CJ2X/CUX/CQSX/CQ2X/CM2X

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

RS1H63 200 200 0.9 Operating pressure P [MPa] 0.8 100 100 0.7 0 0 10 20 30 40 10 20 30 40 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graph e Graph r Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 5000 0 1000 2000 3000 4000 32 Lateral load F [N] 70 70 60 60 Load mass m [kg] Load mass m [kg] 50 50 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Vertical Mount) For transfer load of 0kg For transfer load of 5kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 150 50 10 1 100 200 50 10 1 10 10 10.1 15.1 5.1 1.1 0.2 10.1 15.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 7.6 2.6 0.6 0.1 5.1 7.6 2.6 0.6 0.1 30 30 3.4 5.1 1.7 0.4 0.1 3.4 5.1 1.7 0.4 0.1

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Clip Circuit with light PR plate qChanging the piping direction from in-line to perpendicular (port on the valve) is possible on the VQZ100 series. Follow the steps below to change piping direction: Remove the fitting clips that hold the fitting and port plug in place.

Series AK1000

psig (0.14 MPa) AK1500 3000 psig (20.7 MPa) 200 psig (1.4 MPa) Inlet pressure: 50 0.34 100 0.69 90 0.62 40 0.28 80 0.55 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 70 0.48 30 0.21 60 0.41 50 0.34 40 0.28 20 0.14 30 0.21 20 0.14 10 0.07 0 10 0.00 0.07 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Support Guide/11-LEFG Series

30 40 50 0 0 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

0.55

stations 20 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 Manifold Option Description Part no.

Magnetically Coupled Rodless Cylinder

size 15 Symbol 40mm Nil 20, 25, 32, 40 TN TF Standard Stroke Note 1) Bore size (mm) Standard stroke (mm) Maximum stroke availabe (mm) 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

size 15 Symbol 40mm Nil 20, 25, 32, 40 TN TF Standard Stroke Note 1) Bore size (mm) Standard stroke (mm) Maximum stroke availabe (mm) 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke

LEYx-OMZ0015

] 0.1 or less[Basic type] / 0.05 or less[High precision type] Lead[mm] (Including pulley ratio) 12 6 3 20 10 5 16 8 4 20 10 5 2.86 Impact resistance/vibration Resistance [m/s2] Note5) 50 / 20 50 / 20 50 / 20 Ball screw Drive method Ball screw and Belt [1:1] / Ball screw Ball screw and Belt [1.25:1] Ball screw Ball screw and Belt [4:7] Guide type Sliding bush (Piston rod part) Sliding bush

LEJ-OM002xx

(Manufacturable stroke range: LEJS40/ 200 to 1200mm, LEJS63/ 300 to 1500mm) 14 - LEJS63M Ball screw drive Model LEJS63 Stroke [mm] Note1) 790,890,990,1190,1490,1790 Work load [kg] Note2) Horizontal 30 45 85 Vertical 6 10 20 Speed[mm/s] 1800 1200 600 Actuator specification Maximum acceleration / deceleration [mm/s2] 20 (Refer catalog about limit according to work load and duty rate.)

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Valve Mounting VS After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

The materials in parentheses are the seal materials. 20 21 Series VX21/22/23 Construction: Manifold Normally closed (N.C.) Normally open (N.O.)

Air Slide Table

-30 0.02 MXQR16-30 MXQR16-20 MXQR16-20 0.02 0.04 0.01 MXQR16-10 MXQR16-10 0 0 150 150 50 100 200 100 200 300 400 0 50 100 200 Load (N) Load (N) Load (N) 20 20 20 Lr = 160 mm 0.08 MXQR20-75 MXQR20-40 MXQR20-75 MXQR20-40 MXQR20-125 MXQR20-125 MXQR20-150 MXQR20-10 MXQR20-20 MXQR20-30 MXQR20-10 0.12 MXQR20-50 MXQR20-75 MXQR20-40 MXQR20-75 MXQR20-75 0.06 Table displacement (mm) Table displacement

Cylinder with Turntable Series MGT

50 25, 50st 10 40 30 MGJ 5 4 3 20 MGP 2 10 1 MGQ 1 2 3 4 5 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) MGG MGC MGTL100 300 300 MGTM100 200 200 P = 0.5 MPa MGF 100 P = 0.5 MPa Larger than 75st Larger than 50st Load mass m (kg) Load mass m (kg) MGZ 40 50 100 25st 50st 30 25, 50st MGT 20 50 40 10 30 5 4 3 20 2 1 10 20 30

Series CQ2

(Mounting position: Horizontal) W 1000 500 400 Allowable lateral load W (N) 300 Allowable kinetic energy 200 Piston speed 200 180 200 100 180 Piston speed Allowable kinetic energy 20 to 400mm/s 12.4J 50 40 30 (m1 + m2) V Kinetic energy E (J) = 2 m1: Weight of moving cylinder parts kg m2: Load weight kg V: Piston speed m/s 20 10 0 20 40 60 80 100 120 140 160 180 200 220 260 240 280 300 Kinetic

AS

Applicable cylinder bore size (mm) Speed controller with Model Port size 4 6 8 10 12 One-touch fittings for AS121-M5 M5 x 0.8 6, 10, 16, 20 1 8 AS221-01 R 20, 25, 32 metal body specifications 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R Uses flame resistant resin as standard.

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500