Body: 5 (Base Mounted), Stations: 17 Stations, Port Size: N3T (5/32" One-touch Fitting)

5 Port Solenoid Valve

COM. () COM. 23 24 (+) 26 21 Note) 22 Positive COM Negative 19 20 19 20 COM 17 18 17 18 15 16 15 16 13 14 13 14 Note) Mounting valve has no polarity.

ZR

1/8 PV port Common air supply pressure port Stations (mm) 1 85 104 2 118 137 3 151 170 4 184 203 5 217 236 6 Symbol L1 52 71 L2 13-3-46 46 Series ZR Large Size Vacuum Module: Vacuum Pump System Circuit diagram Individual spacer (ZR1-R1-4) PV PD EXH PS Function plate (ZR1-RV3-4) ZX X X X X X PS PE ZR SOL.C ZM SOL.A SOL.B Vacuum switch X X X X PD PV ZH Release valve ZU Vacuum switch valve

AC Servo Motor Driver (SSCNET /H Type)

Once the application starts, the screen below will be displayed. -17- 6.2.2 System Settings From Project menu select New, the New project window will be displayed. 6.2.3 Model Selection The Mitsubishi Electric Corporation series will be displayed in the model selection list. Please select MR-J4-B if using the LECSS2-T.

Refrigerated Air Dryer

D A B Grommet with membrane Power cable outlet (17) Dimensions (mm) A 230 B C D Circuit breaker Model 32 B D IDFA4E, 6E, 8E, 11E IDFA15E1 67 179 43 258 77 158 C E A IDFA22E to 75E Power cable outlet (17) (Wire diameter 9 to 11) F (mm) Dimensions E D C B A F Model Signal cable outlet (Wire diameter 17) Grommet with membrane IDFA22E IDFA37E IDFA55E IDFA75E 59 125 40 25 46 39 60 Terminal block

High performance type Step Motor Controller (Servo/24 VDC)

Perations 44 8.1 Return to origin position 44 8.2 Positioning operation 44 8.3 Pushing operation 45 (1) Pushing operation is successfully performed 45 (2) Pushing operation is failed (pushing the air) 45 (3) Movement of the work piece after the completion of the pushing process 45 8.4 Controller input signal response time 46 8.5 Methods of interrupting operation 46 9.

MLGP

17 Series MLGP Operating Range when Used as Stopper Warning 1.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

marking No.1 (+), No.2 () 0.75 mm2 5.9 14 ATEX Compliant Base Mounted Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5240 (R) -L-02 19 18 9.5 2 x 4.3 (Mounting holes) 37.2 M5 x 0.8 (External pilot port) 15.5 15.5 4 48 Manual override 4 Insulation: Black () B A 17.5 17.5 A B PE X P EB EA Insulation: Red (+) 35 17 17 56 65.4 62.5 M5 x 0.8 (Pilot EXH. port)

MLGP

17 Series MLGP Operating Range when Used as Stopper Warning 1.

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

SV

L Dimension n: Stations L n 2 148 137.5 119.3 14.5 3 160.5 150 129.8 15.5 4 173 162.5 140.3 16.5 5 185.5 175 150.8 17.5 6 185.5 175 161.3 12 7 198 187.5 171.8 13 8 210.5 200 182.3 14 9 223 212.5 192.8 15 10 235.5 225 203.3 16 11 248 237.5 213.8 17 12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300

HRX-OM-R016

Accessory Weight12 kg 47 46 1 For water -cooled type. 2 Use the product in conditions where freezing will not occur.

Cylinder with Lock Series CLS

Locked condition (when air is evacuated) Unlocked condition (when air is supplied) 3 Cylinder with Lock Double Acting: Single Rod Series CLS Construction Description Material Note Parts list Description Material Note Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 No. 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

5 Port Solenoid Valve Series VQZ1000/2000/3000

19.5 15.5 18 20.5 17 19.5 15.5 18 20.5 17 70 70 90 110 130 150 170 190 210 230 250 170 290 310 330 Note) The L dimension of 2 to 3 stations is the same.

LEY-OM007

17 12 13 12 13 23 23 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 20 20 34 33 35 32 31 1 21 2 22 3 23 4 24 5 25 6 26 NBR 7 27 8 POM 28 9 29 10 30 11 31 12 32 13 33 14 34 15 35 NBR 16 17 18 101 19 POM 101 20 / 16 LEY-L016 LEY-F016 LEY-D016 16 LE-D-2-1 25 LEY-L025 LEY-F025 LEY-D025 25 LE-D-2-2 32 LEY-L032 LEY-F032 LEY-D032 32 LE-D-2-3 1 2 C /P.46 7.4

13

02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch connection

VQ20/30

Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No. L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

Pin Cylinders Series CJP2/CJP

(Compared with the basic model CJP cylinder without auto switch) B (CDJP2B4-10D) Unit: mm Dimensions Mass Unit: g Stroke Bore size (mm) C B A Bore size 16 42 46 50 54 58 63 67 71 4 11 13 15 17 6 16 18 21 23 25 10 27 29 32 35 37 40 43 45 29 + stroke (34 + stroke) 4 14.5 14 5 10 15 20 25 30 35 40 33 + stroke (38 + stroke) 6 16.5 14 39.5 + stroke (44.5 + stroke) 10 19 15 43.5 + stroke (48.5

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.