REA/REB

MK(2) REAR20 30 REAR25 30 RS Q G REAR32 30 REAR40 35 RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-19 19 Series REAR Construction: 10, 15 @1 q i y u e t r o !0 @2 !4 !5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @5 @6 !2 !

MQQ

2-M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB F Q Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y

High performance type Step Motor Controller (Servo/24 VDC)

Product Specifications 16 3.1 Basic specifications 16 3.2 Parts description 17 3.3 Outside dimension diagram 18 (1) Screw mount type JXC5H7#-#, JXC6H7#-# 18 (2) DIN rail mount type JXC5H8#-#, JXC6H8#-# 18 3.4 How to install 19 (1) How to install 19 (2) Ground wire connection 19 (3) Mounting location 20 4.

VFS

Material Description NVF2000-48 VFS21 VFS22 AXT624-19-1 AXT624-20-2 AXT624-20-2 AXT624-20-2 AXT624-26 AXT624-26 AXT624-26 !2 Detent assembly AXT624-11A VFS23/24/25 Return spring Gasket !1 Steel Hexagon socket head screw Stainless steel !0 o NBR !

Guide Cylinder Series MGG

Nickel plated Nickel plated C type snap ring for hole 15 Guide Cylinder Series MGG 63 to 100/MGGF #3 !5 #9 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @1 @0 !9 !0 #2 $0 A' For ball bushing #5 @5 #0 @8 @6 !7 !0 @1 !3 #8 !2 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Modular/F.R.L. Units Series AC

Octagon Port size T-interface C B Center of F.R.L. body D A C D E B A Model Port size Applicable model AC10, AC10B AC20, AC20B, AC20C AC25, AC25B, AC25C, AC30, AC30B, AC30C AC40, AC40B, AC40C Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 M5 x 0.8 12 14 8 19 11 1/8 32 28 19 42 15 1/4 1/8 39 30 19 53 15 1/4 1/4 44 36 24 62 19 Caution on Mounting 3/8

Model Selection 1

/N.O./ Double acting Single unit LVD1/2/3/4/5-S 17-5-43 2, 4, 8, 10, 16 Tubing O.D.: 6, 10, 12, 19 mm 1/4, 3/8, 1/2, 3/4 inch 0 to 0.5 Pilot air pressure: 0.3 to 0.5 Direct operated, Tube extensions type N.C.

NCA1

1 3/8 2.34 7.4 2 7/16 2.52 400 (4") 1 3/4-16 1 1/8 4.7 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1/2 1.57 0.42 4.64 2.72 3.32 1 3/8 2.34 7.4 2 7/16 2.52 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-15-19 19 Series NCA1W Double Rod-Foot Style: NCA1WL (MS1 mounting style) ZM + 2 stroke P + Stroke Y + Stroke 2-EE (NPTF) WF + Stroke D across falts D across falts R 6-AB (Hole) LD + Stroke SL + Stroke R TA AO D C

NCA1

/8-16 1 1/4 1 1 15/16 1.75 3 3/4 2 3/8 4 7/8 3/4 3.1 1 1/8 1 1/8 3/8 9/16 5/16-24 0 3 1 1/2 3/8 19/32 1.3 1.06 2.48 2.19 325 (3.25") 1 3/4-16 1/2-13 1 1/2 1 3/8 2 7/16 2.34 4 1/4 2 5/8 5 53/64 1 1/8 3.9 1 1/2 1 1/2 1/2 7/8 3/8-24 3 3/4 1 7/8 0 1/2 1.57 1.18 5/8 2.72 2.76 400 (4") 1 3/4-16 1 1/8 4.7 1 1/2 1 1/2 1/2 7/8 3/8-24 4 1/2 2 1/4 0 1/2 1.57 1.18 5/8 1/2-13 2 1/16 1 3/8 2 7/16 2.34

AC Servo Motor Driver (CC-Link Type)

TL1 RX(n 2)7 Point table No. output 6 PT5 RY(n 2)7 Proportion control PC RX(n 2)8 Point table No. output 7 PT6 RY(n 2)8 Gain changing CDP RX(n 2)9 Point table No. output 8 PT7 RY(n 2)9 Reserved RX(n 2)A RY(n 2)A Position/speed specifying system selection to Reserved RX(n 2)F selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem

DOC1001322

Offset temperature Sets offset temperature. -20.0 C to +20.0 C [By default] 0.0 C Selects the offset mode. [ ] Disabled OFF / 1 / 2 / 3 [By default] OFF [ ] MODE 1 (2) Offset Mode Offset mode [ ] MODE 2 [ ] MODE 3 About offset function This function controls the circulating fluid discharge temperature with offset.

Vacuum Unit

ue DC() Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less FUNC Blue DC() Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Pilot valve for supply Pilot valve for supply + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k B C A B C A Coil + + Max. 80 mA Residual voltage: 2 V

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

(n 2) /2 n = 2, 4, 6, 8 10 + 40 (n 2) /2 n = 2, 4, 6, 8 15 + 40 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 15 D-M9mAV n 10 + 30 (n 2) /2 n = 2, 4, 6, 8 15 + 30 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 15 D-A9m n 10 + 40 (n 2) /2 n = 2, 4, 6, 8 15 + 40 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 D-A9mV n 10 + 30

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

HRX-OM-Q026

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil. 1-5 1.7.2 Disposal of product . 1-5 1.8 Material Safety Data Sheet (MSDS) . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRSH-A(Air cooled type) . 2-2 2.2.2 HRSH-W(Water cooled type) . 2-3 2.3 Function of Parts . 2-4 2.4 Operation Display

Manifold Specifications

Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2(B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1/8 1/8 1/8 M5 x 0.8 C4 C6 0.46 0.62 0.79 0.39 0.33 0.36 0.12 0.16 0.21 0.75 0.83 0.91 0.32 0.27 0.36 0.19 0.20 0.24 Body ported For internal pilot Type VV5Z3-20P VZ323 Note) Value at manifold base mounted, 2 position single

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 -13- Auxiliary axis number Auxiliary axis number Axis selection rotary switch Axis selection rotary switch Control Control setting switch setting switch axis No. axis No.

10

9 16.5 19 15 23 6 Width across flats 10 39 19 (4 locations) K (58) 25 19 8 Closed E 9 9 25 Open F 13 13 43 G 4 x M5 x 0.8 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-16DZ 40 45 60 28 68 98 128 26 98 MHL2-16D1Z 70 75 90 58 110 170 200 50 152 MHL2-16D2Z 90 95 110 78 130 210 240 70 192 J dimension is at fully closed.

Cylinder

-I ~ ime-sions~m ~-~~~--~-Nose mount: CO JPB u \2~ . c: n p w , ,," B' p I./l,ao~ hab ,/ (' B Rod end without thread w ",. /"(2 " .' ,," / ro~ ~ e ~With , autO sw.itCh Bore size w i (mm) 15S): 20~t ; .

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)