7.5

Note 2) For manifold dimensions including elbow fitting, refer to page 23. 3 4 5 6 7 8 9 10 L1 L2 L3 L4 110.5 110.5 123 135.5 135.5 148 148 160.5 173 100 100 112.5 125 125 137.5 137.5 150 162.5 72.8 80.3 87.8 95.3 102.8 110.3 117.8 125.3 132.8 22 18.5 21 23.5 19.5 22 18.5 21 23.5 18 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ2000

Compact Hydraulic Cylinder Series CH
KGB

(M) 50 (M) 100 x 125l CHKGB32 M6 x 65l 125 45 (M) 5 (M) 65 x 130l x 70l 130 50 (M) 10 (M) 70 x 155l x 75l 155 75 (M) 15 (M) 75 x 180l x 80l 180 100 (M) 20 (M) 80 M14 x 100l x 85l CHKGB80 100 5 (M) 25 (M) 85 x 105l x 90l 105 10 (M) 30 (M) 90 10.5 x 110l x 95l 110 15 (M) 35 (M) 95 x 115l x 100l 115 20 (M) 40 (M) 100 x 120l x 105l 120 25 (M) 45 (M) 105 x 125l x 110l 125 30 (M) 50 (M) 110 22

Compact Cylinder

L x 100 L 100 100 (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CQUB32-5 CQUB40-5 M5 x 65 L M5 x 65 L 65 65 -10 -10 x 70 L x 70 L 70 70 -15 -15 x 75 L x 75 L 75 75 -20 -20 x 80 L x 80 L 80 80 -25 -25 x 85 L x 85 L 85 85 -30 -30 x 90 L x 90 L 90 90 10.5 10.5 -35 -35 x 95 L x 95 L 95 95 -40 -40 x 100 L x 100 L 100 100 -45 -45 x 105 L x 105 L 105 105

Fieldbus system EtherNet/IP compatible SI Unit

0X06 0002 0064: Force 100 Mbps/Full duplex Ex.

DOC1023126

(Becomes close to the trapezoidal acceleration as the setting value reaches 0) Acceleration and deceleration ratio 10 10 10 to 100 EQY251 to 50 EQY321 to 70 Torque when held *2 50 70 Sets the torque when stopped after the positioning operation. (Unit: %) H 150 100 Sets the position loop P constant.

Air Catch Sensor

DIN rail center 70 (94.4) 100 70 (94.4) 100 90 10 SUP 40 (4.5) 30 Adjusting knob Electrical entry Applicable O.D. 6.5 to 8.5 12 Electrical entry Applicable O.D. 6.5 to 8.5 Bracket Gauge 35 42 8-4.5 Gauge 34 42 4-4.5 42 9-M3 OUT1 OUT2 OUT3 Bracket OUT5 OUT4 EXH port EXH port Station 1 n 69.3(MAX74.4) 69.3(MAX.74.4) 60 OUT 60 19.5 2.1 OUT OUT OUT OUT OUT OUT GND OUT6 19.5 2.1 VCC Detection

energy saving effect

[MPa] Circulating fluid pressure [MPa] Usable flow rate range Usable flow rate range 0.5 0.5 50 HECR 50 0.43 0.45 Outlet Pump head [m] Pump head [m] Outlet 0.4 0.4 40 40 HEC 0.3 30 0.3 30 HEB 0.2 20 0.2 20 HED Return port 0.1 10 0.1 10 Return port 0 0 0 0 HEA 45 40 50 0 10 20 30 60 70 80 90 100 110 120 Circulating fluid flow rate [L/min] 45 0 20 10 40 30 50 60 70 80 90 100 110 120 130 Circulating

VZS

VAC, 100 VDC or less.

EX120/121/122

mA or less SAS7: 100 mA or less Internal current consumption (Unit) 100 mA or less SAS9: 65 mA or less SAS5: 65 mA or less SAS7: 8 points SAS9: 4 points SAS3: 8 points SAS5: 4 points Number of inputs 32 points (Based on input block connection) Supply voltage 24 VDC Note 5) SAS3: 240 mA or less Supply current 1.0A or less SAS5: 120 mA or less PNP output (COM.)

IDX-OM-Y002

200 4x20 700 (100) 800 355 4x20 Auto drain is included in the package.

KJ

Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.

Thermo-chiller

70 Waterproof specication IPX4 Accessories Alarm code list stickers 2 pcs.

LEY-OM007

[ ] [%] [ ] 40 100 50 70 12 70 20 1.3 85 15 0.8 100 25 40 [%] [%] [ ] [%] [ ] 95 100 100 25 [%] [%] 40 [ ] [ ] 65 100 100 [%] LEY 32* 25 40 [%] [%] [ ] [%] [ ] 65 100 85 50 15 100 -43- 7.3 LEY / [Nm] L[mm] [mm] LEY 16 M50.8 3.0 10 14 LEY 25 M81.25 12.5 13 17 LEY 32 M81.25 12.5 13 22 / [Nm] L[mm] [mm] LEY 16 M81.25 12.5 12 14 LEY 25 M141.5 65.0 20.5

Brake mechanism added

75 100 80 100 90 100 2 D-A3C D-G39C D-K39C 20 + 35 (n 2) (n = 2, 3, 4, ) 75 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Different surfaces) 2 n 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Same surface) 1 10 75 80 90 (Different surfaces) (Same surface) 20 55 75 80 90 75 + 35

ZP

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.

HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation A 800 700 600 500 400 300 200 100 0

51

100 N JCM CDG3 L 100 M9BW N 25 C With auto switch CM2 With auto switch (Built-in magnet) CM3 Made to Order For details, refer to page 366.

HEC_001W-E

C 400 300 200 10 20 30 100 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-3 Heating capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 600 Heating capacity W 500 Radiating water flow rate L/min 400 300 200 1 3 5 100 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 11 27 11.