Stability of suction position,

Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

connector, refer to page 8-30-52. 8-29-1 2 Series CXS Specifications 15 6 10 20 25 32 Bore size (mm) Fluid Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Cushion Stroke adjustable range Port size Bearing type Air (Non-lube) 1.05 MPa 0.7 MPa 0.1 MPa 0.05 MPa 0.15 MPa 10 to 60C (No freezing) 30 to 600 mm/s 30 to 700 mm/s 30 to 300

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

NVKF

N217 3 Way Direct Acting NVKF 300 series Rubber Seal Solenoid Valve Compact Size I Large Flow Capacity Low Power Option Available Vacuum Option Available Base Mounted or Body Ported Cv 0.25 Sries ]tlUlff 300 3-Porl / 0irscl Wmhil $hruid hlYe I Large Flow Capacity Cv 0.25 I Compact Size width 0.73" x length 2.67" I Low Power Consumption 4WDC (Standard model) 2WDC (Low wattage model) I Vacuum

3

Line name Expanded flow range Compact, Space saving Wide range of flow measurement with one product Compared with the current PF2A, Flow ratio 78 % reduction Weight 74% reduction 100:1 Mounting space 1100 g a 240 g Compared with PFMC7202-06 and PF2A703H-10 Rated flow ratio is 10 : 1 for current PF2A. 2000 L type 55 Applicable flow range [L/min] PFMC7202 New 1 2 5 10 20 25 50 100 150 200 300

3 Way Direct Acting NVKF 300 Series

@slrc' 3 Way Direct Acting NVKF 300 seies Rubber Seal Solenoid Valve Compact Size / Large Flow Capacity Cv 0.25 Low Power Option Available Vacuum Option Available Base Mounted or Body Ported Sries ]tlUlff 300 3-Porl / 0irscl Wmhil $hruid hlYe I Large Flow Capacity Cv 0.25 I Compact Size width 0.73" x length 2.67" I Low Power Consumption 4WDC (Standard model) 2WDC (Low wattage model) I Vacuum

Table of Contents

Series CQ2 Compact Cylinder: Large Bore Size Type Double Acting, Single Rod 125, 140, 160, 180, 200. How to Order . Precautions. Specifications. Construction. Dimensions . Series CQ2W Compact Cylinder: Large Bore Size Type Double Acting, Double Rod 125, 140, 160, 180, 200 . How to Order . Precautions. Specifications. Construction. Dimensions .

PSE550/300

Response time settings: 20 ms, 160 ms, 640 ms, 1280 ms This function averages pressure values measured during the response time set by the user and then compares the average pressure value with the pressure set point value to output the result on the switch.

Compact Cylinder

1.0 MPa 0.05 MPa (20 to 63), 0.03 MPa (80, 100) Type Action Fluid Proof pressure Maximum operating pressure Minimum operating pressure Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Rubber bumper on both end Ambient and fluid temperature Cushion +1.0 0 mm Stroke length tolerance Note) Caution Through-hole/Both ends tapped common 50 to 500 mm/s 50 to 300

AMD

520 1318 3 972 12B AMD800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B, 3B 8B C 2B, 3B, 4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57

MHZ

L (mm) Gripping point L (mm) MHZ2-10D/MHZL2-10D MHZ2-32D 300 Internal Grip Pressure 0.7 MP Pressure 0.7 MPa Pressure 0.7 MPa 25 Pressure 0.7 MPa 0.6 MPa Pressure 0.7 MPa MHZA2, MHZ2, MHZL2 250 0.6 MPa 0.6 MPa 0.6 MPa 20 Gripping force (N) 0.5 MPa 0.5 MPa Gripping force (N) 0.5 MPa 0.5 MPa 200 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 15 150 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 10 100 0.2 MPa 0.2 MPa 0.2

MHZ

Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F Gripping point L (mm) Gripping point L (mm) MHZ2-10D/MHZL2-10D MHZ2-32D 300 Internal Grip Pressure 0.7 MP Pressure 0.7 MPa Pressure 0.7 MPa 25 Pressure 0.7 MPa 0.6 MPa Pressure 0.7 MPa MHZA2, MHZ2, MHZL2 250 0.6 MPa 0.6 MPa 0.6 MPa

AMF

Maintenance Caution Model Connection (Flange) 2B 8B C 2B/3B/4B 500 A 330 B 300 D 1070 E 1200 F 1290 G 20 H 720 M16 X l 400 Anchor bolt M20 X l 500 AMF800 AMF900 400 550 560 745 300 300 1070 1090 1230 1320 1335 1450 24 24 q It is not possible to indicate a definite replacement interval for the element because it varies with the odor concentration of the compressed air.

Title not found

Threaded porb Builtln onelouch fttina r @Actuation Lerge bore sire Double acting Single rodl 0 lo 300 Double rod 101o 300 Long sbgke Double acdng Single rod125lo300 Ar i.latral load Dorrble acling Singls rod o32 to 040/5 io 100 050 to otoofi0 b 1m of auto switches Hffi l{on.roiating rod Doubleactng Single rod o12, 016/5lo 30 a2O, 025/5Io aA aP., o4A5 b 1O0 o50, 06?

RB/RBL/RBQ

Suitable 20 for m and 0.7 for . 1000 ML2B 6 10 15 20 25 30 40 50 63 80 100 125 140 160 180 200 250 300 0.057 0.099 0.113 0.120 0.184 200 300 400 500 E1 4.9 J In the case of cylinder stroke at load and free horizontal impact, 0.157 0.274 0.314 0.334 0.511 C J G5-S E1 or E substitute respective figures for Data A in order to calculate E1. 100 Impact object weight m or corresponding weight

LEC-OM02704CN

300 29 MC NFB 42 5 L 1 4 L 2 7 58 29 L 3 44 FR BI F 200V FR-BIF FR-BIF-H (f) () CHEMI-CON TND20V-431K TND20V-471KTND20V-102K () () V1mA AC[Vrms] DC[V] 8/20s[A] 2ms[J] [W] [A] [V] [pF] [V] TND20V-431K 275 350 10/1 195 1.0 100 710 1300 430(387473) 100V 200V 7000/2 TND20V-471K 300 385 215 775 1200 470(423517) [mm] D H T E ()L d W D T Max.

Series MXP Precision Air Slide Table

Q Q Q MXP Series Q Q Q Product Features .pages 158-159 Q Q MXP Series Q How to Order .page 160 Q Specifications .page 161 Q Table Accuracy .page 162 Q How to Select .pages 163-164 Q Table Deflection .page 165 Q Construction/ Parts List, Seal Kits .page 166 Q Dimensional Drawings.pages 167-170 Q Auto Switch Specifications and Mounting.pages 171 Q Please see

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

AMF

E 270 F 823 G 3 H 797 J 620 AMF801 AMF901 445 12B 570 300 520 1093 3 867 AMF800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B 8B C 2B, 3B, 4B 500 A 330 B 300 D 1070 E 1200 F 1290 G 20 H 720 M16 x l400 Anchor bolt M20 x l500 AMF800 AMF900 400 550 560 745 300 300 1070 1090 1230 1320 1335 1450 24 24 4B, 6B 870 M20 x l500 AMF1000 14-20-48