VCC Qty. 1 6 11 2 7 12 3 8 13 4 9 14 5 10 15 2 port valve is specified for the gate valve and the cleaning valve. 7 valves + 1 valve + 4 valves = 12 valves 668
-so (rr s) E ; -40 {11 6) a 3 0 ( 8 7 ) E 3 -2o (5.8) ' -1O(2.91 0 10 20 30 40 50 60 70 80 90 100 1r0 120 lo 7t (1 4j (2 1) (2 A) (3 5) (4 2) Suclton flow rale It/min(scfm)] NIr $eries I Option Specifications Gauge Adapter for external mount gauge External gauge model Not 1) Adapier lits jn plac ol srandard iniegral g6ugs. Note 2) Order en6hal gauge rcd6lno sepalai6ly.
and before communication . 2-2 2.2 Communication specification . 2-2 2.3 Contact input signal . 2-5 2.3.1 Setting of contact input signal type and form . 2-5 2.3.2 Run/stopRunStopExternal switch signal . 2-7 2.3.3 External switch signal . 2-8 2.4 Contact output signal . 2-10 2.4.1 Contact output signal 1 to 3 .2-10 2.4.2 Contact output signal 4 to 6 . 2-11 2.5 Analog output signal . 2-14
Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed
) () () () () () () 24 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Release valve Supply valve Supply valve 1 1 2 2 stations Release valve 2 stations Release valve 14 Supply valve 2 Supply valve 3 4 3 stations 15 Release valve 3 stations Release valve 3 5 6 Supply valve Supply valve 16 4 stations Release valve 4 stations Release valve 4 7 8 Supply valve 17 Supply valve 5 5
9-1A AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi
4 1.3 12 26 15 4 Accessory option: Hexagon socket head screw (special screws) 7 2-2H9 +0.025 0 depth 2 3 3 7 11 11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 10 Series MHF2 Dimensions MHF2-8D2 Scale: 80% 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting
piping 2-Rc 1/4 (Hexagon socket head taper plug) VV VV 2-Rc 1/4 (Hexagon socket head taper plug) S 1.1 WX 17.5 Bottom port (ZZ) (Applicable O-ring) 2-10 Y Bore size (mm) 50 63 GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147
VFN 4-14-13 Body Ported 14 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ12Stations C Grommet (G) (5.5) (35) (11) 27.5 2-4.5 mounting hole n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P = 10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations Courtesy
:'11 \ooOD I . ., 1 ;' Nlodo6 ~~ " BK; :t.laXQ7 E :MijXOB y P.;pglicable tube, 0.0 G H 1>1;1 <0 . El 4 5 g ZPY2O!' 20 23 14 ZPY25l' 2$; 2&~ 14' 24 24 2<5 42 4 1.7 ZPY02U 2 2.~ 1.2 G.8 N4(::,"') 13.5 5 1.8 .Z!'Yo4l!; ZPY06U N4(~ 1 42 5 6 8 II 1 ,ll!: 145 5 1.8 4 4.8 is j ,. , 42.5 4.5 2.3 811(:t"' < 7 ;.8/4 , 1 1 6.5 M ' (mm) 6 7 2.5 r9# 1 < Ns(",,:"...)
) 71 12 ITV IC E REGULATOR P C M S VBA MPa ITV10 0.005~0.5MPa 0~10VDC OUTPUT INPUT VE Exhaust port Rc1/8 M3 x 0.5 Solenoid valve EXH GY MADE IN JAPAN VY1 Solenoid valve EXH OUT 2 G EXH (3) OUT (2) SUP (1) G 19.5 11 PPA AL (Optional) P3020114 Flat bracket 40 Port size 2 x Rc1/8, 1/4 Mounting hole 4 x M4 x 0.7 thread depth 6 mm through L-bracket OUT 2 G R3.5 15 25 7 22 2.3 45 (10) 30 (Optional
2, 4, 6, ) 10 15 60 60 + 45 (n 2) D-C73C D-C80C DH7C 10 15 65 (n 2) 2 15 + 50 ( ) 65 + 50 (n 2) (n = 2, 4, 6, ) (n 2) 2 15 + 50 ( ) D-B5/B64 D-G5NTL 10 15 75 (n = 2, 4, 6, ) 75 + 55 (n 2) (n 2) 2 20 + 50 ( ) D-B59W 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside
Note 2) Note 2) Flow direction (rightleft) R S Standard equipment With dew point indicator In case of two or more options, indicate them in an alphabetical order.
White Black Black Red Red Red Black Black White 1 station SOL. 2 stations 2 SOL. 3 3 stations SOL. 4 stations 4 SOL. 5 5 stations SOL. 6 stations 6 SOL. 7 7 stations SOL. 8 stations 8 (a) SOL. 9 9 stations (2) SOL. 10 stations 10 SOL. 11 11 stations (b) (1) Black White SOL. 12 stations 12 SOL. 13 13 stations SOL. 14 stations 14 SOL. 15 15 stations SOL. 16 stations 16 How to Calculate the
. 10-1 10.3 CONNECTION OF POWER SUPPLY. 10-2 Chapter 11 Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter
Part Material AXT662-11 (1: M5, 2: M3) 2 Sub-plate ZDC o Optional Parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws.
40 60 40 204 150 to 700 20 MTS 42.5 M26 X 1.5 32 159 9 10 40 40 60 40 217 150 to 1000 22 51 M32 X 2 40 181 10 11 53 53 77 44.5 247 200 to 1000 26.5 CC REC T/Rear trunnion H2 TDe9-0.025 -0.061 2-Rc(PT)P 2-NN G Relieving port Relieving port Width across flats B1 Relieving port M5 X 0.8 G Standard port Standard port H1 I 2-Eh8 TY D MM AL lNA TT K A TX TZ N N F S+Stroke H 40 Z+Stroke ZZ+Stroke
Applicable tube Lock nut thick 2, across flats 14 2.5 mm P.T. 2.0 mm O.T. 4.5 mm T.T. 5-6-11 10 2/3 Port Mechanical Valve Series VM100 Compact size. Piping options: Side piping, Bottom piping A variety of actuator types.
800) 258-9200-www.stevenengineering.com Y(PE) port 1/8 153(166) 141(154) SMC 108.5(121.5) 23(30) (A, B port) Y 12 50(63) 38(53) 5 3 32(42) 38(53) 23(30) 1 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port 2-3/8, 1/2, 3/4 X(PE) port 1/8 P port 30(42) 30(42) 10 (11) A, B port ( ): 3/4 2 position double : VQ7-8-FG-D double (Reverse pressure): VQ7-8-YZ-D 3 position closed center : VQ7-8-FHG-D exhaust