Table of Contents Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 8.1 11 12.7 M8 x 1.0 4 7 M4 x 0.7 3.2 SNJ-016B NTJ-015A 9.2 14 16.2 M10 x 1.0 4 8 M5 x 0.8 4 NDd9 NDH10 R1 NX U1 Part no.
x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 22 22 22 4 4 4 11 11 11 6 6 6 0.5 1.8 1.2 1.8 0.8 0.8 1.8 8 6 4 6.5 8.5 4.5 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04UM;-B5-U4 ZP3-Y06UM;-B5-U4 ZP3-Y08UM;-B5-U4 ZP3-Y04UM;-B5-U2 ZP3-Y06UM;-B5-U2 ZP3-Y08UM;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width across flat 7 (10.5) (12.5) M-5AU-2 [Weight: 1.5 g] 2
0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 12 14 17 23 31.5 8 10 11 15 21.5 2H9 8h9 6 7 9 11 12 3H9 8h9 4H9 10h9 6H9 12h9 8H9 14h9 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5
Standard (mm) Bore size (mm) Stroke range (mm) A B C D E F G H I J K1 K2 L M N Q W Z Th9 P 12 16 20 25 0 0.043 37.2 30.2 6 6 25 10 1.5 M3 x 0.5 32 5.2 5 3.5 15.5 3.5 15 15 M5 x 0.8 5 to 30 0 0.052 38 31 20 8 8 29 10 1.5 M4 x 0.7 38 6 6 3.5 3.5 15 20 M5 x 0.8 5 to 30 0 0.043 25.5 17.5 43 34 7 10 36 9.5 2 M5 x 0.8 47 8 8 4.5 5.5 13 M5 x 0.8 5 to 50 0 28 19 47 37 12 12 40 11 2 M6 x
bracket mounting thread (2-M3 x 0.5 thread depth 5) 2-5 counterbore depth 2 25 24 3.5 1 2-M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110 + Stroke 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) 8-11-21 21 Series MY1B Standard Type/Centralized Piping Type 16, 20 Refer to page 8-11-9 regarding centralized piping
M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33
Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30
Model Bolt Max. tightening torque [N.m] Screw-in depth L1 [mm] Max. screw-in depth L2 [mm] MXQ6 M4 x 0.7 2.1 5 8 MXQ8 M4 x 0.7 2.1 8 11 MXQ12 M5 x 0.8 4.4 11 15 MXQ16 M6 x 1 7.4 14 19 MXQ20 M6 x 1 7.4 9 MXQ25 M8 x 1.25 18 12 MXQ6A M4 x 0.7 2.1 8 11 MXQ8A M4 x 0.7 2.1 8 11 MXQ12A M5 x 0.8 4.4 8 12 MXQ16A M6 x 1 7.4 12 17 MXQ20A M6 x 1 7.4 9 MXQ25A M8 x 1.25 18 12 MXQ6B M4 x 0.7 2.1 5 8 MXQ8B
8 43 34 9.5 M5 x 0.8 7 10 #10-32UNF 4.5 13 0 0.043 M5 x 0.8 M5 x 0.8 25 5 to 50 19 5.5 28 40 2 10 52 10 10 1/4-28UNF 47 37 11 5 12 12 M6 x 1.0 15 0 0.043 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 M5 x 0.8 13.3 5/16-24UNF 39.5 53.5 32 10 to 50 21.5 34 5.5 45 2 4.5 60 14 14 12.5 13 16 M8 x 1.25 7 14 49.5 21 NPT 1/8 0 0.052 RC 1/8 Note 1) 63.5 49.5 75, 100 For details about the rod end nut and accessory
(mm) L2 (3 x P) L2 max Q2 Y Size Q1 = M 10 5.5 to 8 M3 Y 1 (mm) C1 = C Y = X Q1 L1 max 15 7.5 to 9 Size M3, M4 Y 1.5 L2 = C2 = C 10 20 5.5 to 14 M3 X 1 9.5 to 10 Y 1.5 M3, M4, M5 L1 (3 x P) 15 7.5 to 18 M3, M4 X 1.5 M3, M4, M5, M6 30 11 to 13 Y 2 Q2 = M X = L1 = 20 9 to 20 X 1.5 M3, M4, M5 M3, M4, M5, M6, M8 M3, M4, M5, M6 40 14 to 15 30 Y 4.5 11 to 22 X 2 11-3-24 59 Simple Specials
(mm) L2 (3 x P) L2 max Q2 Y Size Q1 = M 10 5.5 to 8 M3 Y 1 (mm) C1 = C Y = X Q1 L1 max 15 7.5 to 9 Size M3, M4 Y 1.5 L2 = C2 = C 10 20 5.5 to 14 M3 X 1 9.5 to 10 Y 1.5 M3, M4, M5 L1 (3 x P) 15 7.5 to 18 M3, M4 X 1.5 M3, M4, M5, M6 30 11 to 13 Y 2 Q2 = M X = L1 = 20 9 to 20 X 1.5 M3, M4, M5 M3, M4, M5, M6, M8 M3, M4, M5, M6 40 14 to 15 30 Y 4.5 11 to 22 X 2 11-3-24 59 Simple Specials
(mm) L2 (3 x P) L2 max Q2 Y Size Q1 = M 10 5.5 to 8 M3 Y 1 (mm) C1 = C Y = X Q1 L1 max 15 7.5 to 9 Size M3, M4 Y 1.5 L2 = C2 = C 10 20 5.5 to 14 M3 X 1 9.5 to 10 Y 1.5 M3, M4, M5 L1 (3 x P) 15 7.5 to 18 M3, M4 X 1.5 M3, M4, M5, M6 30 11 to 13 Y 2 Q2 = M X = L1 = 20 9 to 20 X 1.5 M3, M4, M5 M3, M4, M5, M6, M8 M3, M4, M5, M6 40 14 to 15 30 Y 4.5 11 to 22 X 2 11-3-24 59 Simple Specials
M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33
x 95l x 100l x 105l x 130l x 155l M3 x 45l x 50l x 55l x 60l x 65l x 70l M3 x 50l x 55l x 60l x 65l x 70l x 75l M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 125l x 150l 6.1 6.1 7 7.5 7.5 9 11 12.5 8 10 13.5 11 7.5 Auto Switch Mounting Bracket
Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.
For low speed control Port size 0 1 Port size Symbol M5 U10/32 01 02 Applicable series AS120M-M5 AS120M-U10/32 AS220M-01 AS220M-02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Cylinder side R Tube side Rc Symbol Nil Metric thread (M5) Unified thread (10-32 UNF) NPT P . 15-11-3 N Needle Valve/Flow Characteristics AS120M AS220M-01 AS220M-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet
Metric size Inch size 23 04 06 08 10 12 Thread type 01 03 05 07 09 11 13 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 Port size M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N Use 1/8" tube.
(mm) (2) <M5, M6> Connection thread R <M5, M6> (1) A Weight (g) Model D P M L Nylon Urethane 2-applicable tubing D KQ2U23-M5 38 34.5 2.2 2.2 9 M5 x 0.8 10 1 8 KQ2U23-01S KQ2U23-02S 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 11 14 1 4 KQ2U04-M5 39.5 M5 x 0.8 M6 x 1.0 4 2.2 2.2 KQ2U04-M6 40 36 10 11 4 10.4 16 10.4 1 8 KQ2U04-01S 42 38 11 4.2 4.2 D 1 4 KQ2U04-02S 46 40 20 14 KQ2U06-M5 42.5 M5 x
Standard Bore (mm) Stroke range (mm) (mm) Q N M J F I E K2 G H K1 Th9 B C D L P W Z A 0 0.043 0 0.052 5 to 30 12 15 3.5 10 32 25 5 1.5 5.2 6 6 3.5 37.2 30.2 M3 X 0.5 15.5 M5 X 0.8 15 5 to 30 16 15 3.5 38 31 20 10 38 29 6 1.5 6 8 8 3.5 M4 X 0.7 M5 X 0.8 20 0 0.043 0 0.043 5 to 50 20 5.5 25.5 17.5 43 34 9.5 47 36 8 2 8 7 10 4.5 M5 X 0.8 M5 X 0.8 13 5 to 50 25 5.5 28 19 47 37 11 52
x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 22 22 22 4 4 4 11 11 11 6 6 6 0.5 1.8 1.2 1.8 0.8 0.8 1.8 8 6 4 6.5 8.5 4.5 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04UM;-B5-U4 ZP3-Y06UM;-B5-U4 ZP3-Y08UM;-B5-U4 ZP3-Y04UM;-B5-U2 ZP3-Y06UM;-B5-U2 ZP3-Y08UM;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width across flat 7 (10.5) (12.5) M-5AU-2 [Weight: 1.5 g] 2