Rotary Table/

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 100h9 101 102 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 116h9 118h9 119 120 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

Table of Contents - Tubing

Length per roll Tube O.D. mm Tube I.D. mm Min. bending radius mm Operating fluid Max. operating pressure Burst pressure Operating temperature Material Color Tube length per roll (m) Hardness 2 3 2 3 2 3 6 4 8 4 2.5 5 15 10 20 Air Note 1) 116psi (0.8MPa) at 68F (20C) Refer to burst pressure characteristics curve. 4 to 140F (20 to 60C) (With no condensation) Polyurethane Black 10 Shore A 95

IR1000/2000/3000

Connection port 14-5-19 19 Series IR1000/2000/3000 Flow Characteristics Pressure Characteristics Vacuum pump exhaust speed: 500 l/min VAC side pressure: 101 kPa at initial setting Vacuum pump exhaust speed: 500 l/min IRV1000 IRV1000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) Set pressure (kPa) 30 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 10 20 30 40 50 60 70 57.0 100 95

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95

ZR

(mm) Model Maximum suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Weight (With bracket) (kg) ZR1-W10S ZR1-W13S ZR1-W15S ZR1-W18S ZR1-W20S 1.0 1.3 1.5 1.8 2.0 22 38 54 62 84 46 78 95 150 185 0.132 0.134 0.136 0.154 0.156 ZX ZR Model/Max. Vacuum Pressure 53 kPa (L: Large flow type) ZM Nozzle dia.

3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 115/60/1 Flow Rate: .95 LPM , .95 LPM, Max Pressure: 8.7 PSIG / 241 in H20 / 600 mbar , 8.7 PSIG / 241 in H20 / 600 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (50 Hz): 230, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 2.83 in / 72 mm Width: 2.09

39

34.2 42.6 50.6 58.7 66.9 74.8 81.6 86.4 5 Series CKZ3N Dimensions Pivot point with square flats Nh9 Release point RA (Dual arm) XA RR RB (Right arm) RC (Left arm) XB R XC RW LB PB0.02 PD0.05 PC0.05 PA0.02 GC LA0.1 GB L C 2 x 2 x PH7 Depth D 2 x 2 x MM Depth J Hexagon socket head plug 2 x 2 x NPT 1/4 G Rc GA E B RD (mm) Bore size (mm) B C D E GA GC J L LA LB MM N P GB 50 63 92 48 12 13.7 95

Shot Pin Cylinder

. * Please contact SMC for NPN switches. 2 CKZP Series Dimensions CKZP57L-m Rod extended 11.4 50 95 + Stroke 40 + Stroke 0.05 24.8 40 0.1 25 View A-A 50 100 (119.3) 11 0.1 11 0.1 30 0.03 4 surfaces 2 x 9 4 surfaces 2 x 6 F7 11 0.1 11 0.1 40 0.05 45 10 15 Coil scraper 68.5 55 127 + Stroke 45 0.03 95 9.5 26.5 A A 11 30 M12 connector (4 pin) 109 Protective plate 132.5 2 x 8 F7 depth 16 90 9.5

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15 13 15 25 24 HA 17 24 30 36 41 52 62 80 92 G 3 4 5 6 6 7 7 8.5 8.5 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 B 6.5 8 9.5 9.5 11 11 14 14 GP 20 27 33 39 44 55 65 83 95

15

24 19 20 10.5 22 5.4 16 2 5.5 8 45 16 70 28 62 5.8 46 10 CY1S25-Z M6 x 1 M6 x 1 10 26.4 52 8.5 40.5 40.5 27.5 21.5 21 12.5 22 11 6.5 16 5.5 53 20 49 2 8 70 70 54 7 10 CY1S32-Z M8 x 1.25 M8 x 1.25 12.5 14 33.6 64 9.5 50 50 33 26 24 11.5 23.5 8.6 20 2 5.5 9 64 26 85 52 86 66 9 12 CY1S40-Z M8 x 1.25 M8 x 1.25 12.5 41.6 74 10.5 55.5 55.5 38 27 27 10.5 22.5 14 8.6 25 5.5 74 28 51 2 10 104 76 95

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 1417 A VK300 Series Specific Product Precautions Be sure to read this before handling the products.

3 Port Air Operated Valve

N.O. 20.5 NC 12 41.1 3R 1P 91 83 33 60 83 61.3 91 41.1 12 NO 3/8 1(P), 3(R) port 1/8 (Pitch) P = 33 12(PA) port 31 M5 x 0.8 (Breathing hole) L1 L2 7.5 (Station n) (Station 1) 1/8 12(PA) port 12 93.5 70 13.5 47.5 2A 2A 3/8 2(A) port (Pitch) P = 33 31 2 stations 95 80 128 113 161 146 194 179 227 212 260 245 293 278 326 311 359 344 392 377 425 410 458 443 491 476 524 509 557 542 590 575 623

3 Port Air Operated Valve VPA3145/3165/3185 Series

1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

WRF100

WRF100-T200/T240/T270 WRF-T/T-type clamp arms (Without cover) 2 x M12 x 1.75 depth 24 4 x M8 x 1.25 depth 12 15 60 108 15 80 600.05 +0.015 0 2 x 8H7( ) depth 12 (2 x 4 x M5 x 0.8 through) For limit switch mounting C B A0.5 55 55 1000.3 Switch mounting bracket Note 2) 12 70 12 Fulcrum 13 40 15 10 F 2 x 4 x M10 x 1.5 depth 12 107 Note 3) 70 2 x 2 x 8H7 +0.015 0 ( ) depth 12 60 1 52 (58.7) (70) 95

Clean Regulator/Fluororesin Type

56 95 Tube extensions 80 Pilot port Rc, NPT 1/8 12 R 132 100 42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 16 OUT IN 19 6 38 38 100 886 SRF Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

REC

RS H A 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 RZQ Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 MI W S 52 66 75 81 0.7 50 CEP1 33 43 49 53 0.3 23 31 36 39 T 0.5 10 CE1 5 18 25 29 31 0.7 REC40 REC32 REC25 REC20 CE2 Rod side flange style: F Head side flange style: G 182 167 148 118 0.3 Foot style : L 1 L ML2B 140 128 114 90 0.5 W W W 0.5 F 117 108 95

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Slide table Note 4) The plots indicate the 95% upper reliability limit value for time series data up to 500 thousand operation cycles. (Cylinder: CYP32-200, Workpiece weight: 5 kg, Average speed: 2000 mm/s) Series Variations Note 5) The data above provide a guide for selection but is not guaranteed.

Fluoropolymer Piping Equipment

L2, L2 22.5 19.5 21 40 39 54 53 25 6.4 13.7 9 18 LQ3A34 66 65 21.3 15.4 LQ3A36 66 26.7 20.5 LQ3A37 44 41 82 79 7.5 33.4 26.3 LQ3A41 (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L1,L2: Nut material PVDF dimensions W: Width across flats dimension 21.3 15.4 22 LQ3A42 26.7 20.5 LQ3A43 33.4 26.3 LQ3A44 49 47 88 86 60.3 52.5 LQ3A51 26.5 24 32 57 54.5 95

Thermo-chiller

Fluid level indicator Circulating fluid return port (CH2) Rc1/2 Power cable entry Applicable wire total: 14.5 to 18.5 Circulating fluid outlet (CH1) Rc1 Communication cable entry Applicable wire total: 6.5 to 10.5 Drain port Rc1/4 Caster (unfixed) with locking lever 14 HRLE Series Compact Dual/Basic Type for Lasers Dimensions HRLE090-W-20/40 484 385 150 Anchor bolt mounting position 965 95