Win+ SMC Sigma Win+ V5 SGDV-R90*11*Y572AA V6 SGMJV-01A3A2* 100W 200W V7 SGDV-1R6*11*Y572AA V7 SGMJV-02A3A2* LECYM2-** MECHATROLINK 400W V8 SGDV-2R8*11*Y572AA V8 SGMJV-04A3A2* V5 SGDV-R90*21*Y572AA V6 SGMJV-01A3A2* 100W MECHATROLINK 200W V7 SGDV-1R6*21*Y572AA V7 SGMJV-02A3A2* LECYU2-** 400W V8 SGDV-2R8*21*Y572AA V8 SGMJV-04A3A2* Trademarks

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

(For details, refer to pages 20 and 21.)

Modular F.R.L. Unit

) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02

JXCx-OMT0023

PB ) . 21 4.2.1 Parameter list . 21 4.2.2 Detail list . 23 4.2.3 Position smoothing . 31 4.3 Extension setting parameters (No. PC ) . 32 4.3.1 Parameter list . 32 4.3.2 List of details. 34 4.3.3 Alarm history clear . 41 4.3.4 Drive recorder function . 42 4.4 I/O setting parameters (No.