0.55

15 to 102 (0.1 to 0.7) 22 to 102 (0.15 to 0.7) 22 to 145 (0.15 to 1.0) 15 tp 145 (0.1 to 1.0) 22 to 145 (0.15 to 1.0) 22 to 102 (0.15 to 0.7) 15 to 102 (0.1 to 0.7) 22 to 102 (0.15 to 0.7) 22 to 145 (0.15 to 1.0) 15 to 145 (0.1 to 1.0) 22 to 145 (0.15 to 1.0) Single Double Single Double Single Double 20 12 23 15 20 12 30 23 15 33 30 15 50 33 18 53 45 12 48 15 45 12 55 48 15 58 55 15 75 58

SMC Pneumatic Clean Series

14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18

Modular Type Regulators Series AR

17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.

MY2

steel Special resin NBR NBR NBR NBR NBR Description Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring No. 14 15 18 39 40 41 42 43 Qty. 1 1 2 2 2 2 4 2 22 Series MY2H Single Axis Type 16, 25, 40 MY2H G Bore size Stroke PG Q + Stroke (LL) L LA 4-B depth of counter bore C LD through hole 4-MM, depth M Cylinder mounting center line PA Work piece mounting center

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -

Compact Guide Cylinder

9.5 16.5 15 20 33 12.5 9.5 9.5 12.5 78 M5 16.5 16.5 23 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 15.5 8.5 25 18 25 38 11.5 9.5 12.5 11.5 90 M5 19 19 27 M6 x 1 15 M6 x 1 5.4 9.5 7 Rc1/8 NPT1/8 G1/8 12.5 11 30 22 Bore size [mm] R S T U VA VB WA WB X XA XB YY YL Z 10 st or less Over 10 st 30 st or less Over 30 st 100 st or less Over 100 st 10 st or less Over 10 st 30 st or less Over

ITV

Connection thread Recommended proper torque lbfft [Nm] M5 1.1 to 1.5 (1.5 to 2) 1/4 5.9 to 8.9 (8 to 12) 3/8 11 to 15 (15 to 20) 2. Do not allow twisting or bending moment to be applied other than the weight of the equipment. Provide separate support for external piping, as damage may otherwise occur. 3.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

x 0.8 15 4-M4 x 0.7 4-M3 x 0.5, depth 4 Bottom hole diameter 3.3 20 0.05 W (Plug: M-5P) D B 8 0.05 28 Piping port 2-M5 x 0.8 10 J 6 10 9.5 Across AA Mounting base side B D MXP10-20B Max. 15 Without magnet and switch rail 2-M3 x 0.5, depth 3.5 2-M2 x 0.4, depth 3 For magnet mounting For rail mounting 8 2.5 L 4.7 6-M3 x 0.5, depth 4 15 15 (mm) Model H N J K L M S V W Z MA MXP10-10B 32 6.5

Rotary Table/Rack & Pinion Style Series MSQ

x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 Rc 1/8 M10 x 1.5 15 M6 x 1 M10 x 1 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 Rc 1/8 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Dimensions (mm) Recommended flow m3/min (ANR) Model Port size R Effective area (mm2) Weight (g) A B C 1 8 ANB1-02 15 10 51 22 ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 1.2 or less 2.7 or less 3.8 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3

MRHQ

0.5 (attachment mounting screw ) M5 x 0.8 Finger closing port 0 -0.1 8 0 -0.7 14.9 closed 4 7 4-M5 x 0.8 depth 8 (two on opposite side) 18.8 15 Max. 7.3 42 22.5 M5 x 0.8 Finger opening port 3-R2 3 29 15 16 10 22 8 31 18 51.5 6 40 78 Angle adjustment bolt 2-5.5 through 2-9.5 depth of counter bore 3 3-R2 11 2 10 +0.03 0 3-4H9 long groove depth 4 (one each on three sides) 0 -0.062 47h9 M5 x

Stability of suction position,

ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-63BM Applicable pad part no. ZP3E-100UM ZP3E-80BM Part no. ZP3EA-P5 [Weight: 61.1 g] Part no. ZP3EA-P6 [Weight: 94.4 g] 16.3 58.8 16.3 72 R R 4.9 7.9 4.9 7.9 R R R R R R 81.5 66.3 Applicable pad part no.

VK3000

stations Applicable blanking plate assembly VK3000-7-1A 01 1 station Rc Q CE-compliant Nil CE-compliant F N T G 20 20 stations NPT NPTF A port: M5 x 0.8 B port: M5 x 0.8 Note) Applicable only for DIN terminal type How to Order Type 41: Base mounted (A, B port side ported) Applicable solenoid valve VK3140-(-Q) VK334-(-Q) Type VK3140 VV5K3 M5 05 41 Type VK334 Solenoid direction Valve stations

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

thread Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 By chamfering as shown in the table below, machining of threads is easier and effective for burr prevention.

KS/KX

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

MXW

26 103 6.5 Operating port M5 x 0.8 26 (Y) (Y) Operating direction (B) 5H9 +0.030 depth 4.5 0 (Plug: M-5P) Operating direction (B) (A) 9 8 10 15 15 10 7.5 19.2 A 35 26.5 20 Z A Cross section AA 3 4-M5 x 0.8 thread depth 10 3 x H G Bottom through-hole 4.2 H 6 5H9 +0.030 depth 4.5 0 F E 5H9 +0.030 depth 4.5 0 (mm) Model E G F H J Z MXW12-50 88 58 50 35 84 205 MXW12-75 103 63 55 40 89 230 Note

Air Slide Table Series MXW

Width across flats 8 5H9 + 0.030 0 depth 4.5 Operating port M5 x 0.8 6 x M4 x 0.7 thread depth 6 Note) A Operating direction (Insert) 6 (Plug: M-5P) 58 27 46 5 24 26 29 26 103 6.5 Operating port M5 x 0.8 Y Y 26 B Operating direction 5H9 + 0.030 0 depth 4.5 (Plug: M-5P) Operating direction B A 9 8 10 15 15 10 7.5 19.2 A 35 26.5 20 Z A Cross section AA 3 4 x M5 x 0.8 thread depth 10 3 x H G

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

18 16 21 9 9 66 36 84 12 17 17 11 16 25 to 500 21 (mm) Bore size (mm) H1 H2 I IA K MM NA NB NN P S T V W ZZ GB3 H -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 8 31 23f8 5 M8 x 1.25 17 15 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 10 41 25 6 8 34 25f8 5.5 M10 x 1.25 17 15 M24 x 1.5 1/8 81 11 3.5 5.5 143 10 46 32 8 9 40 31f8 7.5 M14 x 1.5 18 15 M30 x 1.5 1/8 87 13 3 4 159 10 53 40 10

VK3000

solenoid valve VK3140 VK334 Type 41: Base mounted (A, B port side ported) How to Order VFN Type VK3140 VV5K3 41 05 M5 Type VK334 Applicable blanking plate assembly VK3000-7-1A Solenoid direction Valve stations 01 Solenoid on same side of A and B port 1 station Nil P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Thread type R port: Rc 1/8 20 Solenoid on same side of A and B port 20 stations