, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 175 lb

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 175 lb

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 175 lb

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 175 lb

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 175 lb

20.0

Normal Bottom Peak BATTERY 1.5V x 2 LR6 G kV MADE IN JAPAN IZD IZE POWER LIGHT 110 Do not apply a strong impact on the sensing part.

Compact Cylinder

119 128 138 32 122 135 149 162 176 189 203 216 230 243 32 94 108 121 135 148 162 175 189 202 215 40 184 201 217 233 250 266 282 299 315 331 40 145 161 177 194 210 226 243 259 275 292 50 332 357 383 408 433 458 483 508 533 50 284 309 334 359 384 410 435 460 485 63 513 544 575 606 637 667 698 729 760 63 452 483 514 545 576 606 637 668 699 80 961 1010 1059 1109 1158 1207 1256 1305 1354

Return Filter FH100 Series

100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70 387 540 17.5 3 520

Slider Type Ball Screw Drive/11-LEFS Series

9.29 9.57 9.85 10.13 Additional weight with lock [kg] 0.53 517 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Dimensions: Ball Screw Drive 11-LEFS16 (72) ( ) +0.025 0 3H9 depth 3 40 Body mounting Note 1) reference plane 4 x M4 x 0.7 thread depth 6.4 24 28 3.5 39.4 ( ) +0.025 0 3H9 depth 3 L Cable length 250 (37) A (Table traveling distance) Note 2) (110

Series AK1000

Gas Select compatible materials of construction for the gas Operating pressure Vacuum to 125 psig (0.9 MPa) Proof pressure 200 psig (1.4 MPa) Ambient and operating temperature 14 to 160F (10 to 71C) (No freezing) Cv 0.29 0.5 Leak rate 1 x 1010 Pam3/sec Connections Compression, Rc, R, NPT Actuation pressure 60 to 110 psig (0.4 to 0.76 MPa) Actuation port connection M5 x 0.8 Actuation port

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46 36 132 50 41 200 74 60 230 74 60 271 86 70 22 36 110

S Couplers Series KK/KKH/KK13

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Symbol M5 01 02 03 04 06 Symbol 23 04 06 08 10 12 16 Symbol 50 60 65 80 85 110 167 Series KK Flow Characteristics Air (0 to 1 MPa) Water (0 to 0.4 MPa) KK2 KK2 0.007 0.50 Series KK2 (KK2S-M5M + KK2P-M5M) Series KK2 (KK2S-M5M + KK2P-M5M) 0.45 0.006 0.40 0.005 0.35 Flow rate m3/min (ANR) Flow rate m3/min Flow rate m3/min 0.30 0.004 0.25 0.003 0.20

Rotary Cylinder Series MRQ Size: 32, 40 1

F(N) F(N) Stroke 105 15 9 110 115 14 120 8 125 130 13 140 150 7 12 175 5 200 11 0 1 2 Rotation angle Linear motion Number of Auto Switches Mounted 02 0S 0 S2 SS S0 1 Nil 2S 20 2 n2 nS n0 n Combinations of made-to-order products No. 1 to 4 are available. Please contact SMC for further information. 11-10-19

Compact Cylinder with Air Cushion

Note 3) Clevis pins and snap rings are included with the double clevis type. 63 80 100 2 Series RQ Weights Basic weights Additional weights Unit: g Unit: g Bore size (mm) Magnet Double end tapped Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 40 13 6 27 17 155 214 198 196 20 5 6 4 159 143 137 92 50 14 6 53 32 243 373 348 393

RQ

Note 3) Clevis pins and snap rings are included with the double clevis type. 63 80 100 7-7-5 5 Series RQ Weight Basic Weight Additional Weight (g) (g) Bore size (mm) Magnet Both ends tapped style Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 20 5 6 4 159 143 137 92 40 13 6 27 17 155 214 198 196 50 14 6 53 32 243 373 348 393

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 175/110, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 175/110, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 50, Stroke(mm): 175, Max.

Mounting: F (Front Flange), Bore Size: 40mm, Thread: TN (NPT Thread), Full Stroke: 175mm, First Stroke: 110mm

Mounting: L (Foot), Bore Size: 32mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 110mm