7

9 100 12 100 12 100 15 100 15 100 Note 1) Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

SYJ300/500/700

V100 SY How to Order Connector Assembly SYJ For DC: SY100 30 4A VK For 100 VAC: SY100 30 1A Groove Cover VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com For 200 VAC: SY100 30 2A Pin Cover VT Groove For other voltages of AC: SY100 30 3A DC Polarity display Lever

MXF

specifications for guide unit Standard Stroke Standard stroke (mm) Model MXF8 10, 20, 30 MXF12 20, 30, 50 MXF16 30, 50, 75 MXF20 30, 50, 75, 100 Weight (g) Standard stroke (mm) Model 100 75 50 30 20 10 MXF8 170 130 120 MXF12 360 250 210 MXF16 690 500 360 MXF20 1370 1060 750 600 8-6-3 4 Series MXF Table Deflection (Reference values) Table Displacement due to Pitch Moment Load Table

Basic Type/Direct Mount Type

40 30 20 300 200 100 10 Usable range 20 30 40 50 Usable range 5 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B CY3R CY3B CY3R CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) CY1S 100 500 400 50 300 30 200 CY1L 100 10 20 30 40 50 Usable range

IP8001 Series

80% position = 64.0% ( ) (759,769) 90% position = 81.0% ( ) (75A,76A) 100% position = 100.0% ( ) 100% 100 Quick opening 50 Linear Stroke (Y) User Equal percentage 50 0 0 100 100% 0% Input current (X) Fig. 30 7: Be sure to set all 11 date items.

LG1H

10 56 Series LG1H Mounting Top Mount LG1H21/ With coupling 3.5 M6 bolt 8(4) x Mounting hole 6.6 or M6 A() 95() A A Stroke Stroke 95(150) 100 600 460 200 60 700 560 Long positioning hole 300 160 800 660 400 260 900 760 500 360 1000 860 30 Positioning hole 2 x 8H10 Dimensions inside ( ) are for a 100 mm stroke.

energy saving effect

[MPa] Circulating fluid pressure [MPa] Usable flow rate range Usable flow rate range 0.5 0.5 50 HECR 50 0.43 0.45 Outlet Pump head [m] Pump head [m] Outlet 0.4 0.4 40 40 HEC 0.3 30 0.3 30 HEB 0.2 20 0.2 20 HED Return port 0.1 10 0.1 10 Return port 0 0 0 0 HEA 45 40 50 0 10 20 30 60 70 80 90 100 110 120 Circulating fluid flow rate [L/min] 45 0 20 10 40 30 50 60 70 80 90 100 110 120 130 Circulating

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

HRS100/150

HRS HRS 090 HRS 100/150 HRS 100/150 Part no.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

KQ2

H 1 4 3 8 KQ2T10-U02 KQ2T10-U03 30 30.5 17 26.5 10 18.5 17 21 35.2 25 1 2 KQ2T10-U04 30 31.5 51 31 34 22 KK Connection thread 1 4 3 8 KQ2T12-U02 KQ2T12-U03 27 28 31.5 32.5 17 12 20.9 17 28.5 22 45.2 57.2 D 1 2 KQ2T12-U04 31 33.5 33 35 22 54 62 63 71 (71) 100 (100) 3 8 KQ2T16-U03 26.5 33 40.5 40.5 21 16 24 22 MS 1 2 KQ2T16-U04 Reference dimensions after Uni thread installation.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

LS + Stroke Z (mm) 4 4 4 4 LC 7 7 6 6 LD 30 25 22 20 LH 3 3 3 3 LT 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 60 69 69 69 LS 54 44 36 32 LX 187 175 173 163 ZZ 10 10 10 10 W 71 58 49 44 LZ Z Bore size 63.5 53 52 47 38.5 34 40 32 25 20 54.5 45 10 12 55 74 4.5 100 125 5 20 28.5 80 101 6 11 65 74 6 120 150 7 20 30 100 121 6 14 50 63 70.5 5 5 40 45 4.5 4.5 17.5 17.5 75.5 22 22 11 13 5 5 67 67

CNS

D-A3 D-G39 D-K39 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com n Same side 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 1 110 15 Different sides 110 35 2 Same side 110 55 D-A44 Different sides 110

Fluoropolymer Piping Equipment

120 140 160 180 200 0 0 20 40 60 80 100 120 140 160 180 200 Temperature (C) Temperature (C) 942 LQ1/LQ3/LVN/LQHB Series Applicable Fluids Material and fluid compatibility check list for high purity fluoropolymer fittings Chemical Compatibility LVC Acetic acid 100% LVA Acetone 100% Note 1,2) LVH Ammonium fluoride 40% Ammonium hydroxide 30% LVD Butyl acetate 100% LVQ Methylne chloride

Base Mounted Metal Seal/Rubber Seal Series VQ

Connector Assembly (For DC) Part no. for single & VQ0 double Part no. for VQ1000 double Lead wire length Socket (3 pcs.) 300 mm 600 mm 1000 mm 2000 mm 3000 mm AXT661-12A AXT661-14A AXT661-14A-6 AXT661-14A-10 AXT661-14A-20 AXT661-14A-30 AXT661-13A AXT661-13A-6 AXT661-13A-10 AXT661-13A-20 AXT661-13A-30 Note) 100/110 VAC for single: AXT661-31A-; for double: AXT661-32A200/220 VAC for single:

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

HRL

-Am-20 (CH1) HRL100-Am-20 (CH1) 0.6 0.6 60 60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

) 0 50 100 150 Load (N) 200 16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150