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Installation should be in accordance with Canadian Electrical Code or ANSI/ISA RP12.6 Installation of Intrinsically Safe Systems for Hazardous (Classified) Locations and the National Electrical Code or ANSI/NFPA 70. 3. Barrier manufacturers installation drawing must be followed when installing this equipment. 4.

Remarks Weight Lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

Remarks Weight Lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

Installation 20 Installation 20 Model Indication and How to Order 23 Summary of Product Parts 24 Connector (Base only) 25 LED Display 26 LED indication of base 26 LED indication of remote 28 Setting and Adjustment 29 Setting 30 Dimensions 46 I/O Map 48 I/O mapping 49 I/O mapping order of base/remote 50 Diagnostic allocation 56 Detailed diagnostic data 57 Specifications 64 Troubleshooting 70

Option Part number Remarks Weight With lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

60 20 B + Stroke FZ REB 20 64 20 A + Stroke 4 x FD 25 65 22 34 REC 30 72 22 40 40 89 22 50 CY Head side flange type: MQQTG 10, 16, 20 25, 30, 40 CX MQ 2 x FD 4 x FD (mm) RHC Bore size (mm) Stroke range (mm) A L M FV FV RZQ 10 10 to 40 45 8 B + Stroke L FT FX FZ FX FZ 16 10 to 60 52 10 A + Stroke 20 10 to 60 55.5 10 25 10 to 50,75,100 62 12 D30 10 to 50,75,100 68.5 12 40 10 to 50,75,100 70

87.5 105 122.5 140 157.5 175 L2 45 62.5 80 97.5 115 132.5 150 167.5 185 L3 52 69.5 87 104.5 122 139.5 157 174.5 192 2 stns. x 1 Manifold composition 3 stns. x 1 2 stns. x 2 2stns. + 3stns. 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

Note Weight Lead wire and M12 connector LFE-1-A3 Lead wire length 3 m Approx. 175 g Option Part no. Note Weight Bracket LFE-1-D Tapping screw for LFE1 (3 x 10), 4 pcs. Approx. 45 g LFE-2-D Tapping screw for LFE2 (3 x 10), 4 pcs. Approx. 70 g LFE-3-D Tapping screw for LFE3 (3 x 10), 4 pcs. Approx. 70 g 3

0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: Head flange: 0.3 433 386 476 F G L, F 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 5 Series CS2 Construction !

CE marked CE marked Standard (EMC directive / RoHS directive), (EMC directive / RoHS directive) UL (CSA) Weight 170 g 175 g 170 g 1: All unused connectors must have a seal cap fitted. -31No.EX-OMW1003-A Dimensions 26 EX600-ED2 EX600-ED2-2 26 -32No.EX-OMW1003-A EX600-ED2-3 -33No.EX-OMW1003-A EX600-ED3 EX600-ED3-2 -34No.EX-OMW1003-A EX600-ED3-3 -35No.EX-OMW1003-A EX600-ED4/ED5 26 EX600-ED4/

The operating fluid temperature should be -5 to 70 C, and the ambient temperature should be -5 to 50 C. Operation under low temperature (5 C or less) leads to cause damage or operation failure due to frozen moist in the fluid or air. Protection against freezing is necessary. Air dryer is recommended for elimination of drain and water.

Dimensions (mm) Recommended flow m3/min (ANR) Model Port size R Effective area (mm2) Weight (g) A B C 1 8 ANB1-02 15 10 51 22 ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 1.2 or less 2.7 or less 3.8 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1

(psi) Nominal ~upport bracket nominal ~ymbo l symbol ~nd~cJjemallc diagram " Rod f1ang~: Head flange: --i '< "C II> 92 113 103 Fooi: L 44 G .F. " [I" , , III 1 L,F 73 79 70 86 :.T w~ 102 58 66 72 44 45 47 38 en 3 0 0 ~ "'i f" 27 73 34 33 G 22 102 27 26 (') 'cS. ,j" C. r '\ ~ T .

(mm) Model Conversion Cv 1.2 1.3 1.5 3.9 5.0 4.5 5.8 7.0 11 9.1 15 17 23 17 23 26 34 30 40 41 62 41 66 49 70 73 100 Threaded Note) Flange Kv VNC1-6A VNC1-8A VNC1-10A VNC24-10A VNC2-10A VNC24-15A VNC2-15A VNC34-20A VNC3-20A VNC44-25A VNC4-25A VNC54-32A VNC5-32A VNC54-32F VNC5-32F VNC64-40A VNC6-40A VNC64-40F VNC6-40F VNC74-50A VNC7-50A VNC74-50F VNC7-50F 1 8 1 4 1.1 1.1 1.3 3.4 4.3 3.9 5.0

Model No. 01 02 Port size R1/8, M5 x 0.8 R1/4, M5 x 0.8 Piping port: C3604 + electroless nickel plated Pressure sensor: AI203 (aluminum oxide) O ring: FKM + Grease Materials of parts in contact with fluid Without lead wire and M12 connector 88 g 95 g Weight With lead wire and M12 connector 175 g 182 g Cable specifications Nominal cross section area AWG23 Conductor Outside diameter 0.72 mm

267 330 Foot: 231 207 253 L G 193 172 212 144 126 156 109 94 118 90 78 97 Rod side Frang e F Head side flange 433 386 476 Foot: 334 297 367 L G 281 250 309 210 185 229 160 141 175 134 117 129 8 - 5) Theoretical output Table 3.

ISA-2-3 DIN rail (Width 35 mm x Length 175 mm) 1 pc. ISA-2-4 DIN rail (Width 35 mm x Length 210 mm) 1 pc. ISA-2-5 DIN rail (Width 35 mm x Length 245 mm) 1 pc. ISA-2-6 DIN rail (Width 35 mm x Length 280 mm) 1 pc.

Pollution degree For use in Pollution Degree 3 Environment (UL508) Standard CE, UL(CSA), RoHS Weight 170 g 175 g 1: All unused connectors must have a seal cap fitted. 2: The UL agreement temperature is 0 to 50 oC.

. -77No.EX-OMW0006-D Remote specifications Models EX600-WSV1 EX600-WSV2 For control and input (US1) Power supply voltage 24 VDC 10% Electrical specifications Current consumption 70 mA or less Power supply voltage 24 VDC 10% For output (US2) Max. supply current 4 A Number of inputs Input size Max. 128 points (increase or decrease by 16 points) Number of outputs Output size Max. 128 points