Ionizer

End bracket/IZS31-BE When mounted outside in (33) Position Detection Switch Flow Sensor Pressure Control Pressure Sensor 31 31 22 4.5 2 x 5.4 22 4.5 32 20 Ionizer 27 2 100 Hexagon socket head cap screw M4 x 6 (Accessory) 6 Ionizer full length (L) Angle adjustable (90) (31) 12 2 Angle adjustment range is 45.

Table of Contents

M3 screw For details on specifications and handling, refer to the separate technical instruction manual.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Compact Type

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through

Compact Type Dual-Rod Cylinder Series CXSJ

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF XA XB XC YA YB YC Size 3.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 20.5 60

PSxx-OMR0001CN

DCVX2 (2 )VX2 -37No.PS-OMR0001CN-J 3 ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 2.6 ISA-14 -38No.PS-OMR0001CN-J 3 () ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 ISA-20 E210-U01 2 ISA-17 2.6 2.6 Y200T-A -39No.PS-OMR0001CN-J 3 () 2 2 E210-U01 ZS-31-C ZS-31-C ZS-31-B Y200T-A Y200T-A ISA-18 2.6 ISA-15 ISA-16ISA-17 ISA-12-40No.PS-OMR0001CN-J 4 80 kPa220 kPa

Slider Type Ball Screw Drive/11-LEFS Series

Compatible Driver Pulse input type/ Positioning type Pulse input type CC-Link direct input type SSCNET # type Driver type Series LECSA LECSB LECSC LECSS Number of point tables Up to 7 Up to 255 (2 stations occupied) Pulse input v v Applicable network CC-Link SSCNET # Control encoder Incremental 17-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Communication

7

+0.027 0 Shaft: 18 0.050 0.093 4 x M6 Thread depth 15 28 +0.5 +0.1 129 + Stroke 55 75 110 MK 258 + Stroke 2 x M6 Thread depth 6 Press-fit spring pin 3 x 38 L MK2T CK1 CK1 36 17 Hole: 18 +0.027 0 CLK2 Shaft: 18 0.050 0.093 33 34 CLKG 28 +0.5 +0.1 34 47 CKQ CLKQ CK CLK 24 75 55 CKQ 17 21 71 90 2 x M6 Thread depth 6 Double knuckle joint CKPA80 Built-in strong magnet type/with magnetic field

Clamp Cylinder Series CK1

R24 Shaft: 18 0.050 0.093 28 +0.5 +0.1 4 x M6 Thread depth 12 61 129 + Stroke 110 85 259 + Stroke Shaft: 18 Hole: 18 +0.027 0 0.050 0.093 2 x M6 Thread depth 6 Press-fit spring pin 5 x 40 L 38 17 32 37 48 24 28 +0.5 +0.1 85 61 25 70 90 Double knuckle joint CKPA100 Built-in strong magnet type / with magnetic field resistant auto switch (D-P79WSE type) 56 63 56 + Stroke 34 Speed controller

E-P HYREG

(VY1A01 only) M5 external pilot port Foot (Option) Port 1 (P), 2 (A), 3 (R) 3 x M5 VEXA-18-3A Hexagon socket head cap screw M3 L = 8 (2 pcs.) (With spring washer) ( ) 2 x 4.5 Mounting hole VEXA-18-2A Bracket (Option) Hexagon socket head cap screw M3 L = 8 (2 pcs.)

IZx-OMP0064

Dimensions Ionizer/ IZS40 340 5 340 400 6 400 460 7 460 580 9 580 640 10 640 820 13 820 1120 18 1120 1300 21 1300 1600 26 1600 1900 31 1900 2320 38 2320 2500 41 2500 bar length Model Symbol for n (No. of cartridge), L IZS40 fitting A (mm) 06 13 08 15 10 22 Symbol for A Ionizer/ IZS41, IZS42 340 5 340 400 6 400 460 7 460 580 9 580 640 10 640 820 13 820 1120 18 1120 1300 21 1300 1600 26 1600

VQ5000

Mounting screw (M4) Terminal block cover M3 Screw Gasket 6mm Electrical entry 2-G3/4 Step 3. How to attach the terminal block cover Securely tighten the screws with the torque shown in the table below, after confirming that the gasket is installed correctly.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C4, C6, M5 C3: One-touch fitting ass'y for 3.2 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 C6: One-touch fitting ass'y for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) 21.5 Dimensions Equation L1 = 11n + 20 n: Station (Max. 24 stations) 7.5 L n 1 2 3 4 5 6 7 8 11 9 10 12 29 18 31 42 53 64 75 86 97 108 141 L1 L2 L3 119 130 152 50 62.5 75 87.5 100 112.5 125 125 162.5

Low Profile Guide Type

Find the value of M1 max at 300 mm/s in Graph (1). 2a =M1/M1 max =1.47/14 =0.105 M1 L1 M3 = m x g x L2 = 3 x 9.8 x 0.04 = 1.176 [Nm] m x g Investigate M3. M3 Find the value of M3 max at 300 mm/s in Graph (3). 2b = M3/M3 max = 1.176/14 = 0.084 L2 m x g 3.

3 Port Solenoid Valve SYJ300/500/700 Series

Body ported type M3 0.5 0.9 (0.05) 31 29 SYJ322 N.O. SYJ314 N.C. 52 (Without sub-plate 31) 50 (Without sub-plate 29) Base mounted type (With sub-plate) M5 0.8 1.8 (0.1) SYJ324 N.O.

SZ3000

Since terminal numbers are not indicated on the flat cable, use the triangle mark as a reference when wiring. 7 Series SZ3000 Manifold Electrical Wiring 60PG Flat cable type (20 pins) Without power supply terminals With power supply terminals Positive common Negative common Common 20 20 20 Pos. pin (common) Pos. pin 19 19 19 SOL.B 18 18 Neg. pin Neg. pin (common) Station 9 18 SOL.A 17 17

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Mounting screw (M4) Terminal block cover M3 Screw Gasket 6mm Electrical entry 2-G3/4 Step 3. How to attach the terminal block cover Securely tighten the screws with the torque shown in the table below, after confirming that the gasket is installed correctly.

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

15 260.5 250 233 14 16 273 262.5 243.5 15 17 285.5 275 254 16 18 298 287.5 264.5 17 19 310.5 300 275 18 20 310.5 300 285.5 12.5 L1 L2 L3 L4 26 5 Port Solenoid Valve Series SZ3000 Serial Transmission Type 60S How to Order SS5Z360S D Q U 05 Options Compatible equipment When a DIN rail is required that is longer than the standard types, specify the number of stations.