Compressed Air Preparation Filter

35 25 6.5 13 71 2.3 32 AMK40-D 1/4, 3/8, 1/2 70 212.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 AMK50-D 3/4, 1 90 222 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 AMK60-D 1 90 299.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 Semi-standard specifications Metal bowl B AMK20-D 139.1 AMK30-D 167 AMK40-D 212.4 AMK50-D AMK60-D Model Accessories Sold Separately/ International Standard

ZQ-OM01401

) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25

CRQ2

38 47.5 Reed switches A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 Rotation angle Size Operation range m Operation range m Switch actuation range Switch actuation range B 13 22.5 18 30.5 34.5 53.5 45 68 53 81.5 B 17 26.5 22 34.5 38.5 57.5 49 72 57 85.5 90 63 12 75 3 10 180 90 52 9 69 3 15 180 A 90 B 41 9 56 4 20 180 90 32 7 43 3 30 180 90 Operating range at proper mounting position (Lm/2) 24 5

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

3 0 +0.2 +0.1 12 16 36 26 4 x M4 x 0.7 thread depth 5 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 41 30 12 18 4 4 5 M5 x 0.8 (Finger opening port) 20 9 6.45 6 MHW2-20D1 Right angle finger type 31 15 10 11 14 5 28 16 41 4 x M4 x 0.7 through (Thread for mounting attachment) 714 MHW2 Series 180 Angular Type Air Gripper Rack & Pinion

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

28.5 3.5 65 5.0 5.0 27 9.5 M4 x 0.7 2 6 18 61 6.0 M4 x 0.7 13.5 61 41.5 5.5 95 7.5 7.4 37 14.0 M5 x 0.8 2 8 25 89 9.5 M5 x 0.8 20.0 90 58.0 8.6 160 12.0 12.0 54 18.0 M6 x 1 2 12 38 138 14.0 M6 x 1 27.0 134 68.0 11.0 220 22.0 16.5 84 20.5 M8 x 1.25 3 16 60 178 17.0 M8 x 1.25 31.0 NE NG NH NW PA PB PC PD PF Q QW T TT UU YW Z P PE PG Model MY3B16 MY3B25 MY3B40 MY3B63 M5 0.8 4.0 122 42 30 6.5

PSxx-OMS0006CN

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

Slider Type Ball Screw Drive/11-LEFS Series

) [39] 39 [(41)] Stroke (2.4) 7 65 [Origin] Note 4) Origin Note 3) 27 4 [2] 2 [4] 9.2 Motor cable (2 x 5) 46 6 20 33 40 Vacuum port M5 x 0.8 x 5 6.5 5.5 M4 x 0.7 thread depth 7 (F.G. terminal) Motor option: With lock Step motor Servo motor Cable length 250 (152) 15 15 65 20 20 20 24 20 Lock cable (3.5) 24 ( ) +0.025 0 3H9 depth 3 n x 3.5 4 34 100 D x 100 (= E) 8 F B Note 1) When mounting

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

38 47.5 Reed switches A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 Rotation angle Size Operation range m Operation range m Switch actuation range Switch actuation range B 13 22.5 18 30.5 34.5 53.5 45 68 53 81.5 B 17 26.5 22 34.5 38.5 57.5 49 72 57 85.5 90 63 12 75 3 10 180 90 52 9 69 3 15 180 A 90 B 41 9 56 4 20 180 90 32 7 43 3 30 180 90 Operating range at proper mounting position (Lm/2) 24 5

CQM

Data 7-5-13

RB/RBL/RBQ

C J G5-S Material: Carbon steel Material: Polyurethane (mm) (mm) (mm) CV MM A B M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 B 3.5 4.5 5 6 6.6 C 22 27 32 41 41 h1 25.4 31.2 37 47.3 47.3 C 4 8 8.3 11.3 13.1 C 22 27 32 41 41 B 6 6 6 6 6 h M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 MM Part no. Part no. Part no.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option

Process Pump

7.5 45 2 x 4.5 Mounting hole Manual override pin 66 16 16 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 76 64 7.5 52 37 20

VCB

8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

CU

) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth

SFOD-OMT0009CN

4 (+)(-) 20 M PWR 3 4 )5. 26 No.SFOD-OMT0009CN-B 4.3 (1) 5.5 (2) DIN 27 No.SFOD-OMT0009CN-B 4.4 (1) DIN (a) (4 M5 ) (M5)X4 (b) DIN DIN DIN (M5X8) DIN 2 4 3.0[Nm] M5X8 DIN 1 2 2 3.0[Nm] DIN M5X14 A DIN B DIN DIN (M5X14) 0.40.6 [Nm] 0.40.6[Nm] 28 No.SFOD-OMT0009CN-B A B M5X14 (2) M3 29 No.SFOD-OMT0009CN-B (1) D (100) 2 (2) 2mm D : : (3) 40 50mm ()100mm , 100

HRX-OM-W032

Switch Terminal No.5 Mount for cable tie Terminal No.13 Terminal No.3 Note: Prepare a cable tie. Fasten the signal cable to the mount the base with the cable tie.

3 Position Cylinder Series RZQ

RZQ mounting bolt C CR D 110 135 160 120 145 170 130 155 180 135 160 185 CH Model RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75Mounting bolt M5 x 110l M5 x 135l M5 x 160l M5 x 120l M5 x 145l M5 x 170l M6 x 130l M6 x 155l M6 x 180l M8 x 135l M8 x 160l M8 x 185l 9.5 8 10 8.5 16.5 11.5 3 17.5 12.5 3.5 4 Series RZQ Model Selection

Rotary Gripper Series MRHQ

10 3-3H9 long groove depth 3 + 0.025 0 M5 x 0.8 37h9 0 0.062 Port A M5 x 0.8 (one each on three sides) Port B 4-M4 x 0.7 Depth 6 N I J E A D P A A M N R R SMC E O P T P A I R R 6 G Y R A I 18 2 6 21 9 5 23 5 Side A Side B Scale: 60% 9 Series MRHQ Rotary Gripper Dimensions (mm) 1in = 25.4mm Scale: 60% MRHQ16 A B 41 50 66.5 30 4-M5 x 0.8 Depth 6 47h9 0 0.062 20.6 opened 5 0 0.1 8 4-M3

5 Port Solenoid Valve SY Series

M5 port block assembly Pilot valve assembly A Bracket Assembly No. B Description No. Caution 3 5 7 SX 000-16-1A (with mounting screw) 3 5 7 SY9000 has no bracket.

3 Port Air Operated Valve Series SYJA300 1

x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting