Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 14 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

This specification is not available for the rotary actuator with auto switch unit. 2 d Body (B) (mm) (mm) M N Size d Size Q 10 9.5 8.5 3.4 10 M3 15 10 11 3.4 15 M3 Body (A) 20 13 14 4.5 20 M5 DQ N 30 A port B port (Standard) (Altered) A port 14 15.5 B port 5.5 30 M5 40 20 21 5.5 40 M5 M 113 Series CRBU2 Symbol: C4 Applicable to single vane style only Symbol: C3 Change the position of the

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Electric Actuator

LECSB Positioning unit 24 VDC Note 2) Note 4) CN1 QD75D (Manufactured by Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 PULSE R+ 17 S/S NG 36 PULSE R 18

Rotary Actuator/Vane Type

[mm] 2 x d CRBU2 Series [mm] CRJ Size CRB2, CRBU2 Q M N 10 M3 8.5 9.5 15 M3 11 10 20 M5 14 13 30 M5 15.5 14 40 M5 21 20 Size CRB2, CRBU2 d 15 3.4 20 4.5 30 5.5 40 5.5 (Viewed from the long shaft side) CRA1 CRQ2 A port B port A port B port MSQ (Standard) (Altered) MSZ Symbol: C3 Symbol: C4 The position of the screws for tightening the actuator body is changed.

Rotary Actuator

port B port A port B port M 30 30 M5 15.5 14 5.5 (Standard) (Altered) 40 40 M5 21 20 5.5 (Viewed from the long shaft side) Symbol: C4 Applicable to single vane type only Symbol: C3 The position of the screws for tightening the actuator body is changed.

Rotary Actuator/Vane Style Series CRB2

(An additionally machined port will have an aluminum surface since it will be left unfinished.) 3 x d Body (B) (mm) Size N M Q (mm) Size d 10 9.5 8.5 M3 15 3.4 15 10 11 M3 Body (A) D20 4.5 20 Q N A port B port A port 13 14 M5 B port 30 5.5 30 14 15.5 M5 (Standard) (Altered) M 40 5.5 40 20 21 M5 (Top view from long shaft side) 79 Series CRB2 Symbol: C4 Change the position of the screws for

VKF300

20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 4-13-8 9 3

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399

8)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?

8)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?

8)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?

8)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?

8)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?