FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

FQ1

accuracy (m) 5 10 20 40 74 105 No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

LX Series Compact Electric Actuators

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 i Slide Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

CNG

P K KA MM NA PG PH PL S FD FT FX FY FZ XA XB J l 0.25 ZZ 182 H e f h ZZ 202 35 30 16 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 220 198 40 30 17 62 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 5.5 7 60 30 75 3 12 M5 x 0.8 223 201 40 35 17 62 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 6.6 7 60 30 75 3 12 M5 x 0.8 247 (256) 227 (236) 50 35 17 70 6 14 M14 x 1.5 44

VQ7-6/7-8

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 40 Series VQ7-6/7-8 Specific Product Precautions 1 Be sure to read before handling. Refer to pages 37 through 40 for safety instructions and common precautions.

1.63

mm, V = 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 25 25 25 20 25 20 20 20 1 1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) (19) L = 50 mm, V = 400 mm/s (20) L = 100 mm, V = 400 mm/s 100 100 63 63 50 50, 63 50, 63 50 10 10 40 40 Load mass m (kg) Load mass m (kg) 40 40 32 32 32 32 25 25 25 25 20 20 20

CG5-S

10 M10 x 1.25 24 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 35.5 1/8 to 300 40 10 M14 x 1.5 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 44 1/8 to 500 50 14 M18 x 1.5 40 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 55 1/4 to 600 63 14 M18 x 1.5 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20

MU

5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 20Other intermediate strokes can be manufactured upon receipt of order.

MU

1 MU32 0.8 MU40 0.5 MU50 0.5 MU63 Model MU 0.5 Rod non-rotating accuracy DStandard Stroke Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke -X 25, 32, 40 50, 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 20Other intermediate strokes can be manufactured upon receipt of order.

MK

to 53 Chrome molybdenum steel Replacement Parts: Seal Kits 32 40 MK2-40-PS 50 MK2-50-PS 63 MK2-63-PS Bore size (mm) Part No.

JXCx-OMT0023

Ambient temperature is over 40 . Lower the ambient temperature of servo motor. the servo motor is over 40 . Ambient temperature is 40 Check 2). or less. 2) Servo motor is Check the effective load ratio. The effective load ratio is too high. Reduce the load or take heat dissipation measures. overheated.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

pilot port) (Lead wire length) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 75.4 [82.4] 34.5 17.5 15.5 96.5 44.5 29.5 29.5 3/8, 1/2 [1(P), 5(EA), 3(EB) port] L plug connector (L): 10-SY9 40(R)-LM plug connector (M): DIN terminal (D, Y): 10-SY9 40(R)-WO3 4 5 M8 connector (WO): 3 4 5 3 4 5 3 4 5 D Y 10-SY9 40(R)10-SY9 40(R)

Electric Rotary Table

force (N) Max. gripping force (N) Max. gripping force (N) Stroke/both sides (mm) Stroke/both sides (mm) Max. gripping force (N) Stroke/both sides (mm) Size Stroke/both sides (mm) Size Size Size Basic Compact 4 6 10 14 22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80

MGF

Bore size Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches Lead wire length (m) Load voltage Auto switch model no.

AC Servo Motor Driver (CC-Link Type ）

Regenerative power [W] Driver Built-in regenerative LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] resistor LECSC2-T5 30 LECSC2-T7 10 30 100 LECSC2-T8 10 30 100 LECSC2-T9 20 30 100 (2) Parameter setting Set parameter No.PA02 according to the option to be used.

Guide Table Series MGF

Bore size Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches Lead wire length (m) Load voltage Auto switch model no.