Rotary Table

Note 1) When using D-F8, mount it at a distance of 10mm or more from magnetic substances such as iron. -18- Specifications Table 1.

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

IDX-OM-W017

IDFA4E15E1 L N PE M3 6.5mm 1.25mm 2 1-1 IDFA Series 1 4 IDX-OM-W017 2 2 , 2 1 IDFA4E15E 20kg 2 2 2 2 2 1 2000m 240 050 600mm 600mm 600mm ( 600mm ) 600mm 2-1 IDFA Series 2 1 IDX-OM-W017 2 2 2 2 6 6-2 IDFA4E15E 2 2 3 50 50 2 2 4 10mm 2-2-2 IDFA Series 2 2 IDX-OM-W017 2 ( 2 2 5 6-1 IEC AC230V 30mA 5A 216AWG,3 ,812 1.25 0.1m 30m M3 1.25-3 6.5mm ()M3 0.61Nm

Electric Actuator / Slider Type 《 AC Servo Motor 》

Please change the parameter in the initial setting. * For LECSS-T, please set the electronic gear with PC, PLC etc. in your application. 18 - 2.

Lightweight and Compact

In locations where there is not sufficient space for maintenance. 18. Bevelled place 19. Insects or plants may enter the unit. 2. The product is not designed for clean room usage. It generates particles internally. 88 HRS090 Series Specific Product Precautions 2 Be sure to read this before handling the products.

Process Pump

E 41 SN LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tubing size Metric size Inch size Applicable process pump Applicable process pump Applicable Applicable Reducing Reducing Class No.

EX500-GPR1A.eng

L3 [mm] 67 88 109 130 151 172 193 214 L2 [mm] 72 93 114 135 156 177 198 219 L1 [mm] 83 104 125 146 167 188 209 230 M3 18 : 2 pcs. ( Hexagon socket head cap screw ( with spring washer )) Note NOTE Holding with hand so that there will be no gap between units and tighten the bolts.

ISA2

(Refer to the page 16-8-18.)

PSxx-OMM0006CN

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Item CH2 measured value: 16-bit signed integer Bit offset 47 46 45 44 43 42 41 40 39 38 37 36 35 34 33 32 Item CH32 measured value: 16-bit signed integer Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item CH4 measured value: 16-bit signed integer Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Error diagnosis CH4 diagnosis CH3 diagnosis CH2 diagnosis CH1 diagnosis Reservation

PFxx-OMS0001CN

(2 ) (71 ) 0.50.7 Nm M3 -16No.PF-OMS0001CN-A IN8cm 2F.S.

ML1

30 6.8 6.6 12 16 M6 X 1 M8 X 1.25 116.5 14 372 354 186 190 124 158 118 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 X 1.25 M10 X 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 30.5 6 5 6 5 8 47 17 62 30 22 16.5 170 51 4.7-8 Hy-Rodless Cylinder SeriesML1 Stroke

PF2D

Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ZSE ISE ON YES OFF P-1 P-2 GPM gal (US) PSE Real-time flow rate GPM = gal (US)/min P Window comparator mode H: Hysteresis Z I SE3 Note) Fixed SI unit (l/min, l, m3 or m3 x 10) will be set for the type without the unit switching function.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA 2H9 2H9 3H9 TB 5 6 6 SC 8 9.5 10 RB 16 18 22 RA 18 24 26 WA VB 2 2 3 XA 2H9 2H9 3H9 XB 2 2 3 +0.025 0 +0.025 0 +0.025 0 +0.043 0 +0.052 0 +0.052 0 +0.025 0 +0.025 0 +0.025 0 17H9 21H9 26H9 5 2 Finger Air Gripper Series MHS2 Dimensions (mm) 1in = 25.4mm MHS2-32D, 40D 2-SA, counter bore dia.

HRX-OM-X084

TEMP READY bandwidth lower limit (Setting range -9.9 to -0.1) RUN READY LBAND(Alternately displayed) HRR Series 5.5 Advanced setting mode 5-27 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions TEMP READY stability time 18. Press the [] key. Displays TEMP READY stability time setting screen.

JXCx-OMT0005CN

No.JXC-OMT0005CN-A DeviceNet (DC24V) // JXCD1 1. . 4 2 . 6 2.1. . 6 2.2. . 7 2.3 . 8 2.4 () . 9 1 . 9 2 . 9 3 . 9 4PLC . 9 5 . 9 6 . 10 7 . 10 8() . 11 9 . 11 3 . 12 3.1. . 12 3.2 . 13 3.3. . 14 3.4. . 16 (1) . 16 (2) . 16 (3) . 17 4 . 18 4.1 Node Address/Data Rate . 18 4.2 . 19 4.3 DeviceNet . 19 1Step Data Class 67h . 19 2IO Class 68h . 20 3IO . 21 4IO . 21 5 . 23 5.1 PWR

HRX-OM-X071

Fluid leakage Not present Present/ Humidity Temperature Performed by Date Right after setting up (initial value) HRR Series 9.9 Daily Check 9-17 HRX-OM-X071 Chapter 9 Documents 9.9 Daily Check HRR Series 9-18 HRX-OM-X071 Chapter 10 Product Warranty Chapter 10 Product Warranty 1.

Peltier-type Chiller Thermo-con/ Compact Type

Tank capacity Approx. 110 mL Port size Rc1/4 Fluid contact material Stainless steel, EPDM, NBR, Ceramics, PPE, PPS, Carbon, PP , POM Power supply 24 VDC 10% Electrical system Power consumption 12.5 A (Peak current 18 A) Alarm Refer to Alarm.

VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

End Lock Cylinder Series CBG1

With front lockR (mm) Bore size (mm) W P WA WB WH 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 Dimensions inside ( ) are for long strokes.