mb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

70astamb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

Profile Design ISO/VDMA Air Cylinder Series CP95

joint to DIN 648K Bore d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 1.8-12 ISO/VDMA Air Cylinders Series CP95K

TABLE OF CONTENTS

WIRE 1.31 (33.3) 1.31 (33.3) R.18 (4.6) TYP . R.15 (3.8) TYP . R.18 (4.6) TYP . R.15 (3.8) TYP . .66 (16.8) .66 (16.8) .15 (3.7) DIA. THRU (2) PLACES .15 (3.7) DIA. THRU (2) PLACES Mtg. HOLES #6-32 UNC THD. X .22 (5.6) MFT 2 PLACESAS SHOWN Mtg. HOLES #6-32 UNC THD.

CATALOG VC10

WIRE 1.31 (33.3) 1.31 (33.3) R.18 (4.6) TYP . R.15 (3.8) TYP . R.18 (4.6) TYP . R.15 (3.8) TYP . .66 (16.8) .66 (16.8) .15 (3.7) DIA. THRU (2) PLACES .15 (3.7) DIA. THRU (2) PLACES Mtg. HOLES #6-32 UNC THD. X .22 (5.6) MFT 2 PLACESAS SHOWN Mtg. HOLES #6-32 UNC THD.

HRX-OM-R016

Accessory Weight12 kg 47 46 1 For water -cooled type. 2 Use the product in conditions where freezing will not occur.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

19.5 31.5 46 46 19.5 31.5 18 46 19.5 35.5 42 15.5 13 42 12 17 17 22 17 22 21 47.5 21 21 33 47.5 21 33 47.5 43.5 17 15 20 47.5 43.5 37 16 23 24.5 19 24.5 63.5 27 19 63.5 27 63.5 27 39 17 22.5 63.5 27 39 43 59.5 23 59.5 20 26 25.5 22 25.5 67 30 22 67 30 42 67 30 42 67 30 26 20 23.5 63 46 63 25 32 25 28.5 25 28.5 36 88.5 36 48 88.5 88.5 36 48 26.5 88.5 36 52 84.5 32 23 84.5 32 32.5 30 30 30

MK

45 36 20 53.5 67 14 18 6 6.2 M8 x 1.25 25 9 43 18 45 36 20 61 67 14 18 6 6.2 CC M10 x 1.5 40 11.5 53 23 65 46 22 77 88 18 22 8 8.2 M10 x 1.5 40 11.5 52.5 23 65 46 22 76.5 88 18 22 8 8.2 RB J Mounting arms for width across flats D-X 20Data When installing the arm for the parllel section at the rod end, the strength of the piston rod might be insufficient depending on the direction in which

Fieldbus system EtherNet/IP compatible SI Unit

(Refer to "Setting and adjustment (page 18)" for setting the switch.)

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

EN EU CH H6 ER (Max.) 32 ES5032 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 ES5040 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 ES5050 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 ES5063 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 ES5080 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 100 ES5100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 139 Accessories CP96 Series Dimensions: Piston

Vacuum System Peripherals:

Section code 13-14-18 Date issued: 18 Photo copying this page is recommended.

CP95

(mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41 54 24 22 35 16 36 10 18 6.6 8.5 12 50 15 16 50 65 33 30 45 21 45 12 20 9 10.5 15 63 15 16 52 67 37 35 50 21 50 12 23 9 10.5 15 80 18 20 66 86 47 40 60 25 63 14 27 11 11.5 18 100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 6-13-12 12 Series CP95 ISO/VDMA Cylinder: Standard Type Double

CP95

9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12

Fieldbus System

Note 3) When selecting the DIN rail mounting (with DIN rail) of the SV3000 series, and 9 I/O Unit stations will result in a total of 18 valve stations. With 19 and 20 stations, the DIN rail mounting (with DIN rail) cannot be indicated, so please exercise caution. (Refer to DIN Rail Overall Length on pages 45 and 46 .)

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size A B C D E F H K L M N Model Note) Note) Q R Q R Q R S Q R S U 22 (23) 45 (52) 44 43 58 40.5 46.5 99 43 66 83 13.5 28 64 31 6.5 12.5 27 14 12.8 M4 4.5 1/8 VCL21 22 (23) 46 (53) 44 44 58 41.5 46.5 99 44 66 86 18 36 67.5 31 8.5 12.5 27 18 12.8 M4 6 1/4 24 (25) 56.5 (63.5) 46 54.5 60 52 48.5 101 54.5 68 99 22

ZX

Operating pressure range Operating temperature range Filtration efficiency Element Weight ZX ZR ZM ZH Vacuum Pressure Switch Unit/ZSE2, ZSE3, ZSP1 Refer to page 13-2-13 to 13-2-18 for details.

PFxx-OMA1007

No.PF-OMA1007-B PRODUCT NAME Air Management System MODEL/ Series/ Product Number AMS20 AMS30 AMS40 AMS60 Table of Contents Safety Instructions 3 Model Indication and How to Order 12 Names and Functions of Individual Parts 15 Definition and terminology 19 Mounting and Installation 23 Piping 23 Wiring 24 LED indicator 28 System overview 35 Initial Configuration 42 AMS Operation Setting 46 OPC

Digital Flow Switch (Integrated display type)

13.6 2.7 depth 14 PF3W720 3/8, 1/2 78 54 30 66 40.6 15.2 27 18 39 30 18 13.6 2.7 depth 12 PF3W740 1/2, 3/4 98 71 38 68 48.6 19.2 32 28 49 35 28 16.8 2.7 depth 12 PF3W711 3/4, 1 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36

AC Servo Motor Driver (SSCNET /H Type)

Parameter Configuration using Setup software (MR Configurator2TM) 16 6.1 Setup software (MR Configurator2TM) . 16 6.1.1 Installation Method . 16 6.2 Basic driver set-up for Initial Test Drive . 16 6.2.1 Start up the Setup software (MR Configurator2TM) . 17 6.2.2 System Settings . 18 6.2.3 Model Selection . 18 6.2.4 Driver ON LINE Check . 19 6.2.5 Help Function . 19 6.3 Parameter setting (