Series IDG

600 (21.19) 750 (26.49) 1000 (35.31) IDG3M IDG5M IDG10M IDG20M IDG30M IDG50M IDG60M IDG75M IDG100M 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 75 (2.65) 110 (3.88) 170 (6.00) 240 (8.48) 300 (10.59) IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 50 (1.77) 100 (3.53) 150

ARM10/11

200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow

Compact Manifold Regulator

Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa ARM11AA1-310-1 (One-touch fittings: IN 8, OUT 6) Condition: Inlet pressure 0.5 MPa ARM11AA1-310 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate L/min (ANR) Flow

ARM10/11

200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow

VZ3000

150 136 12.5 4 148 137.5 120 14 3 135.5 125 104 16 2 110.5 100 88 11.5 3-3-52 Series VZ Made to Order Specifications: Please contact SMC for detailed specifications, dimensions, and delivery. 1.

Manifold Specifications

150 136 12.5 4 148 137.5 120 14 3 135.5 125 104 16 2 110.5 100 88 11.5 3-3-52 Series VZ Made to Order Specifications: Please contact SMC for detailed specifications, dimensions, and delivery. 1.

48

200 250 300 350 Max. speed [mm/s] 3 2 1 0 0 50 100 150 200 Stroke [mm] 5 Dual Rod Cylinder JMGP Series Bore Size 12 (10 x 2), 16 (12 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view WA + Stroke/2 Z 4 x OA through 4 x OB counterbore depth OL 4 x MM depth ML L 2 x P (Plug) (OL) 4 x NN through PW X U H VA PE T R 2 x P (Plug) 2 x P D 2 x P (Plug) GB GA S Q JC J K PD C + Stroke

-- NCM seies

o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

MPa Valve specifications Electricity specifications 2 position 3 position Min. operating pressure Ambient and fluid temperature Proof pressure 1.5 MPa 10 to 60C (1) Lubrication Pilot valve manual override Shock/Vibration resistance Enclosure Coil rated voltage Allowable voltage fluctuation Coil insulation type Apparent power (Power consumption) Non-lube (2) Non-locking push type (Flush) 150

ncq8mp

NCQ8B106-T-PS NCQ8B106-T-PS 106 (1 1/16") NCQ8B150-T-PS NCQ8B150-T-PS 150 (1 1/2") NCQ8B200-T-PS NCQ8B200-T-PS 200 (2") NCQ8B250-T-PS NCQ8B250-T-PS 250 (2 1/2")

Series NCQ8 Air Cylinder: Standard Type Double Acting, Single Rod

NCQ8B106-T-PS NCQ8B106-T-PS 106 (1 1/16") NCQ8B150-T-PS NCQ8B150-T-PS 150 (1 1/2") NCQ8B200-T-PS NCQ8B200-T-PS 200 (2") NCQ8B250-T-PS NCQ8B250-T-PS 250 (2 1/2")

CL

, 200 201 to 350 D25 32 40 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200, 250, 300 -X Intermediate stroke is available, too. 20Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.

3

Flow-rate Characteristics (Pressure Loss) PF3W711/511 PF3W721/521 0.04 0.04 Pressure loss [MPa] Pressure loss [MPa] 0.03 0.03 0.02 0.02 0.01 0.01 0 0 0 20 40 60 80 100 0 50 100 150 200 250 Flow rate [L/min] Flow rate [L/min] Straight Piping Length and Accuracy (Reference Value) Pressure: 0.3 MPa PF3W711/721/511/521 Piping diameter: 25A, 30A Straight piping length p10 p8 Accuracy [% F.S.]

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Weight(kg) 3.15 3.35 3.55 3.75 3.95 4.15 4.35 4.55 4.75 4.95 5.15 5.35 5.55 5.75 5.95 6.15 6.35 6.55 6.75 6.95 0.53 Additional weight for lock(kg) 4 Model LEFS40 Stroke(mm) 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Weight(kg) 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

SYJ300/500/700

Station n L1 L2 L3 L1 L2 L3 Station 2 62 53 47 63 54 48 3 78 69 63 80 71 65 Station 20 350 341 335 369 360 354 4 94 85 79 97 88 82 5 110 101 95 114 105 99 6 126 117 111 131 122 116 7 142 133 127 148 139 133 8 158 149 143 165 156 150 9 174 165 159 182 173 167 10 190 181 175 199 190 184 11 206 197 191 216 207 201 12 222 213 207 233 224 218 13 238 229 223 250 241 235 14 254 245 239 267 258 252

Rotary Table/Rack & Pinion Style Series MSQ

MSZ Mass CRQ2X MSQX (g) MRQ 1 2 3 7 Size Basic type 75 105 150 250 High precision type 80 115 165 265 Note) Excluding the mass of auto switches Clean Series Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet. 3 78 69 63 80 71 65 6 126 117 111 131 122 116 8 158 149 143 165 156 150 10 190 181 175 199 190 184 2 62 53 47 63 54 48 20 350 341 335 369 360 354 4 94 85 79 97 88 82 5 110 101 95 114 105 99 7 142 133 127 148 139 133 9 174 165 159 182 173 167 11 206 197 191 216 207 201 12 222 213 207 233 224 218 13 238 229 223 250 241 235 14 254 245

Rotary Table/

80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement m Displacement m 90 150 80 120 50 MSQA50 (High precision

CV/MVGQ

seals 110C Heat resistant tarpaulin Double clevis pin and double knuckle pin Maximum ambient temperature for the rod boot itself. 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC27 50, 63 made of stainless steel -XC28 Compact flange made of SS400 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 -XC29 Double knuckle joint with spring pin