ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder Rod end thread Bore size 20 25 32 40 50 63 80 100 Rod end female thread Rod end male thread Nil M 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Cylinder stroke (mm) Refer to page 2 for standard and intermediate strokes. Applicable Auto Switches/Refer to pages 16 to 21 for further information on auto switches.
MLU Standard Stroke MLGP Bore size (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Standard stroke (mm) ML1C 20, 25 32, 40, 50, 63, 80, 100 Manufacture of Intermediate Stroke Description Part no. Spacer is installed in the standard stroke body. Refer to How to Order for the standard model no. on page 816.
Cylinder with Lock Double Acting, Single Rod 40, 50, 63, 80, 100 Series CNA2 How to Order JN CNA2 L 50 100 D With auto switch CDNA2 L 50 100 JN M9BW D With auto switch (Built-in magnet) Made to Order Refer to the next page for details.
Air Slide Table Long Stroke Type Series MXY 6, 8, 12 How to Order M9BW MXY 6 50 Mode to Order For details, refer to page 221. Number of auto switches Bore size/Standard stroke (mm) 2 pcs. Nil 6 50, 100, 150, 200 1 pc.
320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes are available. *1 Please consult with SMC for longer strokes.
Pin Clamp Cylinder Lock mechanism Clamp arm Series CKQ/CLKQ 50 Work Work LOCK Feature 1 Pin Clamp Cylinder 50 Series CKQ/CLKQ How to Order Port thread type Guide pin shapes Nil TN TF Bore size Rc NPT G R D Round Diamond 50 50 mm The diamond shape is for pin diameter of 17.5 or over.
Air Cylinder Standard: Double Acting, Single Rod 40, 50, 63, 80, 100 Series CA2 RoHS How to Order L 50 100 CA2 Z D 50 100 M9BW N W Z With auto switch CDA2 Made to Order For details, refer to the next page.
Tie-rod Type Hydraulic Cylinder Double Acting/Single Rod CHA Series 40, 50, 63, 80, 100, 125, 160 3.5 MPa How to Order Bore size 40 50 63 80 100 125 160 Cylinder options 40 mm 50 mm 63 mm 80 mm 100 mm 125 mm 160 mm Nil J K Nil N R H Without rod boot Nylon tarpaulin Neoprene cloth Both sides Without cushion With rod cushion With head cushion Aluminum tube Steel tube Rod boot Tube material
20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, 25, 50, 75, 100, 125, 150, 200 Up to 1500 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied
Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable
Height: 30 mm (LOW type), 100 mm (HIGH type) W H L2 T L1 [mm] Model C(L)KQG32 Compact cylinder type (Guide pin diameter: 12) C(L)KU32 Plate cylinder type (Guide pin diameter: 12) C(L)KQG50 (Guide pin diameter: 13) Clamping height LOW type HIGH type LOW type HIGH type LOW type HIGH type Clamping height H 30 100 30 100 24 54 Body thickness T 50 29 66 Body width W 50 70 66 Body length L1 127
wire 100 V, 200 V Solid state switch Reed switch 3-wire (NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire (NPN) Terminal conduit 12 V Relay, PLC IC circuit Yes 5 V, 12 V With diagnostic output (2-color indicator) 24 V 12 V Grommet 5 V, 12 V Water resistant (2-color indicator) 12 V 5 V, 12 V With diagnostic output (2-color indicator) IC circuit A96 A93
Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.
Standard stroke (mm) Bore size (mm) 25, 32, 40 50, 100, 150, 200, 250, 300 350, 400, 450, 500, 550, 600 1500 Stroke adjustment unit symbol For stroke adjustment unit, refer to page 1209. Intermediate fixing spacer is not available for end lock mounting side. Strokes are manufacturable in 1 mm increments, up to the maximum stroke.
A90 A90V No Reed switch Solid state switch 2-wire 24V A93 A93V Grommet 100V 12V Yes 3-wire (NPN equiv.) IC circuit 5V A96 A96V Mounting bracket part nos.
Opening window size: 50 x 336 mm Valve type 1Insert type (Without body) 2Cassette type (Standard) 3Cassette type (Half MESC) Number of axes and seal type: One axis bellows Applicable water size: For 300mm wafer Table 1.
Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.
(mm) 50 63 80 / 1.5MPa 1.0MPa -1060() () 1.4 0 (Rc,NPT,G) 1/8 1/4 1/4 1-2. (N) 50 63 80 40.3 78.5 88.2 139.5 174.6 217.3 1-3. (mm) 50 30 63 30 80 40 1-4. (mm) (Kg) 50 1.70 / 63 2.78 80 4.96 4 - RS1H 1. mA 2. V(m/min) (Kg) 3.
CH2 H B B 50 100 CH D2 H B B 50 100 M9BW With Auto Switch With auto switch (built-in magnet) Port and cushion valve positions Refer to page 359. Bore size 32 40 50 Mounting type 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Made to Order specifications For details, refer to page 359.
Bore size Auto switch Port thread type 20 25 32 40 50 20 mm Without auto switch (Built-in magnet) Nil 25 mm M5 x 0.8 Nil 32 mm For the applicable auto switch model, refer to the table below. Rc 40 mm TN TF NPT 50 mm G Rear plate Bore sizes 20 and 25: M5 x 0.8 only Nil R Without rear plate With rear plate Cylinder stroke (mm) Refer to Standard Stroke on page 393.