MXS Series Air Slide Table

port 2-M5 X 0.8 11 3 J 10 Max.13.5 (With stroke adjuster at retraction end) I 5.5 12 6 Basic type 12 9.5 10 10 5.5 5.5 NA-M5 X 0.8 thread 5.5 deep 21 K KA 21 Stroke adjuster at retraction end 37.5 (With stroke adjuster at extension end) 6 12 3.5 (With stroke adjuster at retraction end) Stroke adjuster at extension end N-M5 X 0.8 thread 6 deep (Helisert) 6 4-M5 X 0.8 thread 7 deep 1 18 (With

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows

ZR

, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

8 1(IN), 2(OUT) port 17.5 17.5 2 x M5 x 6.5 15 15 2 x M5 x 6.5 CS: Conduit DS: DIN terminal DZ: DIN terminal with light Applicable cable 6 to 12 18 67 36 55.3 G1/2 48.9 500 18 36 NPT1/2 63 17.5 63 17.5 42.1 40.6 IN IN 8 8 28 30 30 28 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x M5 x 6.5 15 2 x M5 x 6.5 15 15 Direct Operated 2-Port Solenoid Valve JSX Series Dimensions

30

10.7 17.2 13.5 14.1 17.3 16.6 17.5 15.9 21.6 18.2 18 22.5 22.8 18.9 17.6 25.9 19.8 18.5 28.1 23 12 4 3.9 7.9 7.8 9.1 14.7 13 13.5 24 18.6 20 22 39.2 26 20.2 35.3 43.6 40.3 M5 x 0.8 M5 x 0.8 1/8 4 12.6 Applicable tube D M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 12 6 13.6 20.6 M A 14 L 24.7 22.9 23.1 25.6 27.5 Connection thread 14 8 16.1 23.3 17 (R) H 17.2 17 10 17 39

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-45 Series AS-FG Construction: Universal Type Meter-out type M5 type U10/32 type AS3301FG-02 Meter-in type M5 type U10/32 type AS3311FG-02 Component Parts No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

8 1200 LEFS40ll-1200l 1614.5 1644.5 1206 1378 18 8 1200 LC3F2 677 LEFS Series AC Servo Motor Dimensions: Motor Parallel LEFS25R With lock/LEFS25V6-B 3H9 ( ) depth 3 +0.025 0 W X (2.4) 4 x M5 x 0.8 thread depth 8.5 Encoder cable (7) Motor cable (7) 106 Z Body mounting Note 1) reference plane 50 38 3.5 3H9 ( ) depth 3 +0.025 0 45 64 (102) Stroke end of the motor side L A (Table traveling distance

LX

Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3. T-slots l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXP M5 x 0.8 7.4 8.5 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body.

Hygienic Design Cylinder Series HY

32 12.5 13.5 M5 x 0.8 M5 x 0.8 20, 30, 50, 100, 150, 200 DBore size QA PB PC PD QB RA RB RC RD RE RF TA TB TC TD UA UB UC UD -X 20 25 32.5 34.5 14 15 28.5 34 7 8.5 68.5 78.5 39 41.5 9.5 9.5 32 38 5.4 5.4 M6 x 1 M6 x 1 12 12 24 29 72 80 M5 x 0.8 M6 x 1 13 14.5 18 26 70 78 M5 x 0.8 M6 x 1 10 12 Individual -X Note 1) Refer to page 888 for details about the optional parts (plug bolt).

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

248 237.5 212.5 18 13 248 237.5 223 12.5 14 260.5 250 233.5 13.5 15 273 262.5 244 14.5 16 285.5 275 254.5 15.5 17 298 287.5 265 16.5 18 310.5 300 275.5 17.5 19 310.5 300 286 12.5 20 323 312.5 296.5 13.5 L1 L2 L3 L4 16 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60PD (26 pins) U1 2 Scale: 37% 2n1-M5 x 0.8 [With external pilot] (A, B ports) 24 13.3 (Pitch

KA

(mm) <M5, M6> <M5, M6> A Weight (g) L2 M D1 D2 L1 Model Urethane 2-applicable tubing KAT23-M5 15 9.6 16 15.5 M5 x 0.8 M6 x 1 8 8 8 15.5 19.5 21 3.4 2.9 9 1 8 KAT23-M6 KAT23-U01 10 3.2 17.5 10 KAT04-M5 15.5 M5 x 0.8 M6 x 1 8 17 4.3 4.3 6 8 KAT04-M6 16 10.4 16 18 4 1 8 KAT04-U01 20 9 14 10 10 21.5 6.0 6.0 1 4 KAT04-U02 22 15 Connection thread KAT06-M5 16 M5 x 0.8 M6 x 1 18 4.3 4.3 8 7 8 KAT06

Large Size Vacuum Module: Series ZR

ZR1-SR2-82-A(a set of four threads) For nozzle size 18, 20 ZR1-SR2-86-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For

Stainless Steel 316 Fittings

10.7 17.2 13.5 14.1 16.5 16.6 17.5 15.9 21.6 18.2 18 22.5 22.8 18.9 17.6 25.9 19.8 18.5 28.1 23 12 3.8 3.7 7.6 7.4 8.7 14 12.3 12.8 22.8 17.7 19.1 20.9 37.2 24.8 19.3 33.6 41.6 38.4 M5 x 0.8 M5 x 0.8 1/8 4 12.6 D Applicable tube M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 12 6 13.6 20.6 M A 14 L 24.7 22.9 23.1 25.6 27.5 Connection thread 14 8 16.1 23.3 17 (R) H 17.2 17

Electric Slide Tables

x 0.8 thread depth 6.5 Note 4) (D/2 1) x C C 19 3 x M5 x 0.8 thread depth 8 Table operating range Note 1) 1 [1] 8 K Origin Note 2) [Stroke end] Stroke end [Origin] Note 3) LECA6 LECP6 LEC-G LECP1 LECPA 16.5 N 13 (M) Stroke (2.3) 4H9 ( ) depth 4 (G 1) x F 18 F +0.030 0 40 (25) 5 J +0.030 0 4H9 ( ) depth 4 With lock Connector Servo motor Step motor 20 24 Motor cable (2 x 5) Motor cable 20

Electric Actuator

Compatible Drivers Pulse input type /Positioning type Pulse input type CC-Link direct input type SSCNET III type Driver type LECSA Up to 7 D LECSB D LECSC Up to 255 (2 stations occupied) CC-Link LECSS SSCNET III Series Number of point tables Pulse input Applicable network Incremental 17-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Control encoder

51

18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 6 7 7.5 7.5 12 12 16 16 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 Rc1/8 Width

REA/REB

x 0.8 8 71.5 106 44 M5 x 0.8 17 33.5 33.5 45 46 97 26.5 21 50 8 23.5 M5 x 0.8 48.5 75.5 108 53 16 M5 x 0.8 41.5 22 54 42.5 26.5 102.5 58.5 28 M6 x 1.0 10 86 138 56 M6 x 1.0 25 46 46 61.5 63 125 29 24 TW S XB Z ZZ W PA PB PP P Model N NL NT REAH15 REAH20 REAH25 161 65 17.5 194 21 88.5 62 8 M5 x 0.8 50 15 16.5 70 169 92.5 205 19.5 50 65 23 Rc 1/8 18 15 8 209 75 23.5 250 27 103 9.5 75 9 Rc

REA/REB

x 0.8 71.5 44 106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97 50 8 23.5 M5 x 0.8 75.5 48.5 108 M5 x 0.8 16 53 41.5 42.5 54 22 26.5 102.5 58.5 10 28 M6 x 1.0 86 56 138 M6 x 1.0 25 61.5 46 46 63 24 29 125 W PP TW PB S PA ZZ P Z NT XB NL Model N REAH15 REAH20 REAH25 21 65 62 161 50 17.5 M5 x 0.8 194 8 88.5 15 16.5 23 70 65 169 50 19.5 Rc 1/8 205 8 92.5 15 18 27 75 75 209 65 23.5 Rc 1/8 250 9 103

Electric Actuator with Integrated Guide

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 M Model 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Controller Connectors