3 Port Air Operated Valve

N.O. specifications N.C. specifications Function plate Specifications Function plate N.C. 3-CL N.O. 3-CP 1. Each valve is fixed to the manifold base with two M4 mounting screws. Tighten the screws evenly when re-mounting. Caution 2. For mounting, tighten M4 or equivalent screws evenly into the mounting holes of the manifold base.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

Digital Flow Switches

Vibration resistance 4.9 m/s2 Impact resistance 490 m/s2 to X,Y,Z directions 3 times for each Noise resistance 1000 Vp-p, Pulse width: 1 s, Rise time: 1 ns Weight 140 g (without lead wire) 225 g (without lead wire) Port size 3/8 inch tube 1/2 inch tube 3/4 inch tube Wetted material Body: New PFA, Sensor: New PFA, Tube: Super PFA Note 1) 1.6 to 20 l/min (0.1 MPa) with viscosity of 1 mPas (1 cP

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Vibration resistance 4.9 m/s2 Impact resistance 490 m/s2 to X,Y,Z directions 3 times for each Noise resistance 1000 Vp-p, Pulse width: 1 s, Rise time: 1 ns Weight 140 g (without lead wire) 225 g (without lead wire) Port size 3/8 inch tube 1/2 inch tube 3/4 inch tube Wetted material Body: New PFA, Sensor: New PFA, Tube: Super PFA Note 1) 1.6 to 20 l/min (0.1 MPa) with viscosity of 1 mPas (1 cP

Mechanical Valves Series NVM, NVFM, NVZNI

PSIG (5 Kgflcm2) Millimeters in Parentheses N\2M450-N01-08 e+ _i i MAX.H ' May be rotated without changing porl location A tJ D E to H 5.24 (1 34) 1 . 1 8 (30) 3.94 (100) 1 3 4 (34t 0.69 (17.5)o.20 {51 ).59 (15) 0.1 t4.5 F-(J-F 3.31 lbs (1.5 Ko) T.T 40" '75 PSIG (5 Kgf/cm2) Millimeters in Parentheses .Series NVM MECHANICALLY ACTUATED/PI LOT OPERATED DIMENSIONS NVZM4sO NVZil450-N010 ,^. fl cP

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

OML0002-C

Number of manifold Mounting pitch ES 17mm 2 2 stations 3 3 stations 4 4 stations Nozzle shape NIL 01 02 11 Piping female Note 1) Rc1/8 Large flow nozzle Type Energy saving charge elimination nozzle Electrode needle cleaning kit/IZS30-M2 Piping diameter 06 f6: metric 07 f6.351/4"): inch 16 f6: metric (elbow) 17 f6.351/4"): inch (elbow) Accessories Power supply cable Cartridge Assembly IZN10-CP

Cylinder Positioner IP200 Series

air) IN (SIG air) qInput chamber uDiaphragm A iDiaphragm B oSpool wFeedback spring EX OUT2 EX OUT1 eInput diaphragm yNozzle rConnecting rod tCylinder rod 152 Cylinder Positioner IP200 Series Dimensions 20 20 25 SIG OUT1 OUT2 20 25 2 x 6.6 OUT1 OUT2 IN side Rc1/4 38 60 50 SUP 31 35 135 + Stroke IP IP IW 97 1301 40 SUP AW 37 Rc1/4 M8 x 1.25 depth 15 IL1 66 62 + Stroke 80 IL2 Precautions IT CP

INFORMATION Step Motor Controller 5 types of communication protocols New New

origin parameter are automatically set as the actuator parameters, and the 3 items of data consisting of No. 0 to 2 are automatically set as the step data. 1 Step Motor Controller JXCE1/91/P1/D1/L1 Series System Construction LEY/LEYG Series LEF Series LES/LESH Series LER Series LEL Series LEPY/LEPS Series LEH Series LEM Series Electric actuators Actuator cable Standard cable Robotic cable LE-CP-S

NCA1

2 1 1/4 -12 1 3/8 NY-1200 2.531 1 3/4 4 1/2 2 3/8 1 1/4 2 3/8 2 1/4 2 1/4 1 1/2 -12 1 3/4 NY-1400 2.531 2 5 1/2 2 15/16 1 1/4 2 15/16 2 1/2 3 1 7/8 -12 2 NY-1401 3.032 2 1/2 6 1/2 3 1/2 1 1/2 3 1/2 3 3 1/2 2 1/4 -12 2 1/2 NY-1402 3.032 3 6 3/4 3 7/8 1 1/2 3 7/8 3 1/4 3 1/2 2 1/2 -12 2 3/4 Order to Match Rod Thread Rod Eyes Pivot Pin Pivot Pin Part No A CA CB CD ER KK Part No CD1 CD2 CL CP

NCA1

CD 1 CD 2 CL CP Part no. A CA CB CD ER KK Part no. CD CL NCA1-150 1/2 1 7/8 NCA1-325 3/4 2 5/8 NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCDP-150 .500 0 -.002 .106 2.28 1.94 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCDP-325 .750 0 -.002 .140 3.10 2.72 Note) Cotter pins are included. 2 x CD CD dia.

Stations: 16 Stations, Port Size: CP (Port Plug), Option: D (DIN Rail Mounting), CE Compliant: No

Stations: 5 Stations, Port Size: CP (Port Plug), Option: D (DIN Rail Mounting), CE Compliant: No

Stations: 18 Stations, Port Size: CP (Port Plug), Option: D (DIN Rail Mounting), CE Compliant: No

Stations: 8 Stations, Port Size: CP (Port Plug), Option: None, CE Compliant: No

Function: Standard (0.35W DC, AC), Coil Voltage: 3 (110VAC 50/60HZ), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: B (Locking Slotted Style), Port Size: CP (w/o Sub-plate )

Function: Standard (0.35W DC, AC), Coil Voltage: 3 (110VAC 50/60HZ), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: CP (w/o Sub-plate )

Function: Standard (0.35W DC, AC), Coil Voltage: 4 (220VAC 50/60HZ), Lead Wire: LO (L Plug w/o Connector), Manual Override: Non-locking Push Style, Port Size: CP (w/o Sub-plate )