Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

10 + 1/2ST 2-3.4 through 2-6.5 counter bore depth 3.3 3 3 OUT 9 2-1.2 x 12l AW (spring pin) 1 (16) 5.6 3.2 28 0.2 28 0.2 22.7 37 35 16 6.3 5 2.1 M3 x 0.5 x 12.5l and M3 x 0.5 (hexagon bolt) (hexagon nut) 6 2-M3 x 0.5 (through) 2-M5 x 0.8 thread depth 4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

x 0.5 28 32 8.5 24 60 0.5 18 3 21.5 2 20 4 12 M6 x 1 (Width across flats 3) M8 x 1 (Width across flats 4) MXY8 M4 x 0.7 29 40 30 10 70 3.5 20.9 4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3

CE2

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

MHY2/MHW2

Work weight: 0.05kg Example 25 Pressure 0.6MPa 20 0.5 0.4 Holding force (N) 15 13 0.3 10 0.2 5 0.1 Ex.)

F

, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E S (N)AS4000 D I M E N S I O N S S E R I E S (N)AS1000-M3 1.5MPa / 220PSI Proof Pressure 1MPa / 145PSI Max Operating Pressure 0.05MPa / 8PSI Min Operating Pressure 5 ~ 60OC / 40 ~ 140F Ambient and Fluid Temperature

MGQ

(Refer to page 8-31-1.)

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF XA XB XC YA YB YC Size 3.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 20.5 60

LEF-OM006xx

INP 1 INP ON 0.50 -35- 6.3 0.1mm [Nm] mm LEF16 M4x0.7 1.5 6 LEF25 M5x0.8 3.0 8 LEF32 M6x1 5.2 9 LEFS40 M8x1.25 12.5 14 A A mm) mm LEF16 M3 3.5 20 LEF25 M4 4.5 24 LEF32 M5 5.5 30 LEFS40 M6 6.6 31 40mm 6.4 6 /1000km /500 -36- 1. 2. 3. 1. 2. a. b. c. d.

VQC

IP40 compliant SD0 SDA1 SDA2 Serial kit without SI unit Serial kit for Remote I/O 1 to 8 stations (16 stations) FD0 FD1 FD2 FD3 AS-i, 8 in/out, 31 slave modes, 2 power supply systems 1 to 4 stations (8 stations) D-sub connector kit (25P) without cable IP67 compliant Serial unit: EX126 AS-i, 4 in/out, 31 slave modes, 2 power supply systems 1 to 2 stations (4 stations) D-sub connector kit (

Rotary Gripper Series MRHQ

Unit: g (oz) D-F9N (V) D-F9BV D-F9PV D-F9NV D-F9B D-F9P D-F9N Type 6 (0.21) 7 (0.25) 7 (0.25) 6 (0.21) 7 (0.25) 7 (0.25) Lead wire length 0.5m DC (+) Brown [Red] 31 (1.09) 37 (1.31) 37 (1.31) 31 (1.31) 37 (1.31) 37 (1.31) Lead wire length 3m Main switch circuit Auto Switch Dimensions (mm) OUT Black [White] 1in = 25.4mm D-F9N, D-F9P, D-F9B DC () Blue [Black] D-F9P (V) DC (+) Brown [Red] Main

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Display (PF2D30/31) 40 Sensort 15 Brown 6 2 Analog output Switch output or Pluse output Main circuit Main circuit Main circuit Main circuit 8 4 Load + 12 to 24VDC White 7 3 Black A 62 52 42 5 1 Blue Model A PF2D5--1 PF2D520 12.7 PF2D504 4-4.5 9.52 Display (PF2D30/31) Sensor Brown 52 1 2 6 Analog output Switch output or Pluse output 4 8 Load + 12 to 24VDC White 3 7 Black 1 5 Blue 18 PF2D5

VCA

Terminal cover Round head combination screw M3 Tightening torque 0.5 to 0.6Nm A G1/2 Tightening torque 0.5 to 0.6Nm + mark mark 2 1 + A Round head combination screw M3 Tightening torque 0.5 to 0.6Nm Electrical Connections Conduit terminal Caution View A-A (Internal connection diagram) Grommet There is polarity only when equipped with light.

RZQ

40 44 35 36 42 38.5 41.5 37.5 30.5 32.5 30 50 50 41 42 48 44.5 47.5 43.5 36.5 38.5 36 63 56.5 47.5 48.5 54.5 51 54 50 40 42 39.5 10-10-13 14 Series RZQ Mounting of Auto Switch Follow the procedures below to mount auto switches.

Digital Flow Switches Series PF2A

(Fixed SI unit [(l/min, or l, m3 or m3 x 103)] will be set for switch type without the unit switching function.) Note 3) The high flow rate type is CE marked; however, the linearity with applied noise is 5% F.S. or less. Note 4) Switch output and accumulated pulse output selections are made using the button controls.

Compact Cylinder with Air Cushion Series RQ

Auto switch mounting screw (M3 x 0.5 x 10l) Auto switch spacer Auto switch mounting nut 4 Series RQ Dimensions/20, 25 Refer to pages 12 and 13 for proper auto switch mounting positions and height.

Dedicated Controller

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 Model Applicable bolts Max. tightening torque (Nm) MHY2-10D MHY2-16D MHY2-20D MHY2-25D Model Bore(mm) Hole depth (mm) Attachment MHY2-10D MHY2-16D MHY2-20D MHY2-25D 11H9 17H9 21H9 26H9 1.5 1.5 1.5 1.5 +0.043 0 +0.043 0 +0.052 0 +0.052 0 0.88 2.1 4.3 7.4 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 (1) To mount the attachment to the finger, make sure to use a wrench

Modular Type Filter Regulator Series AW

Note 2) When the compressor oil mist discharge concentration is 30mg/m3 (ANR). Note 3) Bowl O-ring and other O-rings are slightly lubricated. Note 4) When the outlet pressure is 0.5MPa. (The rated flow varies depending on the set pressure.) Keep the air flow within the rated flow to prevent an outflow of lubricant to the outlet side.

Thermo-chiller/Rack Mount Type

Standard EIA standards, RS-232C (ASCII mode/RTU mode) RD 2 RD 2 SD 3 SD 3 Circuit diagram SG 5 SG 5 This product Master Be sure to wire to the correct pin numbers according to the diagram. 5 1 9 6 D-sub 9-pin female (socket) type Communication connector 31 HRR Series Options Options have to be selected when ordering the thermo-chiller.