CXS

20 CY 15 10 MG 0.1 10 CX 0.1 6 6 D-X 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 20Overhang L (mm) Overhang L (mm) Graph (4) V = Up to 800 mm/s (Up to 700 mm/s for 15, 20) Data CXSJM CXSJL Graph (3) V = Up to 600 mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15

CXS

Select the graph that corresponds to the imaginary stroke l. l k Imaginary stroke l = (Stroke) + k + l k: Distance between the center and the end of the plate 20 6 mm 25 32 8 mm (Example) When using CXSM20-10 and l = 10 mm: Imaginary stroke l = 10 + 6 + 10 = 26 Therefore, the graph used for your model selection should be the one for CXSM20-30. 8-28-15 15 Series CXS Vertical Mounting Graph

REA/REB

Speed 600 mm/s REAS25 8 4 7 10 11 6.5 26.4 16 8.5 70 54 40 20 14 REAS32 8 5 7 12.5 14 8 33.6 20 9.5 86 66 46 24 16 REAS40 10 5 10 12.5 14 8 41.6 25 10.5 104 76 57 25 20 J x K HP HS HT L LD M MM N NN Model REAS15 M8 x 1.0 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5 x 0.8 7.5 REAS20 M10 x 1.0 45 25.5 10 M6 x 1.0 x 9.5 70 5.6 10 M6 x 1.0 9.5 REAS25 M14 x 1.5 53 23 10 M8 x 1.25 x 10 70 7 10 M6 x 1.0

ITV

-600 (Option) 36 4 x M5 x 0.8 thread depth 6 mm L-bracket L-bracket assembly P398020-601 (Option) 15 25 7 2.3 45 10 33 (8.5) 50 828 B Electro-Pneumatic Regulator Series ITV1000/2000/3000 Dimensions (16 points preset input, 10 bit digital input, CC-Link, DeviceNet, PROFIBUS DP and RS-232C) 16 points preset input 10 bit digital input M12 x 1 Signal cable connection thread (Plug type) M12 x

MHZ2/MHZJ2

40 30 0.6MPa, 0.7MPa 30 0.3MPa Gripping point 0.3MPa 0.4MPa L 20 0.4MPa 0.5MPa 0.5MPa 20 0.6MPa, 0.7MPa 10 10 MHZJ2/With dust cover 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L mm Gripping point L mm H MHZ 2-16 MHZ 2-16 60 60 Pressure 0.2MPa 50 50 Gripping point Pressure 0.2MPa L Overhang H mm Overhang H mm 40 40 0.3MPa 30 30 0.4MPa 0.3MPa Internal gripping 0.5MPa 0.4MPa 0.5MPa 0.6MPa

Air Cylinder

e 10.2 10.2 f f L L + Stroke h + L + Stroke h + L S + Stroke ZZ + 2L + 2 x Stroke (mm) Bore size Stroke range (mm) A AL B B1 C D E F G H1 J K KA M MM (mm) 40 50 63 80 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 8 M8 x 1.25 M8 x 1.25 6 7 7 14 18 18 22 26 11

Air Fittings & Tubing

Weight (g) a b M2 L d M1 16 17 2 2 4 6 KQ2N04-06 KQ2N06-08 17 18.5 6 8 10 12 16 38 42 47 51 55 2.5 4 6 8 9 8 KQ2N08-10 21 18.5 13.2 10 KQ2N10-12 22 21 18.2 12 KQ2N12-16 25 22 29 Tube cap: KQ2C Tube O.D.

Cylinder with Lock

CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 40 50 63 80 100 40, 50, 63 80 100 0.040 0.076 3 x 18 l Polished round 10 3 46 38 4 10 0.050 0.093 3 x 18 l Polished round 12 3 55.5 47.5 4 12 0.050 0.093 4 x 25 l Polished round 16 4 71 61 5 16 m l 0.050 0.093 4 x 25 l Polished round 18 18 4 76.5 66.5 5 L 0.065 0.117 4 x 30 l Polished round 20 20 4 83 73 5 0.065 0.117 4 x 36 l Polished round 24

Applicable Auto Switch Model

Dimensions ( ): D-A93 Operation Range ( l Dimension) (mm) Bore size 6 4.5 Operation Range ( l Dimension) (mm) Actuator series MXQ MXP MTS CXT MK MK2 RSQ CEP CY1R 25 9 32 40 50 63 20 8 15 16 7 5 8 5 10 12 6 5 Bore size 6 5 Actuator series CDU CDQS CDQ2 MY1 MXU MXW MXF MXS 32 14 40 50 63 80 100 25 12.5 10 20 11 10 16 9 7.5 12 10 6 8 5 8 10 7 9.5 8 9.5 7.5 10 6 7.5 7.5 6 6 9.5 9.5 9.5 11.5 9

0.4

Cylinder port Refer to the dimensions of each kit for L dimension. NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

ZP

10 M14 x 1 19 4 10 146 78 66 48 50 20 143 88 30 153 98 50 198 118 75 50 Dimensions Per Vacuum Inlet Model L M Fitting part min. hole size Vacuum inlet direction q Pad dia.

Vacuum

(mm) 2, 4,6, 8, 10. 13, 16, 2 0 , 2 5 , 3 2 , 4 0 , 5 0 10, 13, 16,20 25,32, 40, 50 10,16,25,406,8, 10,13, 16,20 25,32, 40, 50 :otqq, NBR (black). Silicone (while). Urethane (brownl, Fluorine (black with markl NBR (50"), Sil'cone (40"), Urethane (60"), Fluoine (60") , : l . . : ] ] : l l How to Order Pad dia.

Digital Flow Switches Series PF2A

set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

+ 1/2 stroke D E e C B AL H1 L RR1 B C CZ CX 10.2 f l F K A N BN Hole dia.: CDH10 h + l Shaft dia.: CDd9 H S + Stroke ZZ + l + Stroke ZZ + Stroke Z + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C CDH10 CX CZ D E F GA GB GC GD GL GR H1 Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 96 1/4 1/4 44 10 +0.058 0 15 +0.3 +0.1 29.5 16 32 10 85 15 26 54 10 10

Rotary Clamp Cylinders

Operating range Cylinder model C D 8 8 8 8 Mounting bolt size M3 x 50 L M3 x 60 L M3 x 50 L M3 x 60 L M5 x 75 L M5 x 85 L M5 x 75 L M5 x 85 L M5 x 85 L M5 x 95 L M5 x 75 L M5 x 85 L M6 x 95 L M6 x 130 L M8 x 100 L M8 x 130 L 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20

Vacuum

(mm) 2, 4,6, 8, 10. 13, 16, 2 0 , 2 5 , 3 2 , 4 0 , 5 0 10, 13, 16,20 25,32, 40, 50 10,16,25,406,8, 10,13, 16,20 25,32, 40, 50 :otqq, NBR (black). Silicone (while). Urethane (brownl, Fluorine (black with markl NBR (50"), Sil'cone (40"), Urethane (60"), Fluoine (60") , : l . . : ] ] : l l How to Order Pad dia.

Digital Flow Switches

Note 7) The display unit is comformed to CE mark. 4 Series PF2A Flow Characteristics (Pressure Loss) PF2A710,510 PF2A750,550 PF2A711,511 3.0 1.0 10 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 2.5 0.8 8 2.0 6 0.6 1.5 0.4 4 1.0 0.2 2 0.5 Flow rate (l/min) 0 100 10 25 50 75 5 2.5 7.5 0 5 10 15 20 25 30 40 35 45 50 0 1 10 Flow rate (l/min) Flow rate (l/min) PF2A721,521 PF2A751,551

XL

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External Operating time s Note 2) 0.05 0.1 0.21 0.24 0.26 0.28 Flange type KF (NW), K (DN) KF (NW) Body: Aluminum

Vacuum System Peripherals:

B Electrical entry 1 Symbol 2 3 4 5 6 7 8 9 10 Order of manifold (Station) G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) 05 07 10 13 H M Common Individual J K A B P5 Q5 None E14 E15 E16 E17 E18 E19 M15 M21 Nil L C CL CN Nil L Nozzle diameter L L type plug connector LN LO With lead wire Without lead wire Without connector For AC, only L or LO is available.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16