ZX

-2-2 2 Vacuum Module: Ejector System/Vacuum Pump System Series ZX Modular Components Introduction Vacuum Pump System System Ejector System 13-2-4 to 13-2-39 13-2-40 to 13-2-65 Component equipment Characteristics Ejector unit Series ZX1 Nozzle diameter (mm) 0.5 0.7 1.0 Max. suction flow (/min(ANR)) 5 10 22 ZX Air consumption (/min(ANR)) 13 23 46 ZR 84 kPa Maximum vacuum pressure ZM Built-in

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXS25L-10 13-/22-MXS25L-20 13-/22-MXS25L-30 13-/22-MXS25L-40 13-/22-MXS25L-50 13-/22-MXS25L-75 13-/22-MXS25L-100 13-/22-MXS25L-125 13-/22-MXS25L-150 797 MXS 1322Air Slide Table Specific Product Precautions Made to Order Dust cover and dust plug made by fluororubber -X52 Be sure to read this before handling.

Vacuum System Peripherals:

ZSE30/ZSE40/ZSE5B 13-14-9 2. ZSE6B/ZSE3/ZSE1/ZSE2 13-14-10 3. PS1100/ZSP1/PSE200/530 13-14-11 Misc. Pressure gauge for vacuum: GZ46 13-14-12 Pressure Gauge for Vacuum Related Products: Air Line Equipment/Modular Type 1. Air filter: Series AF 13-14-13 2. Regulator: Series AR 13-14-13 3. Filter regulator: Series AW 13-14-13 4.

Compact Cylinder

16 45 6.5 M8 x 1.25 22.5 14 7 34 5.4 5 to 100 M6 x 1 9 M5 x 0.8 M5 x 0.8 2.5 13 16 52 6.5 M8 x 1.25 26 14 7 40 5.4 46.5 39.5 5 to 100 M6 x 1 9 M5 x 0.8 M5 x 0.8 2.5 48.5 Note 2) 40.5 Note 2) 15 20 64 7.5 M10 x 1.5 32 17 8 50 6.6 10 to 100 M8 x 1.25 11 3.5 Rc, G, NPT1/8 Rc, G, NPT1/8 15 20 77 7.5 M10 x 1.5 38.5 17 8 60 9 10 to 100 54 46 M10 x 1.5 14 3.5 Rc, G, NPT1/8 Rc, G, NPT1/8 Bore size

C95Series

Single clevis 1.58 2.35 3.87 5.52 9.44 13. 13 Refer to table below lor IN side.

5 Port Solenoid Valve

COM. () COM. 23 24 (+) 26 21 Note) 22 Positive COM Negative 19 20 19 20 COM 17 18 17 18 15 16 15 16 13 14 13 14 Note) Mounting valve has no polarity.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

26 5 8 22.3 34 M8 X 1.25 M20 X 1.5 41 8 15 116 18 13 28 5 15 24 62 20 Up to 300 7.5 10 33.5 M10 X 1.25 19.5 17 32 6 8 25.3 37 M26 X 1.5 45 8 15 120 22 13 5.5 15 30 62 26 Up to 300 7.5 12 37.5 M10 X 1.25 19.5 17 32 6 8 27.6 M26 X 1.5 39.3 34.5 45 8 15 122 22 13 5.5 15 64 26 Up to 300 14 22 41 8 10 33.6 46.5 21 10.7 47.8 M14 X 1.5 21.5 42.5 M32 X 2 50 11 154 24 16 7 19 88 32 With rod boot

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

26 5 8 22.3 34 M8 M20 X 1.5 18 13 8 41 28 5 15 15 24 62 116 20 Up to 300 33.5 M10 X 1.25 19.5 17 32 10 7.5 6 8 25.3 37 M26 X 1.5 22 13 8 45 5.5 15 15 30 62 120 26 Up to 300 39.3 37.5 M10 X 1.25 34.5 19.5 17 32 12 7.5 6 8 27.6 M26 X 1.5 22 13 8 45 5.5 15 15 64 122 26 Up to 300 47.8 46.5 42.5 21 22 41 14 10.7 8 10 33.6 M14 X 1.5 21.5 M32 X 2 24 16 11 50 7 19 88 154 32 With rod boot h l Symbol

58

3 9.5 8 6 13.5 6.5 12 2 8.5 5.5 9 7 14.5 13 3 9.5 8 6 13.5 6.5 12 2 8.5 5.5 9 7 14.5 13 3 9.5 8 6 13.5 6.5 12 2 8.5 5.5 Provided as guidelines for auto switch proper mounting position (detection at stroke end).

Compact Rotary Actuator Series CRQ2

SU) S BA BA DG AU SF A AA YB effective depth YC 2 YA View (mm) AA A AU AV AW AX AY BA BB BC BD BE CA CB D DD DE DF DG FA FB FC FD H J JA JB Size 10 20 30 50 55.4 50 8.6 20 15.5 12 4 9.5 34.5 27.8 60 27 4.5 28.5 45h9 46h9 20H9 5 15H9 8 4 3 4.5 13 6.8 11 6.5 70.8 65 10.6 27.5 16 14 5 12 46 30 76 34 6 30.5 60h9 61h9 28H9 9 17H9 10 6 2.5 6.5 17 8.6 14 8.5 75.4 70 10.6 29 18.5 14 5 12 50 32 84

•

Aw/1CB:ble l (mm) Y12A 2S*g(>P'< 10{) 32~g{ 125 8 46 M30 x 1.5 64.:U 42 boc~~ze . d 1-1 B C D 27 28~oe. 72ji Y-14A 140 8 48 105 M30 x 1.5 47 36:21 NT-12 125, 140lM30 x 1.5 18 46 53.1 44 30 NT16 160 /M36x1.5 21 55 63.5 53 M36x 1.5 32 ~~' 4072J Y-16A 110 80~J 34 46 ' 1 160 8 55 * Use a single knuckle 101n1 or a double knuckle JOint Individually.

Digital Flow Switch

ZS-46-B Panel mount adapter ZS-46-D Panel mount adapter + Front protection cover ZS-46-5L Power supply/output connection lead wire 5-core, 2 m ZS-27-01 Front protection cover B Panel mount adapter Connection Example ZS-46-B PFG300 Sensor connector D Panel mount adapter + Front protection cover PF3A7 H Power supply/output connection lead wire ZS-46-D Lead wire and M12 connector (Option for

SV

L Dimension n: Stations L n 2 135.5 125 102.6 16.5 63 3 148 137.5 113.1 17.5 73.5 4 148 137.5 123.6 12 84 5 160.5 150 134.1 13 94.5 6 173 162.5 144.6 14 105 7 185.5 175 155.1 15 115.5 8 198 187.5 165.6 16 126 9 210.5 200 176.1 17 136.5 10 210.5 200 186.6 12 147 11 223 212.5 197.1 13 157.5 12 235.5 225 207.6 14 168 13 248 237.5 218.1 15 178.5 14 260.5 250 228.6 16 189 15 273 262.5 239.1 17

CA2

Please refer to page 6-8-13.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

3, are required. 11-2-13 13 Series CRB2 Dimensions: 10, 15, 20, 30 Single vane type Following illustrations show actuators for 90 and 180 when B port is pressurized.

CRB2/CRBU2/CRB1

11 78 19.5 39.5 R6 5.5 10 50 13 6.5 60 5 13.5 M8 x 1.25 depth 10 15 0.006 0.017 14.9 0 0.043 28 0 0.052 1/8 39 80 83 82 3 52 14 98 21 45 12 8 R7.5 60 9 14 75 5 17 M8 x 1.25 depth 12 17 0.006 0.017 16.9 0 0.043 30 0 0.052 1/4 48 90 94 95 63 3 15 110 23.5 53.5 13 7.5 R8 70 9 16 88 5 19 M10 x 1.5 depth 13 25 0.007 0.020 24.9 0 0.052 45 0 0.062 1/4 60 103 120 125 4 78 11.5 140 30 65 7.5 19 80

Table of Contents

3, are required. 11-2-13 13 Series CRB2 Dimensions: 10, 15, 20, 30 Single vane type Following illustrations show actuators for 90 and 180 when B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

3, are required. 11-2-13 13 Series CRB2 Dimensions: 10, 15, 20, 30 Single vane type Following illustrations show actuators for 90 and 180 when B port is pressurized.