Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination available to order S Available with special request N Not available Note 1) This table is not applicable for 200.

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 1 2 P N SZ3000-42-2A-DSZ3000-42-1A-D For D-sub connector D side 1 2 1 2 P N SZ3000-42-4A-DSZ3000-42-3A-D For flat ribbon cable 26 pins D side Note) The assembly part numbers with power supply terminals are 24 VDC specifications

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 1 2 P N SZ3000-42-2A-DSZ3000-42-1A-D For D-sub connector D side 1 2 1 2 P N SZ3000-42-4A-DSZ3000-42-3A-D For flat ribbon cable 26 pins D side Note) The assembly part numbers with power supply terminals are 24 VDC specifications

CJ2

Nil S N 2 pcs. 1 pc. n pcs. N Non-locking type C95 Manual release CP95 NCM Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

CLS

n = 2, 4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80

2 Phase Stepper Motor/Without Motor Brake Series LXS

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 C Work piece mounting reference plane Refer to Cross section C-C. depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B (mm) Cross section C-C 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 D side SZ3000-40-2A-D For D-sub connector 1 2 P N SZ3000-40-1A-D 1 2 1 2 P N D side SZ3000-40-4A-D For flat cable 26 pins SZ3000-40-3A-D Note) The assembly part numbers with power supply terminals are 24VDC specifications

CL

2 pcs. 1 pc. n pcs.

0.55

(34.4) 4 x 9 G: Approx. 300 H: Approx. 600 1/4, 3/8 PE port (For mounting) 49.8 1.2 [4(A), 2(B) port] (Lead wire 1/2 Manual override (Pitch) P = 33 [1(P), 5(R), 3(R) port] 30 L-type plug connector (L) (Station 1) (Station n) (Indicator light) + + + + + R R P 78.5 55.5 215 Approx. 300 35 196 2.5 98 55.8 L: Dimensions (Lead wire n: Stations L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 length) L1

15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

Stainless Steel 316

Pulling Strength TU0604 TIUB07 80 N 180 N TU1065 TIUB11 140 N 450 N TU1208 TIUB13 140 N 500 N TU0425 TU0805 Installation of Threads Model 50 N 160 N 110 N 250 N Without inner sleeve With inner sleeve Caution Reference: Thrust Force Occurring at 0.8 MPa 1. For M5 and 10-32UNF Tighten the screw within 1.0 to 1.5 Nm of the proper tightening torque.

Modular F.R.L. Units

8, 1/4 Bracket AF30-A 1/4, 3/8 5 AF40-A 1/4, 3/8, 1/2 Float type auto drain AF40-06-A 3/4 P.29 to 35 Mist Separator Series AFM AFM20-A 1/8, 1/4 AFM30-A 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40-A 1/4, 3/8, 1/2 AFM40-06-A 3/4 P.37 to 42 Micro Mist Separator Series AFD AFD20-A 1/8, 1/4 AFD30-A 1/4, 3/8 Bracket 0.01 Float type auto drain AFD40-A 1/4, 3/8, 1/2 AFD40-06-A 3/4 P.37 to 42

Electric Actuator with Integrated Guide

Power supply voltage Lead screw type Photo micro sensor 2 pcs., Photo micro sensor rail 1 pc. P N 1 2 0 100V AC 50/60Hz Ground ball screw Photo micro sensor 3 pcs., Photo micro sensor rail 1 pc. 200V AC 50/60Hz Rolled ball screw Proximity switch (A contact) 1 pc., Proximity switch rail 1 pc. Without motor Proximity switch (A contact) 2 pcs., Proximity switch rail 1 pc.

Modular/F.R.L. Units Series AC

Example) AC30D-F03DE1-SV-16NR Description Symbol Body size 30 40 20 Nil N Note 1) Rc NPT G Thread type F Note 2) + 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Port size + Without auto drain Float type auto drain (N.C.)

Round Type Hydraulic Cylinder

Number of auto switches Mounting type 2 pcs. 1 pc. "n" pcs.

Air Combination

ZA)-D AC60(A)-(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC60B-(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1.

High Purity Fluoropolymer

L1 L2 H G F M N E B Y LQ2R4C-F LQ2R4B-F LQ2R4A-F LQ2R3D-F LQ2R3C-F LQ2R3B-F LQ2R3A-F LQ2R2F-F LQ2R2E-F LQ2R2D-F LQ2R2C-F LQ2R2B-F LQ2R2A-F 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 18.5 1/8" 18.7 4 19 19.9 6 12 18 14 21.5 1/4" 22.5 21.5 23.5 1/4" 5 26.2 22 9 18 24 19 25 26 3/8" 25 27 3/8" 6 33.1 21 28 11 22 30 23 29.5 32 1/2" LQ2R4D-F LQ2R5D-F

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

N L2 E LVH LQ2L2A-M LQ2L2B-M LQ2L2C-M LQ2L2D-M LQ2L2E-M LQ2L2F-M LQ2L3A-M LQ2L3B-M LQ2L3C-M LQ2L3D-M LQ2L4A-M LQ2L4B-M LQ2L4C-M LQ2L4D-M LQ2L5A-M LQ2L5B-M LQ2L5C-M LQ2L5D-M 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1/8" 20.5 LVD 38 24 18 19.9 19 LVQ 1/4" 18 LQ 43 42.5 43 42.5 52 51 52 51 59 58 59 58 1/4" 22 LVN 28 24 26.2 22 3/8" 21.5 TI

Possible to transfer a workpiece at low-speed.

Size Low-speed specification CRA1 10 20 30 50 Number of auto switches CRQ2 Nil S n 2 pcs. 1 pc. n pcs. MSQ Thread type Port type Size MSZ M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 10, 20 Nil Auto switch CRQ2X MSQX CRQ2X MSQX TF TN TT Nil Without auto switch (Built-in magnet) For applicable auto switch models, refer to the table below.

AC Servo Motor Driver

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?