10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

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Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

[Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings (Straight), Plumbing Thread Type: -, Plumbing Thread Nominal: -, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

AC Servo Motor Driver

INSTALLATION 2 1 to 2 6 2.1 Installation direction and clearances . 2 3 2.2 Keep out foreign materials . 2 4 2.3 Cable stress . 2 5 2.4 Inspection items . 2 5 2.5 Parts having service lives . 2 6 3.

LEC-OM02904

PB35 0.00 PB36 0.00 PB37 100 PB38 0.0 PB39 0.0 PB40 0.0 PB41 1125 PB42 1125 PB43 0004h PB44 0.0 PB45 CNHF 2 2 0h (1) 0 22 2(2) [Hz] [Hz] 0 1 2250 5F 4.5 2 (2) 0 -40.0dB F -0.6dB 1. C4 TM MR Configurator2 2. 7.7 5 19 5 5.3 (No.PC) * * ** 5.3.1 No.

Electric Actuator

B > 2 : . ; = 8 A A @ A-A No.

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

Rotary Actuator/Vane Type

2 CRQ2 No.

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

Vacuum

OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

Rotary Actuator

If the load is divided into the 2 cylinders: The center of gravity of load 1 matches the shaft. The center of gravity of load 2 differs from the shaft. Obtain the moment of inertia of load 1: 2 r12 )1 = m1 Load 1: )1 Load 2: )2 2. Obtain the moment of inertia of load 2. 2 r22 )2 = m2 + m2L 2 3.

CRBU

/2 wire type, Connector/2 wiretype No connector type is available for solid state switch 3 wire style.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

Rotary Actuator/Vane Style Series CRB2

Stopper ring Block CRJ CRA1 CRQ2 Stopper ring Block Block Block MSQ Counterclockwise Counterclockwise 2> 2-2> MSZ The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from end of rotation q to end of rotation w.

Electric Actuator

Step 1 Step 2 Check the cycle time.

Manifold Specifications

Thread type 02 2 stations Standard Nil NPT Rc Plug-in type with D-sub connector (Manifold base) (2 position single) (2 position double) 2 stations are needed to mount control unit.

VKF300

Models Symbol (A) 2 Effective area mm (Cv factor) Operating pressure range MPa {kgf/cm} Port size Valve model Weight g (grommet type) VKF33 3.6 (0.2) 2 3 0 to 0.7 {0 to 7.1} VKF33 Y (for low power consumption, DC2W) 2.7 (0.15) 2 3 3 (R) 1 (P) Note 1) M5 x 0.8 Rc(PT) 1/8 Body ported VKF33 E (for long loading time) 2.7 (0.15) 80 2 3 VKF33 V (for vacuum) 3.6 (0.2) 2 3 101.2kPa to 0.1 {1Torr