Stainless Steel One-touch Fittings Series KG

(mm) M5 Weight (g) D A Nylon Urethane M5 0.8 KGS04-M5 KGS04-01 KGS06-M5 KGS06-01 KGS06-02 KGS08-01 KGS08-02 KGS08-03 KGS10-01 KGS10-02 2.7 2.6 8 3.6 2.7 2.7 4.1 2.7 15.5 13 16 19 16.5 9.5 9.8 11.5 11.8 13.8 2.5 19 23 20 4 1 8 3 2.5 M5 0.8 14 3.2 9 15 12 11 24 18 12 10.0 10.0 9.9 1 8 1 4 1 8 1 4 3 8 1 8 1 4 6 4 20 17 24 10.7 17.2 5 24 19.5 21 26 21.5 28 25.5 27.5 30 14 8 18.5 16.2 23.3 6 17

KG

(mm) Connection thread R <M5> (1) A Weight (g) 2-applicable tubing L1 M D1 D2 L2 L3 Model Nylon Urethane MS KGY04-M5 KGY04-01 16 25.5 36 13 13.5 22 15 M5 x 0.8 3.5 4.6 4.6 9.5 7 1 8 4 13 M5 x 0.8 14 10 10 18 10.4 6.4 4.4 16 T 1 4 KGY04-02 26 38 19 4.3 12 KGY06-M5 KGY06-01 29 14 39 14.5 17.5 23 17.5 4.6 4.6 7 11.5 VMG 1 8 10 6 10 20 12.8 1 4 KGY06-02 27 41 17 17 14 13.4 10.6 20 3 8 KGY06

0.4

420 1 to 12 stations C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) 1 to 12 stations P kit: Flat ribbon cable 26P C8 (For 8) Side 20 420 1 to 9 stations 20P SS5Q13-SQ130 SQ131 J kit: Flat ribbon cable PC wiring system compatible 1 to 8 stations Option Built-in silencer, direct exhaust 20 420 F L3 (For 3.2) L4 (For 4) L6 (For 6) L5 (M5 thread) 1 to 12 stations L kit: Lead wire 35 460 kit

Floating Joint

-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 71000 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 7 8 8 11 11 11 14 14 19 24 24 24 36 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16 21 24 24 31 31 31 41 41 50

ZP

K 46 29.9 21 2.5 10 8 M5 x 0.8 16 46.5 30.4 21.5 20 25 57.6 39.8 29 3.5 12 12 M8 x 1.25 32 58.1 40.3 29.5 10 13 B5 M5 x 0.8 5 D2 Width across flats H 46 29.9 21 2.5 N S U F GN GS 10 8 M5 x 0.8 16 46.5 30.4 21.5 20 25 57.6 39.8 29 3.5 12 12 M8 x 1.25 32 58.1 40.3 29.5 40 60.6 42.8 32 4 50 61.6 43.8 33 20 25 B8 04 06 08 Construction p. 117 ZP R C B6 M6 x 1 6 Adapter Assembly p. 122 57.6 39.8

Modular F.R.L. Units

1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 B 87.6 115.1 147.1 149.1 C 9.8 14 18 20 D 20 26.7 35.5 35.5 E 30 38.4 38.4 G J 20 26.7 35.5 35.5 M 30 41 50 50 N 27 40 54 54 Q 22 23 26 25 R 5.4 6.5 8.5 8.5 S 8.4 8 10.5 10.5 T 40 53 70 70 U 2.3 2.3 2.3 2.3 V 28 30 35 34 AF20-A AF30-A AF40-A AF40-06-A 25 35 40 40 Model Semi-standard specifications With barb fitting With drain guide B 91.4 121.9 153.9 155.9

CG5-S

NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA Piping port 2-M5 x 0.8 Clevis pin ( ) GB MM CA CB D NA A CX + 0.2 + 0.1 U BA S + Stroke Z + Stroke ZZ + Stroke BB H R (mm) CD

Mechanically Jointed Rodless Cylinder Series MY1

GR-S-010 (10 g), GR-S-020 (20 g) Technical data 1071 Series MY1W Dimensions: 16, 20 L (LL) 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.

CG5-S

NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA Piping port 2-M5 x 0.8 Clevis pin ( ) GB MM CA CB D NA A CX + 0.2 + 0.1 U BA S + Stroke Z + Stroke ZZ + Stroke BB H R (mm) CD

5 Port Solenoid Valve Series SV1000/2000/3000/4000

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

VQZ1000/2000/3000

C6: One-touch fitting for 6 VVQZ2000-10A-2 VV5QZ22-05C 2-7-19 Body Ported 20 20 Series VQZ1000/2000/3000 Dimensions: VQZ1000 VV5QZ12Stations C Grommet (G) 27.5 (11) (35) 44.5 mounting hole n-C3, C4, C6, M5 20 (7.5) DIN rail clamp screw C3: One-touch fittings for 3.2 (5.5) C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread n Manual override 5 4 4 SMC SMC P = 10.5 47 2

Aluminum High Vacuum Angle Valve

65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Plug-in/Plug Lead: Single Unit

pilot port) With connector on D side (FD) 2-6-12 Base Mounted Series VQ5000 Plug-in Unit Bottom ported drawing With connector on U side (FU) 106 46.8 59.2 VQC 83.5 9 9 55.5 M5 ground screw 2n-Rc 1/2 4(A), 2(B) port SQ 34.5 VQ0 n U side X 12 VQ4 B 2 A 4 6 B A VQ5 B 2 A 4 VQZ 5 SMC SMC SMC SMC SMC B A VQD B 2 A 4 4 B A P = 41 L1 L2 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 A 4 B 2 1

Compressed Air Cleaning Filter Series

36 41 1/4, 3/8 172 18 145 90 20 90 10 222 80 28 8 7 7 14 7 12 50 80 95 34 5 2.3 32 37 42 41 3/8, 1/2 204 20 166 106 20 106 10 246 90 31 10 9 9 18 9 15 55 88 111 50 9 3.2 37 37 43 41 1/2, 3/4 225 24 200 122 20 122 15 278 100 33 10 9 9 18 9 15 65 102 126 60 10 3.2 39 37 51 41 3/4, 1 259 41 Micro Mist Separator with Pre-filter Series AMH Dimensions AMH650 Auto drain D: With auto drain (N.O.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ2000 Max. 24 stations Max. 20 stations C3, C4, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ2000 Max. 24 stations Max. 20 stations C3, C4, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

Table of Contents

20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows

VQ5000

106 46.8 59.2 9 9 U side 83.5 55.5 M5 ground screw 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 6 Indicator light B 2 A 4 A B 5 SMC SMC SMC SMC SMC A B B B B B B 2 A 4 Manual override A B 4 A L2 L1 58.5 P = 41 B 2 A 4 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P = 41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 17 22 51 69 117 D side 107.8 179 (Single, Double, 3 position, Rubber type) 184.5

Table of Contents

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2