Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Size Foot bracket Mounting screws included in foot bracket 30 CRA1L30-Y-1 M5 x 0.8 x 25 50 CRA1L50-Y-1 M8 x 1.25 x 35 63 CRA1L63-Y-1 M10 x 1.5 x 40 80 CRA1L80-Y-1 M12 x 1.75 x 50 100 CRA1L100-Y-1 M12 x 1.75 x 50 Note 1) The part numbers shown above include mounting screw.

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

7ND9071en

Table 17 Ambient temperatures, ND9_Z Inmetro Variant type Ex ia IIC T4/T5/T6 Ga Ex ia IIC T4/T5/T6 Gb Ambient temperature ranges T6 T5 T4 ND91_Z -40 to +50 C -40 to +65 C -40 to +80 C ND91_Z/I02 -40 to +50 C -40 to +64 C -40 to +80 C ND91_Z/I09 -25 to +50 C -25 to +65 C -25 to +80 C ND91_Z/I45 -25 to +50 C -25 to +64 C -25 to +80 C Table 18 Ambient temperatures, ND9_Z Inmetro Variant type

Possible to transfer a workpiece at low-speed.

Low-Speed Rotary Actuator CRQ2X/MSQX Series CRQ2 Size: 10, 15, 20, 30, 40 MSQX Size: 10, 20, 30, 50 Possible to transfer a workpiece at low-speed. CRB2 CRB1 MSU CRJ CRA1 Realized a stable motion at 5 s/90.

Vacuum Ejector Series ZM

kPa) Suction flow rate l/min (ANR) Air consumption Air consumption l/min (ANR) 70 70 70 60 60 60 50 50 50 Suction flow rate 40 40 40 30 30 30 20 20 20 10 10 10 0 0 0 0.0 0.6 0.5 0.4 0.3 0.2 0.1 0 50 40 30 20 10 Supply pressure (MPa) Flow rate l/min (ANR) 990 Series ZM Vacuum Ejector With Valve and Switch Exhaust Characteristics/Flow Characteristics, Standard Supply Pressure: H 0.5 MPa ZM13H

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

LEY-OM007

-10 (INC) c 10[mm] 0 10 20 30 40 50 [mm] -27- 4 a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 20.00 3000 3000 80 40 30 100 10.00 20.00 20.00 No.00[mm] 20[mm]20[mm] 1 10 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP 2 k INPON g 30 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP INPOFF () k g BUSYONOFF -28- 5 a b c d e f g h i j k No. 1 2 mm/

A

C K E T Spacer with T-type bracket A B C D E F G R L H Y10T 20 12 4.5 3 25 5 8 2.25 27 40 Y20T 24 15 5.5 3 30 5 10 2.75 33 40 Y30T 35 16 7 4 41 7 11 3.5 45 70 Y40T 40 22 9 4 50 7 14 4.5 50 80 Y50T 40 22 9 4 50 7 14 4.5 50 80 Y60T 50 24 12 4 70 10 15 6 62.5 100 Courtesy of Steven Engineering, Inc. !

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

HRX-OM-Q026

50 60 70 80 90 100 110 120 Circulating fluid flow [L/min] Fig. 8-16: Pump capacity (HRSH100-A-20/40-, HRSH100-W-20/40-) 8.5.2 HRSH150/200-A-20/40HRSH150/200/250-W-20/400.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/

PF2A/PF2W

Analog output Blue (3) DC () 4-4.5 2-Port size 6 50 40 Use this sensor by connecting to SMC remote type display unit Series PF2W3.

Smooth Cylinder

50 63 80 100 Bore size (mm) JIS symbol 0.01 0.02 Minimum operating pressure Standard Stroke Table Bore size (mm) 32, 40 50, 63, 80, 100 Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

V

(mm) 2, 4, 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 10, 13, 16, 20, 25, 32, 40, 50 10, 16, 25, 40 D I M E N S I O N S PA D D I A M E T E R S 2, 4, 6, 8 Material (colour) NBR (Black) Hardness 50 shore S P R I N G F O R C E ( N) Pad dia.

•

siz~ ,t~ , ~8 , ' 0"32 jS4C ~ OQ . 50 150 "'2O or more:Special order ~ i ListO Pad DI. -Pad Type ~ Type 2 4 -' 6 8 10 1316 20 25 32 40 50 .

Compact Cylinder with Air Cushion and Lock Series RLQ

Applicable cylinder bore size (mm) 32, 40 50, 63 Applicable cylinder bore size (mm) Applicable Snap ring 32, 40 50, 63 NT-04 NT-05 l Part No.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

P Q S 5 to 50 40 33 Data 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43 5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66 35 14 75, 100 56.5 49.5 10 to 50 48.5 40.5 11 depth 8 50 58.5 50.5 15 20 64 10.5 M10 x 1.5 86 7 17 8 50 6.6 1/4 10.5 80 41 19 75, 100 58.5 50.5 10-4-7 8 Series CQ2Y Dimensions/63 to

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

50 63 80 100 Bore size (mm) JIS Symbol Minimum operating pressure 0.01 0.02 Standard Stroke Bore size (mm) 32, 40 50, 63, 80, 100 Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kit Theoretical Output OUT IN Unit: N Bore size (mm) Contents Kit n no.

Cylinder with Lock Series CLS

MLGC CNG I Type Single Knuckle Joint MNB MM A2 A1 CNA NDH10 Material: Cast iron (mm) CNS Applicable bore size (mm) A2 E1 MM NX RR1 U1 A1 L1 NDH10 Model E1 NX CLS 25 +0.084 0 28 +0.084 0 32 +0.1 0 40 +0.1 0 40 +0.1 0 50 +0.1 0 I-12 I-14 I-16 I-18 I-20 I-25 125 140 160 180 200 250 32 0.1 0.3 36 0.1 0.3 40 0.1 0.3 50 0.1 0.3 50 0.1 0.3 63 0.1 0.3 46 33 54 27 8 100 M30 x 1.5 L1 U1 48 39 54 30

Refrigerated Thermo-chiller

1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0 0.9 70 50 [Outlet port: 60 Hz] 0.8 60 [Outlet port: 60 Hz] 0.7 40 50 [Outlet port: 50 Hz] 0.6 [Outlet port: 50 Hz] 40 30 0.5 0.4 30 20 0.3 20 0.2 10 [Return port] 10 [Return port] 0.1 0 0 0 0 10 20 30 40 Lifting height (m) Pressure (MPa) 0 10 20 30 40 Lifting height (m) Pressure (MPa) Circulating fluid flow (l/min) Circulating fluid flow (l/min) HRZ001

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility