VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 100 Non-lube Double acting, Double rod (40 to 63) 20 25 32 40 50 63 80 100 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20 25 32 40 50 63 80 100 Size Suction flow rate L/min (ANR) 20/25/32/40 50/63/80/100 1.5 MPa 1.0 MPa

Smooth Cylinder

CAT.ES20-178 A Smooth Cylinder Minimum 0.01 to 0.03 MPa operating pressure Minimum Minimum 0.01 to 0.03 MPa operating pressure 0.04 Minimum operating pressure MPa 12 16 0.03 20 25 32 40 0.02 50 63 80 100 0.01 0 0 10 20 30 40 60 50 70 80 90 100 Bore size mm (Measurement based on JIS B8377) Series CQSY/CQ2Y/CM2Y/CG1Y/CA2Y 12 to 25 32 to 100 20 to 40 20 to 100 40 to 100 Stable operation possible

MY1

200 300400500 1000 1500 0.05 0.5100 200 300400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Maximum Load Weight: MY1MW MY1MW: m3 MY1MW: m2 MY1MW: m1 30 100 200 20 40 50 100 10 30 50 20 40 4 5 30 MY1MW63 MY1MW63 MY1MW63 MY1MW63 3 10 Load weight (kg) Load weight (kg) Load weight (kg) MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 20

MGQ

100 71.5 71.5 81 81 93 105 20 20 25 25 28 36 24 17.5 25 20 18.5 21 16 16 20 20 25 30 Grooves (Except 12, 16, 20, 25) (mm) Use grooves section a and section b in the figure below of the cylinder body for firmly fixing in the following case.

Electric Actuators

to 350 Note 4) Basic Compact Basic Compact Basic Compact Basic Compact Basic Compact Horizontal Max. work load [lb] Note 2) Note 3) Vertical Actuator specifications Electric specifications 20 to 300 Note 4) Horizontal 20 to 350 Note 4) Speed [mm/s] Note 3) Note 6) 20 to 300 Note 4) 20 to 300 Note 4) Vertical 20 20 to 300 Note 4) Pushing speed [mm/s] Note 5) 20 Acceleration/Deceleration

Rotary Actuator

30 80 50 5 192 40 100 60 5 232 45 Size D (g6) G H M N U UU L 30 8 6 13 10 8 53 63 7.8 50 15 11 27 20 15 89 109 14 63 17 13 29 22 17 105 127 16 80 20 15 38 25 20 130 155 19 100 25 19 44 30 25 156 186 24 Note) Dimension parts different from the standard conform to the general tolerance.

Vacuum Unit

Exhaust Characteristics Flow Rate Characteristics 150 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 135 90 60 Air consumption 120 80 40 Vacuum pressure 70 105 Port exhaust 20 Vacuum pressure [kPa] Silencer exhaust/Complex exhaust 0 0 20 40 60 80 100 60 90 Suction flow [L/min (ANR)] 50 75 Flow Rate Characteristics 60 40 100 Suction flow (High-noise reduction silencer exhaust

CJ2X/CUX/CQSX/CQ2X/CM2X

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air

SYJ300/500/700

VFN 4-4-43 44 Series SYJ700 Manifold for Internal Pilot Type Type 20/Type 21 How to Order Applicable solenoid valve SYJ712--01 SYJ712M--01 SYJ722--01 SYJ722M--01 Applicable blanking plate assembly SYJ700-10-2A A port 1/8 SS3YJ7 20 05 A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -

Rotary Table/Rack & Pinion Style Series MSQ

30, 50, 70, 100, 200 How to Order CRB2 CRBU2 Size 10 20 30 50 CRB1 MSU CRJ MSQ A 10 A M9BW High Precision Type CRA1 MSQ B 10 A M9BW Basic Type CRQ2 Thread type MSQ Size End port type Size 10, 20 30, 50, 70, 100, 200 10 20 30 50 70 100 200 Nil Nil -XF -XN M 5 Rc 1/8 G 1/8 NPT 1/8 MSZ CRQ2X MSQX Side ports are all M5.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation A 800 700 600 500 400 300 200 100 0

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-Z7 (With indicator light) CL D-Z73 D-Z76 Auto switch model Applicable load Relay, PLC IC circuit CL1 Load voltage 24 VDC 100 VAC 4 to 8 VDC (3) Max. load current and load current range 5 to 40 mA 5 to 20 mA 20 mA MLGC Contact protection circuit None Internal voltage drop 2.4 V (to 20 mA)/ 3 V (to 40 mA

5 Port Solenoid Valve Series SV1000/2000/3000/4000

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

REA/REB

Model determination 3 Series REA Model Selection 2 Design Parameters 1 Selection Method 25 40 32 500 500 300 400 300 300 Recommended driving force Fn (N) 200 Recommended driving force Fn (N) Recommended driving force Fn (N) 200 200 100 100 100 50 40 20 30 40 50 20 30 40 50 20 30 Usable range Usable range Usable range

Table of Contents

ITV How to Order Switch Characteristics IC Contact point configuration Maximum contact point capacity Operating voltage: AC, DC 1a 2 VA(AC), 2 W(DC) 100 V or less 12 V to 24 VAC, DC : 50 mA 48 VAC, DC : 40 mA 100 VAC, DC : 20 mA Body size 30 IS1000M VBA Accessory Pressure switch VE Maximum operating current X201 Lead wire length: 3 m Regulating pressure range: 0.1 to 0.6 MPa 20 30 40 50 60

HRS100/150

Pump Capacity HRS100/150-Am-20/40-m HRS100/150-Wm-20/40-m 0.5 50 Circulating fluid pressure [MPa] HRS Circulating fluid outlet (60 Hz) Usable range (50 Hz) 0.4 40 HRS 090 Pump head [m] 0.3 30 Usable range (60 Hz) HRS 100/150 HRS 100/150 Circulating fluid outlet (50 Hz) 0.2 20 HRSH 090 Circulating fluid return port 0.1 10 HRSH 0 0 0 10 20 30 40 50 60 70 HRSE Circulating fluid flow rate [L

Stability of suction position,

Form/Diameter Model Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-P1 V V V V ZP3EA-P2 V V ZP3EA-P3 V V V ZP3EA-P4 V V ZP3EA-P5 V V ZP3EA-P6 V Pad diameter 32 to 50 Pad form Flat type with groove Dimensions: Pad Unit ZP3E-32UMlZP3E-40UMlZP3E-50UMl36 31 27 27 23 20 27 23 20 10.3 (Plate) 10.3 (Plate) 10.3 (Plate) 13.5 13 13

Base Mounted Metal Seal/Rubber Seal Series VQ

With lead wire ZS-20-A ZS-20-5A-50 0.6 m 3 m 5 m Nil 30 50 (The flow characteristics are for the supply pressure of 0.5 MPa.)