Stability of suction position,

ZP3EU-F6-YB12 [Weight: 249 g] ZP2 ZP2V 18 M12 x 1.75 18 M12 x 1.75 11.5 11.5 ZP A-A A-A 6 6 40 19 65 ZPT ZPR Rc1/8 Rc1/8 40 19 65 22 22 XT661 A A A A 26 26 11 11 32 32 42 11.11) 42 4 4 11.11) 30 30 (Rotating angle) (Rotating angle) Applicable pad part no. ZP3E-125UM ZP3E-100BM 93.8 78.6 Applicable pad part no.

MG

Standard stroke (mm) Bore size (mm) PW Q R B C DA G GA GB H J K L MM ML NN PB 20 25 18 70 78 62 10 36 10.5 8.5 83 18 18 24 M5 x 0.8 13 M5 x 0.8 10.5 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 25 28.5 26 78 78.5 62.5 12 42 11.5 9 93 21 21 30 M6 x 1.0 15 M6 x 1.0 13.5 U VA VB WA WB X Bore size (mm) XA XB S T 75 st or less Over 250 st Over 75 st to 175 st Over 175 st to 250 st 75

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

M12 x 1.75 27 50 34 M27 x 2 35 32 1/2 66 24 137 80 125 22H9 38 6.5 140 112 42 34 35.5 35 27 19 16 M14 x 2 27 55 34 M27 x 2 35 32 1/2 77 26 137 80 160 25H9 42 9 174 140 55 43 45 38 36 22 18 M16 x 2 28 65 38 M33 x 2 40 36 3/4 94 30 155 100 (mm) Without rod boot With rod boot Bore size (mm) T l U V W H Z ZZ e f h Z ZZ 40 11 18 7.5 8 66 204 219 55 25 92 230 245 50 11 21 10 9 73 220 238 60 28

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

MB

18 22 26 With Mounting Bracket Refer to basic mounting (B) for other dimensions and with rod boot.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

shaft side 40 40 18 to 30 4.5 to 30 18 to 30 3 to 30 Y = Size: 10 to 30 Size: 40 Symbol: A57 Shorten both long and short shafts.

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

CJ5-S

18 42 14 30 M14 x 1.5 12 14 42 16 22 41.6 30 M14 x 1.5 36 12 14 IY-G04SUS + 0.5 + 0.3 + 0.5 + 0.3 + 0.070 0 I-G05SUS Y-G05SUS 50, 63 50, 63 28 14 14 22 22 56 18 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 M18 x 1.5 IY-G05SUS + 0.070 0 I-G08SUS Y-G08SUS 80 80 38 18 18 28 28 71 21 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 M22 x 1.5 IY-G08SUS + 0.5 + 0.3 + 0.084 0 I-G10SUS Y-G10SUS 100 100

CJ5-S

18 42 14 30 M14 x 1.5 12 14 42 16 22 41.6 30 M14 x 1.5 36 12 14 IY-G04SUS + 0.5 + 0.3 + 0.5 + 0.3 + 0.070 0 I-G05SUS Y-G05SUS 50, 63 50, 63 28 14 14 22 22 56 18 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 M18 x 1.5 IY-G05SUS + 0.070 0 I-G08SUS Y-G08SUS 80 80 38 18 18 28 28 71 21 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 M22 x 1.5 IY-G08SUS + 0.5 + 0.3 + 0.084 0 I-G10SUS Y-G10SUS 100 100

CXS

Refer to page 18.

MU

28 36 42 46 NX 6 6.5 8 10 11 Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 MM NC 7.5 Depth 4.5 9 Depth 5.5 10.5 Depth 6.5 13.5 Depth 8.5 17 Depth 10.5 NS 43 45 44 54 53 ZZ 127 138 150 180 187 MM M6 X 1 Depth 12 Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 KA 10 12 14 18 18 N 14 15.5 16 21.5 21.5 ND M5 X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 H 14 14 15 18 21 ZZ 83

7

42 9 G VXD2 50A 32 77.5 69.5 40 180 57.5 24.5 59 155 14 120 52 ( ): Denotes the Normally Open (N.O.) dimensions. 153 For Heated water/High temperature oil VXD Series 7 E 8 F 9 G Dimensions/VXD2 /2 /2 Body Material: CAC408 Conduit terminal (U2) E C (V2) 32 T B 25 G1/2 R A IN OUT N SMC F D Q 8 x 18 S Conduit U E 280 C (42) 45 23 G1/2 For Heated water/ High temperature oil Full-wave rectifier

CLQ

MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com YA 03 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 42 50 62 76 6 8 10 12 16 20 25 30 6.5 6.5 8.5 10.5 6.8 9 11 14 18 20 26 31 10 12 16 18 CNA Applicable air cylinder bore CNS 03 05 08 10 32, 40 50, 63 80 100 Mounting

MQQ

Dimensions Foot type/MQMLL 6 25 14 33 42 18.5 6 9 2.3 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y 4-LC S + Stroke LS + Stroke ZZ + Stroke LX LZ Z LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 5.5 83 2.3 14 33 25 65 19 42 108 9 6 10 5.5 92 2.3 18 42 30 74 21 54 119 9 6 16 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 20 6.8 142.5 3.2 28 40 47 102.5 24.5

Compact Cylinder with Air Cushion

x 1.5 M14 x 1.5 22 22 42 14 30 12 14 16 30 12 14 36 41.6 Y-G04 10 18 32, 40 42 0.3 0.5 +0.5 +0.3 +0.070 0 14 IY-G05 22 50, 63 I-G05 M18 x 1.5 M18 x 1.5 28 28 56 18 40 16 20 20 40 16 20 44 50.6 Y-G05 14 22 50, 63 56 0.3 0.5 +0.5 +0.3 18 IY-G08 28 80 I-G08 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 +0.070 0 Y-G08 18 28 80 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 22 IY-G10 32