Aluminum High Vacuum Angle Valve Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.
(Option) Foot bracket and manifold mounting possible. 9.9 mm2 SA Maximum frequency (Mechanical operation type) 300 c.p.m. or less Not required (Use turbine oil class 1 ISO VG32, if lubricated.)
Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.
244 14.5 16 285.5 275 254.5 15.5 17 298 287.5 265 16.5 18 310.5 300 275.5 17.5 19 310.5 300 286 12.5 20 323 312.5 296.5 13.5 L1 L2 L3 L4 16 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60PD (26 pins) U1 2 Scale: 37% 2n1-M5 x 0.8 [With external pilot] (A, B ports) 24 13.3 (Pitch) P=10.5 13.3 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2
3 contained in one kit, and can be ordered using the kit number for each cylinder bore size. 2.4-7 Series MUW Basic: MUWB Rod end male thread (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27
Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.
) (Lead wire length) 2 x 4.5 (Mounting hole) Max.5.5 4 x Rc1/8 Manual override (Non-locking) (P,R port) (Lead wire length) ~ = 300 ~ = 300 2n x Rc1/8 (A,B port) (Pitch) 2n x One-touch fittings Applicable tube T0604 (A, B port) (Pitch) Refer to the above drawing for other dimensions.
7.2 16.4 14.2 6.3 Aluminum alloy frame Slide screw 15.3 16.7 14.0 18.0 12.5 19.5 11.2 25.7 20.8 22.2 9.8 Stainless steel frame C Operating temperature range 5 to 40 (with no condensation) 300 10 mm Lead Horizontal specification Ball screw Maximum work load 100W N 300 20 mm Lead 150 Slide screw 20 mm Lead 500 10 mm Lead Ball screw Maximum speed Horizontal specification 1000 600 500 930
. *6 Separate spacers are required for modular units. 47 B AC-D Series Accessories (Spacer / Spacer with Bracket) Spacer / Spacer with Bracket AC AF + AR + AL AW + AL AF + AR AF + AFM + AR AW + AFM Attachments AF AFM / AFD AR AL AW q w Y 300 D Spacer (Ym-D) Spacer with bracket (YmT-D) V q Body size [Applicable AC size] 200 [AC20] 300 [AC30] 400 [AC40] 500 [AC40-06] 600 [AC50/AC60] Symbol
/500 Compact size: Width 15 mm (VZ100, 300) Width 18 mm (VZ400, 500) Low power consumption 1 W(0.5W) Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) Piping specifications VZ110/120 M5 x 0.8 0.11 Body ported VZ312/322 M5 x 0.8 0.53 VZ512/522 1 8 2.8 VZ314/324 1 8 1.2 Base mounted (With sub-plate) VZ514/524 3.0 1 8 1 4 , Body ported Base mounted Model/
131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc
131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc
500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.
(Option) Foot bracket and manifold mounting possible. 9.9 mm2 SA Maximum frequency (Mechanical operation type) 300 c.p.m. or less Not required (Use turbine oil class 1 ISO VG32, if lubricated.)
Unrestricted 300/50 m/s2 Manual override Lubrication Mounting orientation Impact/Vibration resistance Enclosure (2) Dustproof Note1) Based on dynamic performance test, JIS B 8419: 2010.
For details, refer to the Best Pneumatics Vol. 3. 4-5-1 2 Series VK300 How to Order Electrical entry D: DIN terminal DO: DIN terminal (Without connector) G: Grommet (Lead wire length: 300 mm) H: Grommet (Lead wire length: 600 mm) For the connector part number, refer to page 4-5-10.
128 116 94 to 300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC to 500 6 48 LJ1H101PB 122 2 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 112 16 58 to 500 LJ1S303SC 146 132 120 92 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC 10 52 to 1000 to 740 to 930 to 600 to 500 145 124 112 106
/50 Enclosure Dustproof Electrical entry Grommet Weight (g) Screw mount type 27 Quick disconnect type 29 Characteristics Pressure/Flow Rate Characteristics (without filter) Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 380 360 340 320 300 280 260 240 220 200 180 160 140 120 100 80 60 40 20 0 C [dm3/(s/bar)] 0.24 0.47 0.70 b 0.24 0.28 0.21
For Air 1.0 Downstream pressure of valve (P2) [MPa] Upstream pressure of valve P1z1.0 MPa 0.8 Subsonic 0.9 0.6 Critical pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 3/64 (1.2) 50 100 150 3/32 (2.4) 100 200 300 400 1/8 (3.2) 300 200 100 400 500 600 700 5/32 (4) 200 1, 000 800 400 600 7/32 (5.6) Series VXN2 250 500 7/32 (5.6) Series VXN3 500 1, 000 1, 500 2, 000 Flow rate Q [L/min
DIN terminal: VKF334-D-01 Base mounted Grommet: VKF334-G-01 33.5 16.7 26 4 Manual override (Non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 MAX.10 2-4.3 (Mounting hole) Applicable cable O.D. 4 to 6.5 48.5 300 26 4 Pg.7 3 27 (Lead wire length) Manual override (Non-locking) A 20.5 18.5 mPm 3 32 59 68 78 70.5 43.5 12 7.5 P R 7.5 12 43.5 13.5 11 33.5 P R 13.5 11 Refer to grommet type for other