Digital Flow Switch

-F 1.

High Vacuum Angle Valve, XL Series

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

E-ITV-STD-RF-A

( Current ) pressure i s di spl ayed i s di spl ayed f or approx. 1 second The set t i ng i s reset Reset cont ent I t em Reset cont ent Appl i cat i on m odel F_1 0% F. S. Current Vol t age i nput t ype F_2 100% F. S. Current Vol t age i nput t ype P_1P_2 100% F. S. Sw i t ch out put t ype P_1P_4 0% F. S.

CRBU

100 90 100 Inner volume cm3 1 1.1 2.6 2.7 5.6 5.7 14.4 14.5 Double vane Be sure to read before handling.

MQQ

(Except clevis style) B L F G C (1) MK(2) 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 RS Q G Dealing with the stroke by the 1 mm interval is available by installing a spacer with the standard stroke cylinder. RS H A Function D (2) Nil HNote) Standard type High speed/High frequency type (Without fixed orifice) RZQ Note) Except 6 mm bore size.

MQQ

A B C D E F Part no.

CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Se ries CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

PF-OMN0011_C

[F 2] OUT2 c()F( oF)() -38No.PF-OMN0011CN-C H_t Ht Ht H_t Ht Ht -39No.PF-OMN0011CN-C [F 3] [F 3] [RES] [F3] 7 s -40No.PF-OMN0011CN-C [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] OUT1 OUT1 OFF [F10] -41No.PF-OMN0011CN-C -42No.PF-OMN0011CN-C -43No.PF-OMN0011CN-C == 1 / ,/ ([F20](45 )) [F82](51 ) c () -44No.PF-OMN0011CN-C [F20] =00 = ON EEPROM 100 +100 OFF 30 msec.GND 1 [ooo] 1

Digital Flow Switch

250 L/min (PFMB7501) [P_2] Set value of OUT2 2 [ 500] 500 L/min (PFMB7102) [F 2] [oU2] page 36 [1000] 1000 L/min (PFMB7202) [ 25] 25 L/min (PFMB7501) [H_2] Hysteresis of OUT2 2 [ 50] 50 L/min (PFMB7102) [100] 100 L/min (PFMB7202) [F 3] [rES] [rES] Response time [1.00] 1 second page 41 [F10] [FLo] [FLo] Display mode [inS] Display instantaneous flow page 42 [F13] [rEv] [rEv] Reversed display

CP95

7. 63 CS95-63 80 CS95-80 100 CS95-100 Seal kits consist of items !3 to !

CP95

CS95-50 63 CS95-63 80 CS95-80 100 CS95-100 Seal kits consist of items !3 to !

PFxx-OMS0001CN

( (53 )) f. -46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

LVQ

Material Parts list 1 Actuator section PVDF 2 Body PFA 3 Diaphragm PTFE 4 Insert bushing PFA 5 Nut PFA 6 Collar PFA 7 Handle section PVDF 8 Indicator, cover PP 537 Series LVQH Dimensions 90 Degree turn type Locked (Valve closed) 90 Q Not locked (Valve open) Y Rc 1/8 (NPT 1/8) Sensor (breathing) port 7 (F) (mm) Dimensions H Sm 70 A B C D F G Model Vm A B J G L LVQH20m-1 LVQH30m-1 LVQH40m-1

0.5

(ON when there is no problem) B5 White A5 Purple Error signal OUT (B contact) Wiring Circuit Shield IZF21/31 IZF21/31 Shield Green F . G. Ground the F.G. cable with a resistance of 100 or less Green F . G.

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

76

temperature: 113F (45C) RoHS How to Order IDF 30 100 FS Nil C K P R V Nil 1 2 3 Size Size Air compressor size Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.

JA/JAH/JB/JS

of sphere R Maximum thread depth P Weight (kg) A B C D T J G H Nominal size Pitch CY Standard: Heavy Load Type Hydraulic: Up to 7 MPa MQQ M JAHF40-16-150 JAHF50-20-150 JAHF63-24-150 JAHF80-30-150 JAHF100-39-150 JAHF100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 1.5 1.5 1.5 1.5 1.5 1.5 75 100 100 125 150 150 76 89 106 131 152 159 50 62 72 82 100 100 18 18 24 38 42 49 50 59.5 66 79 96 96

JA/JAH/JB/JS

125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

Wedge Cam Operation Provides

F = one finger thrust.

ZP

E F G H J K Vacuum inlet direction q Pad dia.