PFxx-OMX0007

Flow switch flow setting and functions PF3A703H/PF3A706H/PF3A712H IO-Link function PF3A703H/PF3A706H/PF3A712H-L Function selection mode In this mode, each function setting can be changed separately. In measurement mode, press the S button for 3 seconds or longer to display [F 0]. Press the or button to select the function to be changed.

Air Cylinder Series CS1

Foot style CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 CS1-L25 CS1-L30 Flange style CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 CS1-F25 CS1-F30 Single clevis style CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 CS1-C25 CS1-C30 Double clevis style CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 CS1-D25 CS1-D30 Order two foot brackets per cylinder.

4-channel Flow Monitor ( compatible)

[F20] External input setting is completed Input signal: Connect the external input to GND for NPN type. Connect to Vcc for PNP type. 30 msec. or longer. When the input signal is ON, the screen will display [ooo] for 1 second. After turning OFF the input signal, flow accumulation resumes (displays peak value and bottom value) within 30 msec.

BP1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Bore size (mm) 125 140 160 180 200 Foot style CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 Flange style CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 Single clevis style CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 Double clevis style CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 Order two foot brackets per cylinder.

BP1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

CS1

Foot CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 CS1-L25 CS1-L30 Flange CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 CS1-F25 CS1-F30 Single clevis CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 CS1-C25 CS1-C30 Double clevis CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 CS1-D25 CS1-D30 Order 2 foot brackets for one cylinder.

Digital Flow Monitor

. -24No.PF-OMU0007-D Flow specification when [Ft] is selected by the units selection function Model PFG3#0 Model PFMB7201 PFMB7501 PFMB7102 PFMC7102 PFMB7202 PFMC7202 PF3A703H PF3A706H PF3A712H SMC Flow Applicable Switch PFMC7501 Rated flow range 0.08 to 7.06 cfm 0.2 to 17.7 cfm 0.4 to 35.3 cfm 0.8 to 70.6 cfm 1.1 to 105.9 cfm 2.2 to 211.9 cfm 4.5 to 423.8 cfm Instantaneous flow -0.36 to

LV50-OMQ0002

[F10] Sub screen Page 41 Flow direction [F20] External input Page 45 [F22] Analogue output Page 46 Free range analogue output for instantaneous flow: OFF [F30] Accumulated value display Page 47 OFF [F32] Setting of flow direction / back flow detection function.

KT10

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

SL5200

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

AZ1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CLS

selections in accordance with the method given on page 9-9-6. 1569 180 200 998 250 813 9-9-9 10 Series CLS Rod Boot Material Mounting Bracket Part No. 125 140 160 180 200 250 Bore size (mm) Max. ambient temperature Symbol Rod boot material J 60C Foot (1) Nylon tarpaulin CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 CS1-L25 110C K Flange (2) Heat resistant tarpaulin CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20

LEC-OM02904

(FR-BSF01FR-BLF) 11 26 11 (2) (a) () TDKZCAT3035-1330NECTOKIN ESD-SR-250 ZCAT3035-1330(TDK) [] [mm] [mm] 10100MHz 100500MHz 341 391 131 80 150 301 TDK (ZCAT3035-1330) ZCAT3035-1330 (b) () ACAC ON OFF MC MC SK 20cm 20cm ()CR-50500(OKAYA) C R [30%] [mm] AC[V] [F20] 625VAC50/60Hz 60s -2000VAC A W G 1 8 1 5 1 250 0.5 50(1/2W) 3 . 6 50/60Hz 60s C R 5 0 5 0 0 6 1 6 1 3 0 0 m i m 3 0 0

Cylinder with Lock Series CLS

CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 CS1-F25 Single clevis type CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 CS1-C25 Double clevis Note 3) CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 CS1-D25 Note 1) When ordering foot brackets, 2 pcs. should be ordered for each cylinder. Note 2) 125 to 250 front flange types use series CS1 long stroke flanges.

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.~ Vacuum 12-18 14,16 tube entry Applicable 110119 14,16 tube tube dia. f20 -f32 9l4,16,8 tube ri.~ , f40 -1s0 16,18 tube ~2 18 M8 x 1 Male thread . . Thread f lO 11 '6 MlO x 1 Male thread ~f'dpun~ing, dia. 120 -132 ' MlO x 1Male thread .. 40 -~ M14 x 1Male thread Buffer type Witho~t non-rotation .type (J ). non-rotpli;'~ tY~(K ) .. , .

LEC-OM07605CN

(2) (a) () TDKZCAT3035-1330NEC TOKINESD-SR-250GRFC-13 ZCAT3035-1330(TDK) [] [mm] 131 10MHz100MHz 100MHz500MHz 80 150 3 9 1 301 34 1 (ZCAT3035-1330) (B) () AC ON OFF MC MC SK 20 cm ()CR-50500(OKAYA) C [30%] mm] R AC [V] [F20%] :625V AC50/60Hz 60s -2000V AC 50/60Hz 60s 250 0.5 50 (1/2W) AWG 18 (18.5+2)1 151 3.6 61 61 300 300 481.5 161 (18.5+5) DC 4 2 + RA 11 21 11.