Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

t q w e r t i i o o !

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2 @1 @2 w r Description Replaceable kits list Component parts No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

VZS

Rc1 8 VVZS2000-R-01-1 VVZS2000-R-01-2 Body type Plug-in type VVZS2000-20A-1 Non plug-in type VVZS2000-20A-2 Part no. Interface regulator (P port regulation) Spacer Interface regulators can be placed on top of the manifold block to reduce the pressure of each of the valves.

MVGQ

port (with plug) MK(2) RS Q G 54.4 (GZ: 55.1) [56.1] RS H A RZQ MI W S M5 x 0.8 P port CEP1 C + Stroke B + Stroke A + Stroke M5 x 0.8 R port CE1 CE2 [ ]: Denotes AC.

With Factory Installed

AI Inlel pressure 0.7MPa /71 kgf/cm21 , outlel pressure 0.2MPa 1 2.0kgflcm21. flow rale 20 / min (ANR) AR2001-02 AR2001-02 0.25 -r-=:: lf~1 ~ "'" ~ :'.. ::;; 0.2 ~r. " 5 OJ> ~ o . 3k-1-j.-:=.

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_~M~a~jo~r~D~im~e~n~s~io~n~s~_ ___ (mm) Clamp Cylinder: Series CK1 SpCpd controller Cushion valve N s-t-Strok.e ___ _ -, ...!t ,r' M -1 6X 1. 5 \ ~~-.~. . I~r ~ 1~ -~ -~t l -,? ~ . ~ I 'S " .. ! /'Vvf..>---'---r-'-~ /i . -l ,~ -0 I .. .i ~ l d1h across flatsl]" 4M6 Screw depth 1 3 ~J:"!-~/ _ H _ O _ '"_ ' _ ' 2 -.< ",, ' +"."

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut

MHL2

(mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) MHL2-40D1 2 MHL2-32D1 2 MHL2-40D MHL2-32D Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa 500 500 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa 300 300 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) Gripping force (N) Gripping force (N) 400 400 250 250 0.5 MPa 0.5 MPa

Modular Type Regulator Series AR

r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

MHL2

20 20 40 80 120 160 200 40 80 120 160 20 40 60 80 100 120 140 0 0 0 20 40 60 80 100 120 0 Holding point R (mm) Holding point R (mm) Holding point R (mm) Holding point R (mm) MHL2-40D MHL2-40D MHL2-32D MHL2-32D 2 1 2 1 500 500 0.6MPa 0.6MPa 300 300 0.6MPa 0.6MPa 400 400 Holding force (N) Holding force (N) Holding force (N) Holding force (N) 250 250 0.5MPa 0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa

AC Servo Motor Driver (SSCNET Type)

Acceleration/ deceleration time 0 ~ 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min) Move distance 0 ~ 2147483647 pulse Sets movement distance. -35- 6.6.2 Motor speed Configuration Motorspeed (r/min) configuration. * r/min (rpm): Indicated motor rotation speed (motor rotations/min) Rotation speed must be between 0 and the

3 Port Solenoid Valve Metal Seal Series VZ200 1

Note VZ4000-22A For VZ42 AN110-01 Noise reduction: 21 dB (13 x 38l ) AN203-02 Noise reduction: 25 dB (16 x 36l ) Description R 1/8 R 1/4 (2) Silencer Note 1) For body ported type Note 2) For sub-base mounted type 4-15-10 11 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ400 How to Order Option 01 1 2 VZ4 G 1 Foot bracket F Silencer U Foot bracket + Silencer K Only body

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

R.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

R.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Note 1) Assembly includes a bracket and set nuts.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Note 1) Assembly includes a bracket and set nuts.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

OMR0032

controller PP+B7 1k PPB8 Current limit resistor R NP+B9 1 k NPB10 Current limit resistor R (b) Upper level equipment is PNP type Power supply for pulse train signal Positioning Unit side Inside the controller PP+B7 1k PP-B8 Current limit resistor R NP+B9 1k NP-B10 Current limit resistor R 27 - ii.