HRX-OM-X084

MT.04 Cumulative use time: It occurs at 5,000 hours. (It can be changed within the range of 1 to 9 hour) Notice of dust-proof filter Maintenance MT.05 Cumulative use time: It occurs at 5,000 hours.

HRX-OM-X071

MT.04 Cumulative use time: It occurs at 5,000 hours. (It can be changed within the range of 1 to 9 hour) Notice of dust-proof filter Maintenance MT.05 Cumulative use time: It occurs at 5,000 hours.

Clean Regulator

Relief port M5 thread The body material has been changed to aluminum. ITVH X234 SRH Standard model no.

2/3 Port Valve

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

Mechanical Valves Series NVM, NVFM, NVZNI

M5) Cy 0 5 5 1 . 0 Max. Supplv Pressure 220 PSIG (15 Kqflcmz) Operating Pressure 22-150 PS|G (1.5-9.9 Kqf/cm2) 15-150 PS|G (1-9.9 Kqf/cm2) Ooeratino TemDerature 40-140'F (5-60'C) Bodv Aluminum Die Cast Spool & Sleeve 440F Stainless Steel, passivated & heat treated to 58-63 Rockwell C. Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max.

IIIIIII

M5) Cy 0 5 5 1 . 0 Max. Supplv Pressure 220 PSIG (15 Kqflcmz) Operating Pressure 22-150 PS|G (1.5-9.9 Kqf/cm2) 15-150 PS|G (1-9.9 Kqf/cm2) Ooeratino TemDerature 40-140'F (5-60'C) Bodv Aluminum Die Cast Spool & Sleeve 440F Stainless Steel, passivated & heat treated to 58-63 Rockwell C. Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max.

AR20-B to AR60-B

Example) AR30K-03BE-1NR-B w e V q Body size 20 25 30 40 50 60 Symbol Description V w With backflow function Nil Without backflow function K Note 1) With backflow function + V e Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 V r Port size + a Mounting Nil Without mounting option B Note 3) With bracket H With set nut (for panel mount) + Nil Without pressure

AMPSeries

Recommended proper torque Nm Connection threads 1/2 M5 1/8 1/4 3/8 3/4 1 28 to 30 1.5 to 2 7 to 9 12 to 14 22 to 24 28 to 30 36 to 38 Torque 2. Twisting moment or bending moment other than the dead weight of the equipment should not be applied. To avoid damage, external piping should be supported separately from the product. 3.

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 4 Stations, A B Port Size: N3T (5/32" One-touch Fitting)

Piping: Base Mounted Common SUP Common EXH, Stations: 4 Stations, A B Port Size: 5/32" One-touch Fitting

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 16 Stations, A B Port Size: M5 (M5X0.8)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 14 Stations, A B Port Size: M5 (M5X0.8)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: M5 (M5X0.8)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: M5 (M5X0.8)

Piping: Base Mounted Common SUP Common EXH, Stations: 14 Stations, A B Port Size: M5X0.8

Piping: Base Mounted Common SUP Common EXH, Stations: 2 Stations, A B Port Size: M5X0.8

Piping: Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: M5X0.8

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

IDX-OM-W011

304 33 73 31 36 154 21 330 226 410 413 125 240 15 38 150 IDF2E Rc3/8 51 232 138 24 327 IDF4E / IDF6E / IDF8E / IDF11E ( 10 :0.8m) [ AC100V ] [ AC200V ] (:1.9m) [ AC200V ] (17) mm A B C D E F G H J K L M N P Q IDF4E Rc1/2 453 13 498 568 31 42 283 355 80 230 32 15 284 15 240 80 275 IDF6E Rc3/4 455 270 485 IDF8E Rc3/4 300 IDF11E Rc3/4 IDF Series 6-3 6 3 IDX-OM-W011 6 IDF15E1 mm 603 41