VHK

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

SQ1000/2000

A 23 6 () 11 Station 8 SOL.

CY1

36 7.5 28 M6 x 1x 8 11 9 CY1RG25 3 1 9.5 5.2 27.8 6 44 42.5 44 41 23.5 43 14.5 41 6.5 33.5 M6 x 1 x 8 15 8.5 CY1RG32 3 1.5 11 6.5 35 7 55 53.5 55 52 29 54 20 51 7 41 M8 x 1.25 x 10 13 10.5 CY1RG40 5 2 11 6.5 43 7 65 63.5 67 62 36 66 25 62 8 50 M8 x 1.25 x 10 15 13 CY1RG50 5 2 14 8.2 53 8.5 83 81.5 85 80 45 84 32 80 9 56 M10 x 1.5 x 15 25 17 CY1RG63 5 3 14 8.2 66 8.5 95 93.5 97 92 51 96 35

One-touch Fittings

13.3 13.3 3.4 1 1/4 5/16 KQ2N07-09 41.5 13.3 13.3 4.6 1 3/8 KQ2N07-11 45 15.6 13.3 4.6 1 5/16 3/8 KQ2N09-11 46.5 15.6 14.2 6 1.8 1/2 KQ2N09-13 47.5 17 14.2 6 2.6 3/8 1/2 KQ2N11-13 50 17 15.6 7 3.2 Color Cap: KQ2C Applicable tubing O.D.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

11 HP 11 14.5 20 25 HR 30 36 41 51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB

Battery-less

Brown 12 Black 13 Red 7 Black 6 Orange 9 Black 8 Yellow 11 Black 10 Black 3 Robotic cable A B-2 A A-2 B B-3 B A-3 SD+ (RX) B-4 SD (TX) A-4 Signal Connector C terminal no.

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

3 Port Air Operated Valve Series SYJA300 1

Refer to page 5-11-4.)

Basic type / Direct mount type Series CY3B/CY3R

25 24 B 6.5 8 9.5 9.5 11 11 14 14 F 6.5 8 9 8.5 10.5 13 17 18 HP 11 14.5 20 25 32 35 HR 24 30 36 41 51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CYP QW 14 18 17 20 26 34 48 60 PW 26 32 38 43 54 64 82 94 Q 68 84 95 105 116 134 159 171 N 4.5 6 7 6.5 8.5 11 15 16 WP 13 16

VZ100/300/500

Manifold base VV3Z5-20 VV3Z5-21(R) VV3Z5-40 VV3Z5-41(R) Applicable base Sub-plate VV3Z5-40-2 VV3Z5-41-2 VV3Z5-41-1 VV3Z5-41R-2 VV3Z5-41R-1 DXT201-15-6A Applicable base VV3Z5-20-1 VV3Z5-21-1 VV3Z5-21R-1 Manifold base Manifold base DXT201-15-4A Note) Only in the case of assembled with manifold base at the time of shipment.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

11 33 11.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

19 20.6 6 30 1/4 19 40 76.7 42 9 21 22.2 22.2 7.6 3/8 22 48 79.7 11 19 20.6 6 Size Port size Grommet Grommet with PCB Conduit J K J K J K 20 1/8 39.4 28.5 45.2 38 46.8 48.9 1/4 37.9 43.7 45.3 3/8 40.9 46.7 48.3 30 1/4 39 31.1 44.7 41 46.3 51.9 3/8 42 47.7 49.3 19 Direct Operated 2-Port Solenoid Valve JSX Series JSX20, 30 Dimensions: JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Brass

Modular F.R.L. Units

Note 11) : For thread type: NPT only.

ZP

A B D A B D Model Model ZP3-T13B;3-B5 ZP3-T13B;6-B5 ZP3-T13B;10-B5 ZP3-T10B;3-B5 ZP3-T10B;6-B5 ZP3-T10B;10-B5 8.5 9.7 11.7 8.6 9.8 11.8 8.6 9.7 11.7 8.7 9.8 11.8 15 18 22 34.5 41 51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Sine Cylinder Series REC

4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8 37.5 5.5 8 32 42.5 M26 x 1.5 1/8 41 217 159 M10 x 1.25 22 6 8 46.5

Sine Cylinder Series REC

4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8 37.5 5.5 8 32 42.5 M26 x 1.5 1/8 41 217 159 M10 x 1.25 22 6 8 46.5

Sine Cylinder Series REC

4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8 37.5 5.5 8 32 42.5 M26 x 1.5 1/8 41 217 159 M10 x 1.25 22 6 8 46.5

Aluminum High Vacuum Angle Valve

65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

MNB

1/4 12.5 18 65 120.5 58.5 15 46.5 104.5 15.5 19 40 32 20 14 90 63 to 600 35 27 11 1/4 17.5 18 75 134.5 68 12 56.5 119.5 16.5 23 45 37 25 20 102 80 to 750 40 32 13 1/4 22 22 95 169 81 18 72 150 19 33 45 37 30 20 116 100 to 750 40 41 16 1/4 25 26 114 189 96 20 89 170 19 37.5 55 T ZZ GE GF J MB K N S V GR MM P Q H VA W Bore size (mm) 34 205 32 88.5 18.3 M6 x 1.0 4 6 27 154 6.5 4 M10 x 1.25