Refrigerated Thermo-chiller

. 22 Approx. 17 Approx. 15 Approx. 16 Approx. 15 Approx. 16 Required flow Note 9) (50/60 Hz) (l/min) Port size Wetted parts material Power supply Breaker capacity (A) Rated current (A) Alarm Communications 6/6 15/22 18/23 3/4 5/6 9/10 13/14 5/7 13/14 5/5 Rc 1/2 Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable

51

) (n = 2, 4, 6) Note 3) D-H7 D-H7W D-H7BA D-H7NF (n 2) 2 70 + 45 (n 2) 25 + 45 70 25 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-C73C D-C80C D-H7C (n 2) 2 80 + 50 (n 2) 30 + 50 80 5 30 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-B5 D-B64 D-G5 D-K59 (n 2) 2 70 + 50 (n 2) 25 + 50 5 70 25 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 75 + 50 (n 2) 30 + 50 D-B59W 10 75 30 (n = 2, 3, 4,

Step Motor Driver （ Pulse input type ）

50 50 50 50 50 Trigger LV 50 50 50 50 50 50 Pushing speed 20 30 20 30 20 30 Moving force 100 100 100 100 100 100 Area1 0.00 0.00 0.00 0.00 0.00 0.00 Area2 0.00 0.00 0.00 0.00 0.00 0.00 In position 0.50 0.50 0.50 0.50 0.50 0.50 102 - LER Basic parameter default Model LER10K LER10J LER30K LER30J LER50K LER50J Gear Ratio [] 8 12 8 12 7.5 12 Controller ID 1 1 1 IO pattern 1 1 1 Acceleration/

VQ5000

(A) 4 (B) 2 Electrical entry 6 1 (P) 5 (R1) 3 (R2) G Coil voltage Lead wire length 0.6 m 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Lead wire length 1.5 m Grommet Body 5: Plug lead sub-plate H Function Nil Y R Standard type (1 W) Low wattage type (0.5 W) External pilot Seal (1) 0 1 Metal seal Rubber seal (2) Note 1) Applicable to

Compact manifold regulator ARM5 Series

1/4 3 12.5 19 35.5 8, 5/16 8, 5/16 5 13.5 21 38.5 Note) The O-ring is attached.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

(With stroke adjuster at retraction end) 30 30 76 46 73 58 FF 22.5 5H9 ( ) depth 5 +0.030 0 F 25 +0.030 0 5H9 ( ) depth 5 N 1 x F 2 51 2 x M6 x 1 thread depth 13 37 M 0.5 46.5 50 Z ZZ H G (NN 1) x H 11.5 29 11.5 29 B A 9.5 5.1 11 11 5H9 ( ) depth 5 +0.030 0 30 1.5 NN x M6 x 1 thread depth 12 B A 6 Section AA Section BB HA GA 5H9 ( ) depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

Digital Flow Switches Series PF2A

unit Output for display unit + analog output (1 to 5 V) Output for display unit + analog output (4 to 20 mA) Specifications PF2A511 PF2A521 PF2A551 PF2A510 PF2A550 Model Measured fluid Air, Nitrogen Detection type Heater type 20 to 200 l/min 50 to 500 l/min 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min Rated flow range Operating pressure range 50 kPa to 0.5 MPa 50 kPa to 0.75 MPa Proof pressure

CLA

:::h i=ch 40 50 80 63 100 ! ~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

HRX-OM-R016

Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-48 5.17 Data reset function . 5-50 5.17.1 Data reset function . 5-50 5.17.2 Method of resetting data reset function . 5-50 5.18 Accumulated time reset function . 5-51 5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated

SX

for 1/4" (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting for 1/4" N9: With One-touch fitting for 5/16" SX 000-50-3AP PG PH SX 000-50-4AFor 45(N) (Flat ribbon cable) SX 000-50-5ASX 000-50-6AT T1 For 45 (Terminal block) SX 000-50-7A1-6-110 111 Base Mounted Series SX3000/5000 How to Increase Manifold Bases (1) Loosen bolt (a) fixing the manifold base until it begins

Compact Cylinder with Solenoid Valve/

) EA M J F1 (KB) KA 2 x 2 x OB counterbore depth RB M Z X B + Stroke L EB A + Stroke EA E Axial piping Bore size (mm) F1 32 40 50 63 30 34.5 43.5 51 Bore size (mm) Stroke range (mm) A B E EA EB F HA HB J KA KB L M N OA 32 40 50 63 5 +0.2 0 5 +0.2 0 6 +0.2 0 6 +0.2 0 28 0.2 33 Note 1) 40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8

CV/MVGQ

(Example) CDV3LN50-100-1 2 position single 2 position double Solenoid valve voltage Nil W 1 2 5 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 24 VDC Other Cylinder stroke (mm) (Refer to Standard Stroke on page 10-15-51.)

7

5 Component Parts MK No.

VZ3000

R1), 3(R2) port: M5 x 0.8 4 Rated voltage Manual override 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil: Non-locking push type C: Locking type C (Manual) 3 position pressure center 4 5 24 VDC 12 VDC B: Locking type B (Slotted) 5 6 9 Other Option Electrical entry Light/Surge voltage suppressor Grommet L plug connector M plug connector DIN terminal Nil Z

LEC-OM02904

m i m 4 8 1 . 5 1 6 1 ( 1 8 . 5 5 ) m a x .

3 Position Cylinder Series RZQ

Cylinder stroke Bore size (mm) 50-5 0.21 0.35 0.63 0.80 25-5 0.18 0.31 0.58 0.73 75-5 0.23 0.39 0.68 0.86 100-5 0.26 0.43 0.73 0.93 125-5 0.29 0.46 0.78 0.99 150-5 0.32 0.50 0.83 1.06 175-5 0.34 0.54 0.88 1.12 200-5 0.37 0.58 0.93 1.19 250-5 0.43 0.66 1.03 1.33 300-5 0.48 0.74 1.13 1.45 32 40 50 63 Find the first-stage stroke by adding the mass of an additional 10 mm as in the table below

Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage Configuration Note 2) VQ1000 VQ2000 1 2 3 4 5 6 VQ0 100V AC (50/60Hz) 2 position single 1 2 3 4 5 200V AC (50/60Hz) 2 position double (latching) 110V AC (50/60Hz) Electrical entry (2) (1) 3 position closed center 220V AC (50/60Hz) 24V DC 12V DC Grommet (Except for double (latching) and AC.)

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 112 93 12 Y 25 (14 port) PE port 5 3 37 25 22 14 1 25 25 9 1/8 12 port 3/8-2 port 3, 5 port 1/4, 3/8 1 port 14 port 1/8 1/4, 3/8-2 port 2, 4 port EVS7-6-FG-D-M0 EVS7-6-F G-D-M0 H J I 186 196 89 89 13 (4 port) 50 50 13 (2 port) 13 (4 port) 50 50 13 (2 port) B A B A 50 62 50 62 38 14 38 12 14 12 Manual override Manual override P R1 R2 P R1 R2 Indicator light 2-6.5 mounting hole 42.5 42.5

MTS

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100