Rotary Cylinder Series MRQ Size: 32, 40 1

Size of linear motion parts Output of rotary motion parts (at 0.5 MPa) Linear motion stroke (mm) Rotating angle 100 30 75 5 10 15 20 25 40 50 80 to 100 32 1.02 Nm 170 to 190 80 to 100 1.91 Nm 40 170 to 190 A connecting port can be selected from two positions that are available on the rotation unit.

Multistage Ejector Series ZL112/212 1

Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

PFxx-OMJ0005CN

1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/Pulse 0.1 L/Pulse 1 L/Pulse -2 L/minCFM10 310 -1 Lft 4 1F.S.() 3%F.S 5F.S.(0.35 MPa ) 2F.S.(1535 ) 5F.S.(015 3550 ) -70750 kPa 1 MPa NPN PNP 80 mA DC28 V(NPN ) NPN 1 V (80 mA )PNP 1.5 V (80 mA ) 1 s(50 ms0.5 s2 s

LFE-OMZ0011

Analogue output 1 to 5 V Output impedance 1k Max.28 V, 80 mA Internal voltage drop 1 V max.

2/3 Port Valve

Model H F E D C B A 1 4 1 4 405.5 441.5 65 80 140 150 204 235 175 185 305.5 341.5 210 240 VNC81 -65F VNC91 -80F 4.2-25 VNC Construction N.C.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

AMD550 AMD650 AMD850 3/4B/FF/10K 1B/FF/10K 290 AMD350 80 Related poroducts 2B/FF/10K 11/2 B/FF/10K 305 312 AMD450 80 339 AMD550 80 391 AMD650 80 540.5 AMD850 80 Precaution Please refer to p.4.5-7 for with pressure differential gauge (GD40-2-01). 4.6-14

AW

108 160 201 239 242 409 25 40 53 70 75 95 1/16 1/8 1/8 1/4 1/4 1/4 25 40 55 80 80 20 AR M38 x 1.5 M42 x 1.5 1/4, 3/8, 1/2 3/4 3/4, 1 AL M42 x 1.5 AW Optional specifications Semi-standard specifications Bracket mount Panel mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge M 25 30 41 50 50 70 Model AG N 28 34 40 54 54 66 Q 30 44 46 54 56 66 R

AC Servo Motor Driver

80 60 60 40 40 [mA] [mA] 20 20 0 2 3.5 5.5 8 14 22 38 0 2 3.5 5.5 8 1422 38 80 150 30 60 100 80 150 30 60 100 Cable size [mm2] a. 200V class Cable size [mm2] b. 400V class Fig. 12.3 Leakage current example (Ig1, Ig2) for CV cable run in metal conduit 12 30 12.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4 1 1/4 120 120 40 (1 1/2B) 40 (1 1/2B) 1 1/2 1 1/2 160 160 50 (2B) 50 (2B) 260 260 65 (2 1/2B) 450 80 (3B) 600 Note) Tapered female thread connection conforming to JIS B 0203 is compatible.

LV50-OMQ0002

(at 80 mA load current) PNP: 1.5 V max.

DOC1023125

(Unit: %) H 140 80 80 Sets the position loop P constant. *Please perform the actuator operation after changing this parameter setting under the responsibility of the user. Position loop P constant A 140 110 110 1 to 200 B 100 80 80 C 110 80 80 H 80 140 140 Sets the speed loop P constant.

Rotary Cylinder Series MRQ

Size of linear motion parts Output of rotary motion parts (at 0.5 MPa) Rotating angle Linear motion stroke (mm) 5 10 15 20 25 30 40 50 75 100 80 to 100 32 1.02 Nm 170 to 190 80 to 100 40 1.91 Nm 170 to 190 A connecting port can be selected from two positions that are available on the rotation unit.

ChemicalThermo-con

Circulating fluid: Clear water, Circulating fluid flow rate: 3.96 gpm (15 L/min), Facility water flow rate: 1.32 (5 L/min) HED003 HED005 60 80 100 120 140 F 40 60 80 100 120 140 F 40 1600 800 Facility water: 95F (35C) Heating capacity (W) Heating capacity (W) 1200 Facility water: 95F (35C) Facility water: 77F (25C) Facility water: 77F (25C) 600 800 400 400 200 Facility water:

•

n 2 (" 2. 4. 6. 8 ..) (" = 4. 8. 12. ' 6 ..) (" =4. 8. ' 2. '6.. ) (" = 4. 8. ' 2. ' 6 .. ) With 2 pes tDrtterent slIriaces, 90 80 85 '0 Same surface), Wilh 1 pc. D-M90V D-M90WV 80 + 3O

VS 8-2/VS 8-4

or less 70 or less 80 or less 70 or less 80 or less 80 or less Single 2-position 5 (R1) 3 (R2) Double 1 (P) N.C.

Compact

CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12 MXZ12Standard (Pilot port location: Front) 4 x 6 4 x M3 x 0.5 depth 5 17 14 14 2 x 3.4 (Through holes for mounting) 17 37.4

Multistage Ejector Series ZL112.212

80 70 70 200 100 60 60 ZA Air consumption Air consumption 150 50 50 75 40 40 100 50 ZX 30 30 20 20 50 25 ZR 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZM Supply pressure (MPa) Supply pressure (MPa) ZMA Flow Characteristics Flow Characteristics Supply pressure: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 ZH 70 70 60

Trimmer Auto Switch

Series 10 12 16 20 25 32 40 50 63 80 100 MGP 3.5 5.0 4.5 4.5 5.5 5.5 5.5 5.5 5.5 6.0 MGZ 5.5 6.5 6.5 CA2 4.0 4.0 6.0 6.0 6.0 Sensor unit: D-F7K Air cylinder Unit: mm Tube I.D.

AMF

AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket 20 2BFlange 30 3BFlange 40 4BFlange 20 2BFlange 30 3BFlange 40 4BFlange Shape Piping support style Standing style 60 6BFlange How to Select Max.

A

63 16.5 IS1000E-303 38 IS1000M-6 15 100 72.5 23 54 AC3000 IS1000E-304 12 40 80 63 17.5 *Without Yoke Clip.