AZ1000

0.34 0.69 100 0.62 90 80 40 0.28 0.55 Delivery pressure (slpm) Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) 0.48 70 0.41 60 30 0.21 0.34 50 0.28 20 0.14 40 0.21 30 0.14 20 10 0.07 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Gun Type Ionizer

0.5 s 1 s 1.5 s 2 s 2.5 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 3) Supply pressure: 0.2 MPa Flow rate consumption: 188 L/min (ANR) 4) Supply pressure: 0.3 MPa Flow rate consumption: 253 L/min (ANR) 200 200 150 150 2.5 s 2 s 100 100 50 50 0.5 s 1 s 1.5 s 2 s 0.5 s 1 s 1.5 s 50 50

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.

Compact Manifold Regulator Series ARM5

V L4=50+T+X 50 SMC H H L L O O S S U U C C P P K K 8 U 57 (at handle locked) DIN rail part no.

Air Slide Table Series MXQ

MXQ20-50 MXQ20-50 MXQ20-30 MXQ20-100 MXQ20-150 0.08 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-100 MXQ20-20 MXQ20-10 0.04 0.02 MXQ20-10 0.02 0 0 400 500 600 100 200 300 0 100 200 300 100 200 300 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) 25 25 25 Lr = 200mm 0.08 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25

Ionizer Gun

1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350

Sine Rodless Cylinder Series REA

Model determination 2 Sine Rodless Cylinder Series REA Model Selection Method 2 Precautions on Design 1 Selection Method 40 32 25 500 500 300 200 300 400 Recommended driving force: Fn(N) 200 300 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 200 100 100 100 50 40 20 30 40 50 20 30 40 50 20 30 Usable

Transfer

beyond the air cushion limit lines or when the stroke adjustment causes limited or no cushion engagement. 200 Thrust energy E2 100 10 20 30 40 50 100 200 300 Fs Fs + mgs Fsmgs 400 500 Absorbed energy E W2 max.

SZ3000

16 285.5 275 254.5 15.5 17 298 287.5 265 16.5 18 310.5 300 275.5 17.5 19 310.5 300 286 12.5 20 323 312.5 296.5 13.5 L1 L2 L3 L4 14 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60PD (26 pins) U1 2 1 2 1 2 Note) The L1 to L4 dimensions for SS5Z3-60PD Dare the same as the SS5Z3-60PD Udimensions.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) The code is L for elbow piping for all manifold stations.

SQ1000/2000

25 30 50 Note) Available in units of 10 pieces.

CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Max. speed (mm/s) 6 (7) (8) (9) 10 15 Selection graph 20 (10) (11) (12) (13) (14) (15) (17) (16) 25 32 The maximum

CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Max. speed (mm/s) 6 (7) (8) (9) 10 15 Selection graph 20 (10) (11) (12) (13) (14) (15) (17) (16) 25 32 The maximum

Table of Contents

0 0 SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600

7ND9071en

The display starts to blink next position (50 % or 20 %).

AS

(UL standard V-0) 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

5 Port Solenoid Valve Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

K35-OMW0030

/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value (5) IN-777-200TF-300F*-HL (6) IN-777-250TF-350F*-HL 150 150 average speed [mm/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6