AZ1000

40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Possible to transfer a workpiece at low-speed.

350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

SYJ3000/5000/7000

Model SYJ3000 SYJ5000 SYJ7000 Thread size Tightening torque 0.12 Nm 0.45 Nm 0.8 Nm M1.7 M2.5 M3 1-5-79 80 Series SYJ3000/5000/7000 Specific Product Precautions 7 Be sure to read before handling. Replacement of Pilot Valve Interface Regulator Caution Note 1) Set the pressure within the operating pressure range of the solenoid valve.

CJ2X/CUX/CQSX/CQ2X/CM2X

Nil C M 40 50 63 80 100 40 mm 50 mm 63 mm 80 mm 100 mm Standard stroke Refer to Standard Stroke on page 10-3-13. D Double acting Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Multistage Ejector Series ZL112/212 1

Selection ZL112 ZL212 Exhaust Characteristics Exhaust Characteristics ZX 100 90 100 90 Vacuum pressure Vacuum pressure 300 150 Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) 250 125 Vacuum pressure (kPa) Vacuum pressure (kPa) ZR 80 80 Suction flow rate Suction flow rate 70 70 200 100 60 60 ZM Air consumption Air consumption

Air Slide Table/Long Stroke Type Series MXY

100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 222 Series MXY Air Slide Table Long Stroke Type Construction @3 y w q r u #0 MXH MXU !

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B50 50 12-CY3B63 63 Note 1) Stroke exceeding the standard stroke but

Digital Pressure Switch

Connector pin numbers -18No.PS-OMX1005 Internal circuit and wiring examples ZSE20AF---Output specification -N NPN open collector 1 output Max. 28 V, 80 mA Residual voltage 1 V or less -P PNP open collector 1 output Max. 80 mA Residual voltage 1 V or less -A NPN open collector 2 outputs Max. 28 V, 80 mA Residual voltage 1 V or less -B PNP open collector 2 outputs Max. 80 mA Residual voltage

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Igm: Leakage current of the servo motor (Found from Table 11.4.) 120 120 100 100 Leakage current Leakage current 80 80 60 60 40 40 [mA] [mA] 20 20 0 2 0 14 100 5.5 38 2 3.5 8 1422 38 80 150 5.5 30 60 100 3.5 8 22 60 150 30 80 Cable size[mm2] Cable size[mm2] a. 200V class b. 400V class Fig. 11.3 Leakage current example (lg1, lg2) for CV cable run in metal conduit 11 30 11.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

100 2 x M8 x 1.25 14 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 4 x M20 x 2.5 4 x M22 x 2.5 20 (3/4B) 0 250 73 330 177 80 57 8.7 108 135 2 x M10 x 1.5 18 25 (1B) 32 (1 1/4B) 0 50 342 87 435 255 80 57 12.2 105 150 4 x M10 x 1.5 18 40 (1 1/2B) 50 (2B) 0 60 448 94 540 354 92 65 18.1 120 160 4 x M12 x 1.75 22 65 (2 1/2B)

New

For electrical connection of the Faston terminal and molded coil, please use Tycos Amp/Faston connector/250 Series or the equivalent. 26 Glossary of Terms Series VXN/VX2 Electrical Terminology 3.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Series CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 50 63 80 100 125 140 160 180 200 250 300 1000 Perpendicular, upward actuation Horizontal actuation 900 800 700 600 500 400 300 200 100 0 A 1000 900 800 700 600 500 400 300 200 100 0 B System Components It is when the cylinder is extending

Compact Manifold Regulator

mA 30 V (With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3 selections) Yes 1% F.S.

•

n 2 (" 2. 4. 6. 8 ..) (" = 4. 8. 12. ' 6 ..) (" =4. 8. ' 2. '6.. ) (" = 4. 8. ' 2. ' 6 .. ) With 2 pes tDrtterent slIriaces, 90 80 85 '0 Same surface), Wilh 1 pc. D-M90V D-M90WV 80 + 3O

VS 8-2/VS 8-4

or less 70 or less 80 or less 70 or less 80 or less 80 or less Single 2-position 5 (R1) 3 (R2) Double 1 (P) N.C.

DOC1023126

Applicable stroke table Stroke [mm] Size 30 50 100 150 200 250 300 350 400 450 500 Manufacturable stroke range 25 15 to 400 32 20 to 500 25 - .

Series CE1

Cylinder stroke (mm) Bore size (mm) 25 50 100 75 125 150 175 300 200 500 250 400 0.29 0.33 0.4 0.36 0.43 0.47 12 0.51 0.58 0.72 0.65 0.79 0.86 0.93 1.0 20 0.94 1.15 1.05 1.26 1.36 1.47 1.58 1.79 32 2.0 1.7 1.83 1.95 2.08 2.2 3.7 2.45 3.2 40 2.7 3.4 5.5 50 4.1 4.2 6.6 63 5.0 Rod End Nut Dimensions (1 piece is included as standard.)

CE

HOLD BANK1 BANK2 t (DIN rail mounting) MULTI COUNTER: CEU5 UP Counting input pulse duration COUNT PRESET FUNC. 68 0.2 LEFT RIGHT 35.5 A: B: C: D: t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.

IZx-OMP0064

to 175 50 to 1300 50 to 2000 50 to 2000 0.5 100 to 175 50 to 1300 50 to 2000 50 to 2000 1 300 to 500 300 to 1500 400 to 2000 600 to 2000 100 to 175 50 to 1300 50 to 2000 50 to 2000 3 300 to 400 300 to 1500 350 to 2000 500 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250

ARM10/11

SMC SMC 28.5 AV 6 51.5 80 51.5 AU 13 OUT IN 13 3 28 OUT IN 13 AF OUT IN 3 3 5. Option 4. Accessory 6. Unit representation 2.