Rotary Clamp Cylinders

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 50 7 46 13 350 345 63 17 46 25 350 531 40 6 21 7 200 198 20 6 10 2 100 133 25 7 10 3 100 153 32 7 21 5 200 166 16 32

70pvpump

kPa 27 to 80 kPa 4.5 to 28 VDC (ZSM1-115) to 100 VDC to 100 VAC 24 to 125 VDC 100 to 250 VAC 24 to 220 VDC 100 to 550 VAC Voltage 100 VAC/DC or less (ZSM1-121) Repeatability 0.05 MPa 0.05 MPa 3% F .S. 3% F.S. 3% F.S. 3% F.S. 10% F.S. 15 kPa or less (ZSM1-115) 0.02 to 0.35 MPa (Without pointer scale) 0.03 to 0.4 MPa (Without pointer scale) Hysteresis (Calibration range of ISG) 0.08 MPa or

240

or less 100 70 30 3 100 15 1 LEC 11.

Rotary Table/Rack & Pinion Style Series MSQ

Load A Displacement MSQ1A MSQ10 MSQB10 (Basic type) MSQB1A (Basic type) 100 Displacement m Displacement m 400 80 MSQA1A (High precision type) 60 350 40 10 20 30 40 MSQA10 (High precision type) 20 0 5 10 15 20 25 30 0 9 8 7 6 5 4 3 2 1 Load N Load N MSQ2A MSQ20 300 MSQB20 (Basic type) MSQB2A (Basic type) 100 Displacement m Displacement m 80 250 60 MSQA2A (High precision type) 10 20 30 40 190

SYJ300/500/700

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

Rotary Table/

type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement m Displacement m 90 150 80 120 50 MSQA50 (High precision type) 70 60 0 0 20 40 60 80 100 120 6 8 10 14 12 2 4 Load N Load N 5 Rotary Table Air Consumption Air consumption is the volume

Compact and Lightweight

20 50 20 20 ZHP ZU 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 20 40 60 80 Supply pressure [MPa] 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 20 40 60 80 100 120 140 0 0 Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] Supply pressure [MPa] VQD-V ZH20SA ZH20LA Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate Characteristics 100 100 100 250 100 250 Air consumption

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

0 5 10 15 20 25 30 CRA1 0 9 8 7 6 5 4 3 2 1 Load N Load N MSQ2A MSQ20 CRQ2 MSQ 300 MSQB20 (Basic type) MSQB2A (Basic type) 100 MRQ Displacement m Displacement m 80 250 D60 20MSQA2A (High precision type) 10 20 30 40 190 200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Weight (g) LOW type H 100 30 30 100 24 54 T 50 50 29 70 66 66 W L1 L2 127 (159) 132.5 (160) 147.5 (182.5) 253 (295) 118.5 (216) 183 (215) 258.5 (286) 204.5 (239.5) 234.5 (269.5) 1110 (1350) 740 (950) 900 (1140) 910 (1120) 1670 (2190) 1840 (2350) Values in ( ) for specification with lock 1 Pin Clamp Cylinders Series C(L)KQG32/C(L)KU32 New New New New !

VZ100/300/500

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

SI unit for DeviceNet ®

Maximum cable length for network Communication speed Drop line length Cumulative Drop Thick cable Thin cable 500 kbps 100 m 100 m 39 m max 250 kbps 250 m 100 m 78 m max 6 m or less 125 kbps 500 m 100 m 156 m max Terminating resistors DeviceNet requires a terminating resistor to be installed at each end of the trunk.

Series CE1

, 125, 150, 175, 200, 250, 300 100, 125, 150, 175, 200, 250, 300, 400, 500 32 131 90 27 16 45 49.5 64 M14 X 1.5 14 4.5 14 40 177 136 27 16 52 57 71.5 M14 X 1.5 24 5 14 50 63 200, 300, 500 193 144 32 20 64 71 85.5 M18 X 1.5 22.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 X 1.5 21 7 18 P T* X M N O Q Z L Bore size (mm) 32 40 50 63 Rc(PT) 1/8 57.5 41 34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5

A

283 59 112 Flow rate quoted at: 0.5MPa supply 0.03MPa pressure drop NAL900 100 288 63 2 H O W T O O R D E R L U B R I C AT O R S E R I E S AL AL800-12 (1 14 PT) AL800-14 (1 12 PT) AL900-20 (2 PT) Courtesy of Steven Engineering, Inc. !

q"s

Relief flotv characledstics suppry pressurc: i .0 r pa Pressure characteiistics sei plessu:0.4 Mpa Flow characteristics supp y pGssure: 1.0 M Pa 1 0.9 0.8 d : 0 . 7 0 6 0 .s 'rt E o.+ 0 0.1 0.0 0.0" " " o 50 100 150 200 250 300 o 1 0.6 0.8 1 1.2 Supply pfessure (lvlPa) 50 100 150 200 250 Frow rale (4min (ANB)) Series lTV205n Hysteresis Linearity Repeatability 0.9 0.8 o.7 ii 0.6 3 o.s : 0.4

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

Rubber bumper (Magnet type) Standard Strokes Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 50, 100, 150, 200 Made to Order Made to Order: Individual Specifications (For details, refer to pages 1507 and 1508.) 300 6 50, 100, 150, 200, 250, 300 500 Symbol Specifications 10 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Air-hydro 50, 100, 150, 200, 250, 300, 350, 400, 450

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Standard stroke 6 10 15 20 25 32 40 50 63 6mm 10mm 15mm Port thread type 20mm Bore size 6, 10, 15 Type M thread Rc NPT G Symbol 25mm 32mm Nil 20, 25, 32, 40 40mm TN TF 50, 63 50mm 63mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 50, 100, 150, 200 6 500 50, 100, 150, 200, 250, 300 10 15 20 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

HRL

Technical Data HRS-R HRS HRS090 HRS 100/150 HRS200 HRSH090 HRSH HRSE HRR HRL HRZ HRZD HRW HECR HEC HED HEB Lots of variations are available according to the users requirements.

VZ3000

(W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.